%PDF-1.4
1 0 obj
<<
/Title ( D e s i g n a n d S i m u l a t i o n o f M E M S A n e m o m e t e r)
/Producer (wkhtmltopdf)
/CreationDate (D:20151204202945)
>>
endobj
4 0 obj
<<
/Type /ExtGState
/SA true
/SM 0.02
/ca 1.0
/CA 1.0
/AIS false
/SMask /None>>
endobj
5 0 obj
[/Pattern /DeviceRGB]
endobj
9 0 obj
[0 /XYZ 62.4599999
723.779999 0]
endobj
10 0 obj
[0 /XYZ 62.4599999
599.940000 0]
endobj
6 0 obj
<<
/Type /Page
/Parent 2 0 R
/Contents 11 0 R
/Resources 13 0 R
/Annots 14 0 R
/MediaBox [0 0 612 792]
>>
endobj
13 0 obj
<<
/ColorSpace <<
/PCSp 5 0 R
/CSp /DeviceRGB
/CSpg /DeviceGray
>>
/ExtGState <<
/GSa 4 0 R
>>
/Pattern <<
>>
/Font <<
/F7 7 0 R
/F8 8 0 R
>>
/XObject <<
>>
>>
endobj
14 0 obj
[ ]
endobj
11 0 obj
<<
/Length 12 0 R
/Filter /FlateDecode
>>
stream
x]Ko6й@cb)Czr(Eus߯7V
GCJ븆kE!9o|__W>/VYryiڻoϫfffjrm{ww^Z>+Ά6p?_6j/7ʝu}S}y,sG[źm\}l\]6|Vxn8ίW_u@6hXUןVUW_q+ԛ+{5[+-\>sW.헼{+^i UePL7W>\q!{X8\"H`ރ
-Ֆׄklzx]_p=6ᬶ-GCֵų3X~Z/(mg8/g.3!Xjzk
WmE⻝]U$p'->$ 8ͧQ|j=s{.7@M\}auG&
YOcpH$c.~Do<L^6ᅋļnd
dw#{CGR2Ӱ}o ENw&{Pr]LKVTZVU]エQ̜4zLt8KQruxEM#WD<(<`aJayƃ)V
Tx (@/WЌV
2Jf.daO 0߸a8DݹS
aLMc
Ո~L})5/yt_
:?*z+o?`K
ZUX$|dQ5hK<;!e0:nn:
0k+T#!d`1DcΔD&SG3>U$f4ʸ;7
oK2\SFwPgabvE>n n#&b
dHuG|?v+i4
[MYȃs3PRS]Ǒ|Se2՜jPQvɽ`Ո"Ov?(0Ζr;ޜXr$ܕb.P@]bbn| q,.4+ 1!)tB:T\OPD; pgJb)q]DĹ $`!p}H+aߘ9
p
BtYL X
_Gxg%e\?:?OƤpvpܷϸ5BBZ
sJFh
(͢Dkj}%J"\"2z*>.sY`pF8@%'I0H.ޔP4qI^zP8ҁXX<*
ɁeGU$_jKyM<ԅ&<%4h!XS#o%S%@n<.>L LhD0I8Z*,..~ r
C9+.vWdaZcmh0\baj
zgC%rzHDڔ1jmeA%GWOǭg&fo(%EzvLyǨcbqT39` Dll] mu@y21y1`O E2RbjPX@+b5,2Ȃejx͏]Mn"hIAG'O&R,|fxb x5VBs[yQ`UD4!K֍NlrDLjih矘6.g4X<hA3i}TS
p.22Dո$Zc*x1!HAޮ f3u$C)MCI)椉bE
l4(EV8*iy;y:8EdfLΦQ7@,2q1P%0Pa4P* "|j,>ߞIF
(; ENc[uS}ǸuTA4Z]`(GG;dAfyI(B.|^TA:Oi,ɀI!,u%q4E2I!(NQby!^[FAōߥDR/`nsJI'[@# ;zhLs_yHC|7 '{LG.Β:O~X-O ""!hۊ,m08
$q)ZтDx19AxGW=x?3ZS%cyoWi7(=>le!>+?
] =$kN%Uk
5r~;)n wIr$w-M邥zj^;֩'EEHRT#yPV0-Q30#Fǭs:izXȈy?]$5n\ҨNˡ/U8ל<0[H^*oEIFP+6KU0f
mL"13~!i#4.<]R&8,nk)GMgI^0Zm+H+HRaqhNr٣`"|6ÁOM&^Ak
帪""]QcQ&\IҕZXpA|~98ZJCp&cŔRP'0:J`'9
acaBN/rThOpװ NŁ$ ͧUp`LqbE4)@K)=$Kd"7pz1yrQ\4Gf95 ?߅ȔGڍ!V^O[
t=e4U/4Zwe%=@~8$@bK;FP*bg=xxX?epyOEm
v[
6gCHɬ}]z\,@1Z9tC &$F|!ph
B_=P8t|zJg&_AkdžI_>"EW.~}+\zT}7\0Xendstream
endobj
12 0 obj
3395
endobj
16 0 obj
<<
/Type /XObject
/Subtype /Image
/Width 944
/Height 709
/BitsPerComponent 8
/ColorSpace /DeviceRGB
/Length 17 0 R
/Filter /DCTDecode
>>
stream
JFIF ` ` C
C "
} !1AQa"q2#BR$3br
%&'()*456789:CDEFGHIJSTUVWXYZcdefghijstuvwxyz
w !1AQaq"2B #3Rbr
$4%&'()*56789:CDEFGHIJSTUVWXYZcdefghijstuvwxyz ? ;?cO ?g~Y˪^#ܺN$gjsk?ۿ L ʽ &]~ \8קNSIJI$쒹NS9уnmij<;_?ۿ L ʽ q' \|C / BgU߂ &^ WGc A a ψ1 #ÿۿ L ʽ _("?r ?xw;w W ÷~ Й {=^EۙO ._ >! n 3 *zv?} ǫhs1 r 0 ? ߂ &^ Q / BgU{nf??_ع<;_?ۿ L ʽ q' / cG÷~ Й {=G;w W 4Q D 9b v?} Ǩ n 3 *zƊ?3/\|C / BgU߂ &^ WGc A a ψ1 #ÿۿ L ʽ _("?r ?xw;w W ÷~ Й {=^EۙO ._ >! n 3 *zv?} ǫhs1 r 0 ? ߂ &^ Q / BgU{nf??_ع<;_?ۿ L ʽ q' / cG÷~ Й {=G;w W 4Q D 9b v?} Ǩ n 3 *zƊ?3/\|C / BgU߂ &^ WGc A a ψ1 #ÿۿ L ʽ _("?r ?xw;w W ÷~ Й {=^EۙO ._ >! n 3 *zv?} ǫhs1 r 0 ? ߂ &^ Q / BgU{nf??_ع<;_?ۿ L ʽ q' / cG÷~ Й {=G;w W 4Q D 9b v?} Ǩ n 3 *zƊ?3/\|C / BgU߂ &^ WGc A a ψ1 #ÿۿ L ʽ _("?r ?xw;w W ÷~ Й {=^EۙO ._ >! n 3 *zv?} ǫhs1 r 0 ? ߂ &^ Q / BgU{nf??_ع<;_?ۿ L ʽ q' / cG÷~ Й {=G;w W 4Q D 9b v?} Ǩ n 3 *zƊ?3/\|C / BgU߂ &^ WGc A a ψ1 #ÿۿ L ʽ _("?r ?xw;w W ÷~ Й {=^EۙO ._ >! n 3 *zv?} ǫhs1 r 0 ? ߂ &^ Q / BgU{nf??_ع<;_?ۿ L ʽ q' / cG÷~ Й {=G;w W 4Q D 9b v?} Ǩ n 3 *zƊ?3/\|C / BgU߂ &^ WGc A a ψ1 #ÿۿ L ʽ _("?r ?xw;w W ÷~ Й {=^EۙO ._ >! n 3 *zv?} ǫhs1 r 0 ? ߂ &^ Q / BgU{nf??_ع<;_?ۿ L ʽ q' / cG÷~ Й {=G;w W 4Q D 9b v?} Ǩ n 3 *zƊ?3/\|C / BgU߂ &^ WGc A a ψ1 #ÿۿ L ʽ _("?r ?xw;w W ÷~ Й {=^EۙO ._ >! n 3 *zv?} ǫhs1 r 0 ? ߂ &^ Q / BgU{nf??_ع<;_?ۿ L ʽ q' / cG÷~ Й {=G;w W 4Q D 9b v?} Ǩ n 3 *zƊ?3/\|C / BgUy|6%7x>G4=Nݚ,W;X`k)w K}L}NsiM4zSF I@ n ɗx3߿Ƽ; &]~ ??)/?J
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
(
*[Vhˈ0RǠ&G"0eaA".e{ZHbGx:pzVӝVy6aqMWbT}AUʆ~#EB\n\ȪkZW,dh%gUB.MhD⚹V_: j!5MNm d1n3Y~2 MN
<:VxWNe@DLUps[˕|Kg;e+smITbloz/qGIĬ@?ZLEʾH9O'mC}zLREkø y^J?վ~Z1En=CV\Ujx;]N==+F%GFNk0>zM^[>c3w}Je~ |p|E:-+W{/^ۻ۬Ikk_0uO"eԬ{xwL 5R/2 ۏ[&G