%PDF-1.4 1 0 obj << /Title (Design of Ultrasonic MEMS Temperature Sensor Using COMSOL Multiphysics Software) /Creator (wkhtmltopdf 0.12.3) /Producer (Qt 4.8.7) /CreationDate (D:20161219162951-05'00') >> endobj 3 0 obj << /Type /ExtGState /SA true /SM 0.02 /ca 1.0 /CA 1.0 /AIS false /SMask /None>> endobj 4 0 obj [/Pattern /DeviceRGB] endobj 8 0 obj [0 /XYZ 34.0799999 813.679999 0] endobj 9 0 obj [0 /XYZ 34.0799999 644.720000 0] endobj 10 0 obj << /__WKANCHOR_2 8 0 R /__WKANCHOR_4 9 0 R >> endobj 13 0 obj <> endobj 12 0 obj <> endobj 11 0 obj <> endobj 14 0 obj << /Type /Catalog /Pages 2 0 R /Outlines 11 0 R /PageMode /UseOutlines /Dests 10 0 R >> endobj 5 0 obj << /Type /Page /Parent 2 0 R /Contents 15 0 R /Resources 17 0 R /Annots 18 0 R /MediaBox [0 0 595 842] >> endobj 17 0 obj << /ColorSpace << /PCSp 4 0 R /CSp /DeviceRGB /CSpg /DeviceGray >> /ExtGState << /GSa 3 0 R >> /Pattern << >> /Font << /F6 6 0 R /F7 7 0 R >> /XObject << >> >> endobj 18 0 obj [ ] endobj 15 0 obj << /Length 16 0 R /Filter /FlateDecode >> stream x]n6Wh] H ,E(E5Wi<J蚔g$@CKy>|Gyu*dw9sv1O1{mǍ7 ~es>,`3__f_ow9 >o֒u_9j\ޘno~!/̞5 a~/i|as~[ĕU>-g_|~SicWÈF~H9.)#M \nG{.`%W$ہv?pCl;24L~ddA5w,8i[A! 47H,{mM$B= yN2u.jf~tjE}L䐵է)KBmś`z͌ H-a@}nB"H[ݻٰq&§hsϻL\O{ZINqf\@A ߡKAIhZtæGT̐Etx0Oo$ d-Z̚f@4B|{f[@dQ@F/ vPsG@Aaf¿EZRCD `;^6'ܤ̣!407`3#O&wq`tGR#P::( s;1KZQV},`BZ GX >DF$l4_ =/rf[9QPӁ(CaH)4*8,  qS S h"h,z34\gQdiy@X0ˆK^vC\TU@\wx@&XO9I*3|M̛,!cV&wҸlrFBN鮤 R ^ >Sk~)s'?ZDB Srv)Ιq!ij!!@5b ˂IJQ4ALk_J 7Kni G(KNl9,xq#ͭ@g3F(9^!` / Aj2QkL)X "0(MpP>S½nU|ٻ.F4CP`3bd-U)~M n'Fwe:)8XQz?Eq.>tU K^ED D<'Z3$q 2QзE񄪦1ɱG#N6lvr #r؂|DvG\ UU zc-rfQHNEqSa"SZU7ģ2EP4/WTVJA60ރx5C@eۺ@@@X=læuDiR)hևq.w5 x*-qtMS, eT!*wHMNKv٤LL\r .%}vQ*pSOKb ɍ 1(ăQ*T-T-7Qu0D^lkDKOxeqddvkQ^-N9%;%% &~U*ę(ec 1KF]5gȢ,;&K$ƺo^0=-pL h#r+#pO?UyNvKN m5hX.> endobj 20 0 obj << /Length1 4072 /Length 23 0 R /Filter /FlateDecode >> stream x}WyTSW[$B E;,PD@QAPDDXji]qVi=X֡q:cgOc <T:ә<{ݾ B$Di^y~G2eSuj0ᘥ2u.k7lsۀopυ/\TOI>!>\먭I}!6u~ғ;}š^ 7K[ 5 _ՁlcَtcœG8Ga%@lO(#6^7JDJDMd&Z'DYQ9SH^o5YQj΍bݚs4!ѡ*et%.n/˜eYÂNGG~tIZr_ 4E3|;-ڗ?Je/Z'jwbN*Ί@Cgѕib&R zVIԷZH+S3hGIJ+lIIh:2bqFz('򪧉yIWFK%qZmR(ms38>)7NX1b8zk,933FFnvQa$+CF#Q9Y2 hY.QKf/odOF2C\¢tMB M8T]߻pmٶ`.z99#++#r+y>))ƳxF+ǵGITc&XeeT8J={3(< BG a)9-d!S4Y_Ț(ZAS r[UOoc4a4RN#=cf04r|}$X3Zbk[4-VΨ 0tWL7b4PymBé^6\t**El .06YqD0M(˱p\iݙŹ]ho*jmnY(ıGADg \[>uK,wܺ78ai/veO `qY5Nt HDǍµK|S]@c'An.Nbq/A?scr׹A؁<'3tPQ %DWS{8d PS)ُz:_\^yb}58<<=)[%-'$1[@,=~˧$922wqjJ>X\x)]"\oqʂ\߽KKۑKG 4h~0JIA.j5J*j%<@|tg%o>>wv T/Y6Wtauůo)޽tI{cM拟ow4|+o3#>pgɪ $0K796Fʄ,+5K jd%j+*ģe5ژn!T/9qi0Gs/a/ Wvw~ I^SI xGO2$5Z/M!㙢ƖUftu uƶms8|q4B_iY6; -ctK1~(e&kQEJ6d1LvF@  q;l𰓑d<iڈ(ıc2hH('vUiV fz9OÁfRby8#Wy8uTt9ŜTOz8C2wӀuU3Raq'6[zw9_Ӡ`8ty;}{Q~4 :Jz7鼃j6:aqxan0^a^C T\xT1 bx-\}1⽳o0oB>fe _`<ٌ'G4޸w,?!-/e/鸷O+bG'3 n޿rfDBٚ`.0V~4&%juyPxl`[}vLt[fVkAVM򟿱b0f A7 q]+^8Mr⯑c\1`1ѤOҰ9&Mg?9B('Ɩ&#Rҋ-I ~h=EhbG$N\173X4O7O'0sL/sc}Z^dI=w+Ox?,<=~I!u]OVl@y%$3,,Y030|z#@g@2TiZ'F6b8"p&eBN >HDWU#@ Ta{"y)Ӥpu=r8I:("2LPf{j_$#9L 5hD<3>QRoz endstream endobj 23 0 obj 3055 endobj 21 0 obj << /Type /Font /Subtype /CIDFontType2 /BaseFont /NimbusSanL-Bold /CIDSystemInfo << /Registry (Adobe) /Ordering (Identity) /Supplement 0 >> /FontDescriptor 19 0 R /CIDToGIDMap /Identity /W [0 [496 716 552 552 276 606 606 276 606 330 716 276 330 386 552 552 826 662 662 606 882 606 606 716 772 606 606 552 731 772 716 606 ] ] >> endobj 22 0 obj << /Length 581 >> stream /CIDInit /ProcSet findresource begin 12 dict begin begincmap /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> def /CMapName /Adobe-Identity-UCS def /CMapType 2 def 1 begincodespacerange <0000> endcodespacerange 2 beginbfrange <0000> <0000> <0000> <0001> <001F> [<0044> <0065> <0073> <0069> <0067> <006E> <0020> <006F> <0066> <0055> <006C> <0074> <0072> <0061> <0063> <004D> <0045> <0053> <0054> <006D> <0070> <0075> <0043> <004F> <004C> <0068> <0079> <00AE> <0077> <0041> <0062> ] endbfrange endcmap CMapName currentdict /CMap defineresource pop end end endstream endobj 6 0 obj << /Type /Font /Subtype /Type0 /BaseFont /NimbusSanL-Bold /Encoding /Identity-H /DescendantFonts [21 0 R] /ToUnicode 22 0 R>> endobj 24 0 obj << /Type /FontDescriptor /FontName /QYAAAA+OpenSans /Flags 4 /FontBBox [-549.804687 -270.996093 1204.10156 1047.85156 ] /ItalicAngle 0 /Ascent 1068.84765 /Descent -292.968750 /CapHeight 1068.84765 /StemV 49.8046875 /FontFile2 25 0 R >> endobj 25 0 obj << /Length1 6064 /Length 28 0 R /Filter /FlateDecode >> stream xX \Te ʰ̨0"0 ";$;Ȫ .!%庠yLMM4>򒙥Jɛ.{sw;Ü}c^\\*k7HS. rZVI-iK $x理]s}WG]t }謍R"msQafHYw7}x~^RP:ʐeQʜP7" {#^19%q xOff<{@j^9sGK\xcdI:cև&=A"3 /Џl.:-a@r{ipxy;%?xcq 1%#'?鮝=˸]lB(:qDHg5eAsQb[)}nƂChGd0nѷzҀXeŽÜv?c3|"26y/xytnP!# rPGnk9 i3#+lRYZL#yʜ<4Rzb)ziqf/֬{}ei$g䱴WƏd޽u.NbdARJӾyO=U2)=ld4H(u5aq^| \j[FuS#XYF!wIQP}Y<_)⨕i~(`˩~Ei ?X7x>1Prbbr[ۼYyw3̙n1llafqIIGAaÇmaKѿb7Q&:Sz"4vE7+*?rk#ѱ1+x(..2s~\Xfk(g )(hĆKaqX3JCn5 o13Կ9 ?d>Dҹ4mxt/aivk@#NLLJ>2BR&kWx؎3gP/F˗eL#_Ɛ.b@5%]l럮HO\77xeLG'()z#2hZ9sϼ9{Ujow l۾c {|0LvNn[zL'K~8(dz7Z1bO Y>fng A҈\(}lhҌQp(sâ}0M~cވKM{ LOo])o$$1U 4Խ/hvΙ]_4Sa;NAbS}Z% f1λVpw(:^`P(FcsNY[]<*`j~i4:"t=Sn|lbTـ+r)ZP->@cM}LM^n,]퀫GE;Ѫ>v+bEKƒ+W ;3{I^f עC=ZG4J;L RMNs9ZdvhG@@Z l`:'ЧB(`[zsw DrZw<1ѦĆ (iFځ=KdĖ 1X|G;WxB0`)POQ:~͑P}L4#ׇ;?3\ѳes!&y;#Ԝ 8-suF-d@適 %Į>&0FJ(;8()J8=޴Isw4!9{_u[?Ǧpw t _u,qW,Fr>"HÏD#a,4lMPHXu"ӝCyVGrs(w礌B81)}u cs;^zs=#.JrځH/"VZNWi1܈?o?oeY9lX%wϋ\\VYVQegܚ6^NƲV^njp 1Q qa<ܲsO(~kĤ2.u2WΟm;{恰Eyupصs`Ych6`+j2E=T %cb#&[X|ŘFU~|o!vXl:,HíܹS-[9%\}*)֥T`C`݉@asWg'x<6c"h;ԜO(ǚ`/9ncpMA&f=5G(-mC֯C׆Ϟ%4B$eAO)z+;LLWxN1C0@ ;ٻpe*,XT)*^+8a$I8/U~_jQQmQQmwg P :. EL!ޱ&K+}i`+E"=ÄX%ZY{r%.2wd+%Fr!;zr~#!MR =l(Wk$C:I)GJ[xqq Rȹ^/HݤVDy,Y+ޛ@1]ā'@ql$`IeIhogs= =^rڑ%LH؀1l`1'l[e/r~gq6~ȲedȝQ"61DEBn1bkwEMD Yo9I `fm~f4-}Ycǐa~!rG!$,#w&l.","+LW r"pbܕ>d ^R]*!_v-@pn*v ޤR&o_qOZi?gIMX> /FontDescriptor 24 0 R /CIDToGIDMap /Identity /W [0 [595 544 264 258 609 552 923 251 251 567 243 722 597 405 543 732 549 608 350 609 500 609 521 557 472 599 608 609 613 473 515 608 277 552 219 773 628 722 497 643 772 464 336 319 896 294 294 520 626 825 567 723 608 567 773 567 567 ] ] >> endobj 27 0 obj << /Length 756 >> stream /CIDInit /ProcSet findresource begin 12 dict begin begincmap /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> def /CMapName /Adobe-Identity-UCS def /CMapType 2 def 1 begincodespacerange <0000> endcodespacerange 2 beginbfrange <0000> <0000> <0000> <0001> <0038> [<0053> <002E> <0020> <004B> <0061> <006D> <0069> <006C> <0031> <002C> <0047> <0050> <0072> <0067> <0048> <0054> <0070> <0074> <0068> <0079> <006E> <006B> <0065> <0063> <006F> <0064> <0075> <0052> <0073> <004C> <0062> <0049> <0045> <0027> <004F> <0041> <0055> <0076> <0042> <0077> <007A> <0066> <002D> <004D> <0028> <0029> <0078> <0043> <00AE> <0033> <0044> <0071> <0032> <0051> <0034> <0030> ] endbfrange endcmap CMapName currentdict /CMap defineresource pop end end endstream endobj 7 0 obj << /Type /Font /Subtype /Type0 /BaseFont /OpenSans /Encoding /Identity-H /DescendantFonts [26 0 R] /ToUnicode 27 0 R>> endobj 2 0 obj << /Type /Pages /Kids [ 5 0 R ] /Count 1 /ProcSet [/PDF /Text /ImageB /ImageC] >> endobj xref 0 29 0000000000 65535 f 0000000009 00000 n 0000014649 00000 n 0000000325 00000 n 0000000420 00000 n 0000001163 00000 n 0000008129 00000 n 0000014515 00000 n 0000000457 00000 n 0000000508 00000 n 0000000559 00000 n 0000000996 00000 n 0000000720 00000 n 0000000621 00000 n 0000001059 00000 n 0000001480 00000 n 0000003756 00000 n 0000001284 00000 n 0000001460 00000 n 0000003777 00000 n 0000003986 00000 n 0000007153 00000 n 0000007496 00000 n 0000007132 00000 n 0000008270 00000 n 0000008528 00000 n 0000013271 00000 n 0000013707 00000 n 0000013250 00000 n trailer << /Size 29 /Info 1 0 R /Root 14 0 R >> startxref 14747 %%EOF