%PDF-1.4 1 0 obj << /Title (Finite Element Modeling of MEMS Chevron Thermal Actuators for Strain Engineering of Graphene) /Creator (wkhtmltopdf 0.12.3) /Producer (Qt 4.8.7) /CreationDate (D:20161118155331-05'00') >> endobj 3 0 obj << /Type /ExtGState /SA true /SM 0.02 /ca 1.0 /CA 1.0 /AIS false /SMask /None>> endobj 4 0 obj [/Pattern /DeviceRGB] endobj 8 0 obj [0 /XYZ 34.0799999 813.679999 0] endobj 9 0 obj [0 /XYZ 34.0799999 552.559999 0] endobj 5 0 obj << /Type /Page /Parent 2 0 R /Contents 10 0 R /Resources 12 0 R /Annots 13 0 R /MediaBox [0 0 595 842] >> endobj 12 0 obj << /ColorSpace << /PCSp 4 0 R /CSp /DeviceRGB /CSpg /DeviceGray >> /ExtGState << /GSa 3 0 R >> /Pattern << >> /Font << /F6 6 0 R /F7 7 0 R >> /XObject << >> >> endobj 13 0 obj [ ] endobj 10 0 obj << /Length 11 0 R /Filter /FlateDecode >> stream x]MoFW\6( ( _z(`@AFDbz]QL7H\<<>oeZ͟d}Uk[eeZOex|,raf/ϟW͕Ǜ_177|ZT벞Kfy?$?nSq-7jBo)ÅeL~RϬ[ÕʿGYo=8_L]3nzr |7,A-\d KB=p?p6e2WJ)[A>=$f.K f vV5p @w O ɇAP`07\t9R4UxNOǓ1 z3d aMЭaY$ ?օIaaO-ٺNEX.֯:67k~Կ/pao9Q[<ׁco޹ŵ?LvnLv Uryo1~C+RԲ!դc{cyصO}cet?}ZE;nbca@q{{.nqI]H;ʗeCjt)er5=]4 A36d{shC2"=<垌ckT 6>bͧ& 31DH}Kס>@+>p0}`*)uC: =|}]H}W A5 ]<2% MlLGSԭZϑ9ϑ39h=cq]g0v6&oؘčm]ob[Wglؖα&Fm8:9Ya8BI$-ʍFcej&Ã=` 70'8sx7[rr9&GC0Wºn`觵)b;В>-Qڝ"[\X IA <##InLa:XMG b; >uiL:QU^<3&05pAPP D3pw򶚖pX^Pir::`=Pl47%Th&leSnYt B$c9{j44@ :B\PB#7#Uc`fݺ벊W5b,ENq8`&xq! RԣDcRn(JlwUQ)q^A Cu ; 7>íyQn ot# 4+S 6ƢVbs[Pq MG0VX> +\5;fLfp&M4NU) d8ᾣ4gw9#], 8 G[0p"L\iKAbhP6.QȦZxLfAg[Ҕv( fxqdtط[߮NE+ y Ġ*& ,H.c!8~+R  2|unVB燥",UvsD8 [0̢YۣH^A{J46mtwgw)֎f( Y:[t bw,[b,$ G-9& cxvrG Kg'pa* h&oRKAVnxtD,P҃<=$Y endstream endobj 11 0 obj 2521 endobj 15 0 obj [1 /XYZ 34.0799999 813.679999 0] endobj 16 0 obj << /__WKANCHOR_2 8 0 R /__WKANCHOR_4 9 0 R /__WKANCHOR_6 15 0 R >> endobj 19 0 obj <> endobj 20 0 obj <> endobj 18 0 obj <> endobj 17 0 obj <> endobj 21 0 obj << /Type /Catalog /Pages 2 0 R /Outlines 17 0 R /PageMode /UseOutlines /Dests 16 0 R >> endobj 14 0 obj << /Type /Page /Parent 2 0 R /Contents 22 0 R /Resources 24 0 R /Annots 25 0 R /MediaBox [0 0 595 842] >> endobj 24 0 obj << /ColorSpace << /PCSp 4 0 R /CSp /DeviceRGB /CSpg /DeviceGray >> /ExtGState << /GSa 3 0 R >> /Pattern << >> /Font << /F6 6 0 R /F7 7 0 R >> /XObject << >> >> endobj 25 0 obj [ ] endobj 22 0 obj << /Length 23 0 R /Filter /FlateDecode >> stream x\KoFW\2wlYCzr(Er%ʵ:o8Y:@$;3OQKt]O-_w>)~zpI_]nUQD~<>gO#a~Uw5.:I/˗Qo}$k}}x!M%Ҳ;;q驥~NkxW}_OL'|!T_4d5I>.KOJҝ쳖\Hxq^85]|"BxrØbZS/Dp/-'gkay 'GW|Hg g͗x^a5,RkNc9RR*n'%Vnhj8 h$TZ@k}z> FjP8~ \:6ݫ~2bXVjH YZʉ]wB3Ckz#[ [ٰQΆ/ZA7>m8 H%!TkRK#aR͡4@@Q&:@|(FJ[P07h< [K9pqpER[ ^) iKцS HmڜdȠ 7&|޳182 FWc]~Zd rfid$ 1-M(~H aXǛA߀>K )3=xX Rřob ?Y~'~[rT>@5pR*fȨV& @  (]ֺnKT֐3JsGo8PsUz}8dљ?mlzqL԰d uN_KrshGQ( VOȍ0["*Cx<8yAm j+nh@/S85 ~ Ӈ)Co[} endstream endobj 23 0 obj 1606 endobj 26 0 obj << /Type /FontDescriptor /FontName /QABAAA+NimbusSanL-Bold /Flags 4 /FontBBox [-173 -307 1097 979 ] /ItalicAngle 0 /Ascent 979 /Descent -307 /CapHeight 979 /StemV 69 /FontFile2 27 0 R >> endobj 27 0 obj << /Length1 3800 /Length 30 0 R /Filter /FlateDecode >> stream x}W TS77 $$0@ȋy ^,PAPHRB[-Zsk=kq,rfmGut&(]˗!BL(Ѯx?Ph8oqԌ^;" iUs{FچZCHtbkv Qڰ]i!2F}?E9CEuVi6%vK,퓵P~r}̐ OIN_o2~lҘ^*E- 1֨fΨM,f#XQ;0 F}䓴GMSȁy-u:5A\J(Э |ŀ xVM7Ɯ&nx~чY!3 6@ȡ'_%x'yҫ$KwO>2_Vgxp~>2d̳)󆎋8BBي(I"dER)k @"U4FƎLAL/BGbwprt\b03/Bg|!"3 D+Em2 //# cMEFIb߁ ?_C)D& N:/ ?:\`^vphE@ DͤZW~pk]HY=gzX?8ݗ o{dkT$WP9&ڭy_1ßɶM8W?;T]! ~hw4ifsQL2"`njDmw%pq #~W t j4ԚP.ṉRڋJY3K8#ag}\ZOp$ sIẹ b*THm~>Q_.©":me=xFr^>p^rTT?眄B*2^V}#,=Mg>)wZ|7xEXIlys;7AyPeׅG2v]cx,o;C2t14[p0/=ŵGcѭ/ȵ:Q]SY BSJ &WJ*,j4ꤨ@U_NWџk#nglEq 2@"i P7c!L$,^|LPPj]us.rgA>7}Hr픯sUl}:߲0!e5+ bZ(lYj%BR*,AdՉq 丸p /3A&Y@@V2W\&7E}tÍAq.E&s>ƵO=x>L` ~ps"B 8N˟`OI( 5Idt"M$;.$LlVl:O_"HOFHw*b%ƹSROn7נ4QT> /ͳjxofh m ~3Ml$$ܒTUpp"Sdwiw$ FF.4f !$3q )"vRt$?^G,Bp!itp{w vqnjřsZJq {ݸyZ8ւ#۱܊ۑe6g$9urg \φ4 NZ3qOE-s9 endstream endobj 30 0 obj 2808 endobj 28 0 obj << /Type /Font /Subtype /CIDFontType2 /BaseFont /NimbusSanL-Bold /CIDSystemInfo << /Registry (Adobe) /Ordering (Identity) /Supplement 0 >> /FontDescriptor 26 0 R /CIDToGIDMap /Identity /W [0 [496 606 276 606 330 552 276 662 276 882 826 606 606 606 330 662 716 606 552 386 606 552 716 552 606 552 772 606 606 716 ] ] >> endobj 29 0 obj << /Length 567 >> stream /CIDInit /ProcSet findresource begin 12 dict begin begincmap /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> def /CMapName /Adobe-Identity-UCS def /CMapType 2 def 1 begincodespacerange <0000> endcodespacerange 2 beginbfrange <0000> <0000> <0000> <0001> <001D> [<0046> <0069> <006E> <0074> <0065> <0020> <0045> <006C> <006D> <004D> <006F> <0064> <0067> <0066> <0053> <0043> <0068> <0076> <0072> <0054> <0061> <0041> <0063> <0075> <0073> <0047> <0070> <0062> <0052> ] endbfrange endcmap CMapName currentdict /CMap defineresource pop end end endstream endobj 6 0 obj << /Type /Font /Subtype /Type0 /BaseFont /NimbusSanL-Bold /Encoding /Identity-H /DescendantFonts [28 0 R] /ToUnicode 29 0 R>> endobj 31 0 obj << /Type /FontDescriptor /FontName /QFBAAA+OpenSans /Flags 4 /FontBBox [-549.804687 -270.996093 1204.10156 1047.85156 ] /ItalicAngle 0 /Ascent 1068.84765 /Descent -292.968750 /CapHeight 1068.84765 /StemV 49.8046875 /FontFile2 32 0 R >> endobj 32 0 obj << /Length1 6988 /Length 35 0 R /Filter /FlateDecode >> stream xeY \SWֿ-I@T$!!( l/*JQ"ue]QֽZc[֯*i:wnxw!$ퟱg{6᝿| 1!I%%b2A}1K~0oV,sjtńU _ߩ(XD4l?Ŷ₊/}b 86 `$ ÌXcL<M|gDxa9 vdd3L`/Et5!C.a,b*ux_bcF/eZgC\D8Җ% J hS$XKn 0$[B8`[5<{lg?RZ^܇G2.@㧐+"m;8Ot2HTE\\T.*g':ra +t~>IA*U0I8s`?yŷ\ML"\#hȸZ%ԸN zHRb ?mZyOw5?enPN^.L /Y5Nl̦ ZJ(#pbF*Cg&^"AA3EP/x62ranZ`沉 #M"(&@VD]o+ MO㲭v/g8E_/ \GIA}Sj0H2`&\q aS Qݸ*p.}NSYW`GO6/R\uQk?^Q ZM_>rh A{qaB\-8 ܖZ!Q*N&Es‹n qægۯnJ8wShx;#on A}sAjG¨"Q qR+4r\&eh: biY5%ܼۆDvG.rlТGl2հnFVTXj {{O$OwI='9r`tjԮR4925]Z7ԔyEVWUbyBvVjӜ(]оaqϷ#9e=={FπD=DD)NsTH5jy%remr,dڴG{ u;Ϊ뚿e\j驩&0O[MMG zz*/.˟CY9]_jq ăV_8Ց`qbR9(#3ʪE! KO[|wYݲ<x﷼ln)iBȿ;9t5Uo,ݹ)dJdBg ,%YkX0˝wk2Qs`kb׮^ƥbܬHmwj2O&+zDR Ttjhb)9ב0h:C2;)(cu 'D>::5>yrb塅NljY?$\bΣJ#,Jg3iGTU*U%IiCG \ּ׮32/<Y0/C~`nƇkR'XNZ ҵ m{#:[fĽ6ŽRRJ8u&cds(临Tᇚew ;G?~_:Z~[#l+Prh_vu+<!5)KlQM?tfG\1Ʃ ˬlZMS+Uqjuo-[VWc\op; uv5>>gސ%EjV"jh_ZewhLR9sβ:XU$7{eun~6MM}3FuPP8l%7?[3qC/E֒9$חiHT109PD5Q׽4ʫ1hibE?EnYOwS] f`$tvJ(/8-Jmb]kaaYfkmXpQ%i2鷼Y3]钖Z~l̩>ZK_3=¨ 䢮|M1V,,nuRkWV#L~z<= wkM~aVnEY4m}%1+S3kݜ9YȜ~si <Z!>n]ٌP4ӽI>ÈdHD̆~2j7jκ>UUX!SMx!<;';ڟ/B2<ҤAEF w\ݽ fLt$CR;{on0C58VRZ$f#Lx+&(܏M?,)i+`*2yO35$rsx1]F(7jc`'󍙋JMQ1Xځ}<ͤdAEy tVXM44J!K?=x~7%'9S V!w¡;ijlMo|4ǡce:rSWt2 gc}pY3\*.Z(s'.0;K6y#.i*߲7,2L5_VNk'f'R(բ%&+%)I)al肖o8I*++ۑ1J`R8(iFh*s^4BzZOX 7%62fF8H4󪮚QNgK\t^S(]G"լDќR5R+v.nWt,զM]$I⛓S3vLӆ]yH}&MƉ^EɣF9)=£+W`nWADoPFkq! a昪%=w7t&ch`r f~`mxmD iRaL77d"fMk`_53})Ii_bcf[7X7Ǐ! Ǽ=CFҙV=Ȍʤ¿m%ŗOֶH¢ӣU>`Ek  ''XL䤐T݃C44e CzODf蘓O$c=݇O sZct}H\g fѐ+} ֌4fVqGQzFܼWu o"cb(M%kd2FV߀jkV 9BcQN k΁?@Ydz/a 8-BZD&--|zH+ CBéaDvV{kfq#T =U;? ی]&V·pwvs;*H)N}#B_1$ae׈vv5979 ϘB WimfCϫau?6O+W3B+p>г@ݳ zvkM'&ec (:sƢqO,bn'M]'=;4|/_AIQ:ޟ_pnGmʜ;wnW][f2᧐s 1E{spG hb2#= 1K74JRxk椄ض87xF3p۶%\;u|מLKYQZsQ^FG&w>{;4?2ZpQ@#T" -9Ay 3pl̦}]x,]~8kЌ)L60@*zunaDl0׭m0ook5XU&Hm?1%y$sG*ȧO`Fmʗ²}m=g|_?'??9 !C\+y/0TP`* =УSi1}? ;߰jkbi7Ly+*Ys_xyz`}XGy IGSMk˘e>nh埍 #;{=a홳p5y{Wj2$$^ 0}eԜNGsr߭ȌI[1Ptg3+>]Fg̉Z7g>R2{vvqt OzD@9͆CXz^z AdQ=9"N$gWƨ^V3"rIʸۤ1$żoFޏoDrd^5QLDADU\JO\4#!R4p E+n |Z\JNAQ0!R̞'L0ү 6 bOo\ Z6KٌPG\CK=#د4U`WM@#ua`\\k;ndrRn3W=x=*։~;uIM 'J%JɰDd1bŀ%XYj-K-7X1[Z Zdugaʑw\;KBB߹I"bMjp$,%%d1L!<^BZR*2 {#og9pg/WqF5.1E_Fg-Ejo:&Roⷥxl-AJ k9R3SGObPvIқi?HG endstream endobj 35 0 obj 5398 endobj 33 0 obj << /Type /Font /Subtype /CIDFontType2 /BaseFont /OpenSans /CIDSystemInfo << /Registry (Adobe) /Ordering (Identity) /Supplement 0 >> /FontDescriptor 31 0 R /CIDToGIDMap /Identity /W [0 [595 896 264 258 590 609 350 521 405 567 243 265 626 609 251 473 599 608 557 567 643 722 251 608 608 543 567 723 567 628 544 772 552 609 923 336 552 472 722 497 500 597 264 520 918 319 732 773 515 825 464 277 549 347 347 567 567 567 294 567 294 613 398 567 496 512 567 ] ] >> endobj 34 0 obj << /Length 826 >> stream /CIDInit /ProcSet findresource begin 12 dict begin begincmap /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> def /CMapName /Adobe-Identity-UCS def /CMapType 2 def 1 begincodespacerange <0000> endcodespacerange 2 beginbfrange <0000> <0000> <0000> <0001> <0042> [<004D> <002E> <0020> <0056> <0075> <0074> <006B> <0072> <0031> <002C> <004A> <0043> <0068> <0069> <0073> <006F> <0070> <0065> <0032> <0042> <0047> <006C> <0064> <0062> <0067> <0033> <0044> <0034> <0041> <0053> <0077> <0061> <006E> <006D> <0066> <0045> <0063> <0055> <0076> <0079> <0050> <003B> <0078> <0057> <002D> <0048> <004F> <004C> <00AE> <007A> <0049> <0054> <201C> <201D> <0039> <0036> <0037> <0028> <0035> <0029> <0052> <0022> <0030> <2013> <0046> <0038> ] endbfrange endcmap CMapName currentdict /CMap defineresource pop end end endstream endobj 7 0 obj << /Type /Font /Subtype /Type0 /BaseFont /OpenSans /Encoding /Identity-H /DescendantFonts [33 0 R] /ToUnicode 34 0 R>> endobj 2 0 obj << /Type /Pages /Kids [ 5 0 R 14 0 R ] /Count 2 /ProcSet [/PDF /Text /ImageB /ImageC] >> endobj xref 0 36 0000000000 65535 f 0000000009 00000 n 0000017847 00000 n 0000000347 00000 n 0000000442 00000 n 0000000581 00000 n 0000010450 00000 n 0000017713 00000 n 0000000479 00000 n 0000000530 00000 n 0000000898 00000 n 0000003495 00000 n 0000000702 00000 n 0000000878 00000 n 0000004346 00000 n 0000003516 00000 n 0000003568 00000 n 0000004179 00000 n 0000003881 00000 n 0000003651 00000 n 0000003765 00000 n 0000004242 00000 n 0000004664 00000 n 0000006346 00000 n 0000004468 00000 n 0000004644 00000 n 0000006367 00000 n 0000006576 00000 n 0000009496 00000 n 0000009831 00000 n 0000009475 00000 n 0000010591 00000 n 0000010849 00000 n 0000016359 00000 n 0000016835 00000 n 0000016338 00000 n trailer << /Size 36 /Info 1 0 R /Root 21 0 R >> startxref 17952 %%EOF