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-3.5503 0 TD ()Tj /TT2 1 Tf 9.96 0 0 9.96 198.6406 220.3201 Tm 0.0039 Tc -0.0009 Tw ( \(9\) )Tj -14.8795 -2.4096 TD -0.0052 Tc 0.0082 Tw [(T)-20.9(h)0.8(i)-4.5(s)-1.6( s)-13.6(y)0.8(st)-4.5(e)-19.2(m)13.6( )-12.1(ha)-7.1(s a)-19.2(n)0.8( e)-7.1(q)-11.2(ui)-16.5(va)-7.1(l)-4.5(e)-19.2(nt)-4.5( )-12.1(sp)-11.2(r)-9.5(i)-4.5(ng c)-7.1(o)-23.3(nst)-4.5(a)-19.2(nt)-4.5(:)-4.5( )]TJ 0 -1.1566 TD 0 Tc 0 Tw ( )Tj ET q 1.0309 0 0 -0.97 0 0 cm 0.378 w 145.306 -173.197 m 178.945 -173.197 l S Q BT /TT6 1 Tf 8.9902 0 0 8.9902 178.7206 158.7601 Tm (g)Tj -2.5628 0 TD (NtL)Tj 1.2414 1.4282 TD (V)Tj -1.2547 0 TD (C)Tj -3.1768 -0.6407 TD (K)Tj 5.2514 0 0 5.2514 172.3606 169.3201 Tm (i)Tj -1.9652 0 TD (i)Tj -5.3471 -1.0968 TD (eq)Tj /TT2 1 Tf 5.2439 0 0 5.2439 174.8806 156.6001 Tm (0)Tj -0.0229 3.7529 TD (2)Tj -1.9909 0 TD (2)Tj 8.9902 0 0 8.9902 150.4006 158.7601 Tm (2)Tj /F2 1 Tf 8.9902 0 2.7782 8.9902 169.9606 158.7601 Tm ()Tj 8.9902 0 0 8.9902 142.3606 165.84 Tm ()Tj /TT2 1 Tf 9.96 0 0 9.96 186.2806 169.56 Tm 0.0039 Tc -0.0009 Tw [( \(1)9.9(0\) )]TJ -13.6386 -2.4096 TD 0 Tc 0 Tw ( )Tj 0 -1.1566 TD 0.0021 Tc 0.3021 Tw [(It is)5.7( th)8.1(eref)9.8(ore pos)5.7(s)5.7(i)2.8(ble to pu)8.1(ll t)-9.2(h)8.1(e plates)5.7( apart )-12.1(w)25.5(i)2.8(t)-9.2(h)8.1( a )]TJ T* 0.0009 Tw [(m)8.8(ech)8.1(a)-11.9(n)8.1(ical )-12.1(s)5.7(p)-3.9(ring)8.1( )-12.1(w)13.4(i)2.8(t)-9.2(h)8.1( a s)5.7(p)-3.9(ring)8.1( con)8.1(s)5.7(ta)-11.9(n)8.1(t: )]TJ 0 -1.1446 TD 0 Tc 0 Tw ( )Tj ET 0.382 w 130.721 105.96 m 130.721 93.12 l 155.081 105.96 m 155.081 93.12 l 165.401 105.96 m 165.401 93.12 l 180.521 105.96 m 180.521 93.12 l S BT /TT6 1 Tf 5.2687 0 0 5.2687 173.4406 95.04 Tm (eq)Tj -6.5367 0 TD (spring)Tj 9.0324 0 0 9.0324 166.6006 97.32 Tm (K)Tj -3.8395 0 TD (K)Tj /F2 1 Tf 2.8697 0 TD ()Tj /TT2 1 Tf 9.96 0 0 9.96 182.8006 99.36 Tm 0.0039 Tc -0.0009 Tw [( \(1)9.9(1\) )]TJ -13.2892 -1.7229 TD 0.0004 Tc 0.0026 Tw [(T)-15.3(h)6.4(is s)-8(y)6.4(ste)-13.6(m)19.2( p)-5.6(r)-3.9(o)-5.6(v)6.4(id)-5.6(es a )-12.1(v)6.4(o)-5.6(ltag)-5.6(e)-1.5( g)6.4(a)-1.5(in)6.4( o)-17.7(f)8.1( )]TJ 0 -1.1566 TD 0 Tc 0 Tw ( )Tj ET q 1.0309 0 0 -0.97 0 0 cm 0.378 w 326.423 -745.985 m 344.348 -745.985 l 353.776 -745.985 m 365.766 -745.985 l 375.194 -745.985 m 380.781 -745.985 l 386.019 -745.985 m 413.955 -745.985 l 422.568 -745.985 m 450.621 -745.985 l 479.138 -745.985 m 496.715 -745.985 l S Q BT 5.2453 0 0 5.2453 520.2405 735.48 Tm (1)Tj -3.0198 -3.2715 TD (2)Tj 0.6406 2.7911 TD (2)Tj 8.9916 0 0 8.9916 481.7206 721.32 Tm (1)Tj -10.4764 -0.7741 TD (2)Tj -0.0267 1.4013 TD (1)Tj /F2 1 Tf 5.2453 0 0 5.2453 517.2405 735.48 Tm ()Tj /F6 1 Tf 8.9916 0 0 8.9916 513.0405 716.04 Tm ()Tj 0 0.8408 TD ()Tj 0 -1.4814 TD ()Tj 0 2.122 TD ()Tj -3.897 -1.4814 TD ()Tj 0 0.8408 TD ()Tj 0 -1.4814 TD ()Tj 0 2.122 TD ()Tj /F2 1 Tf 1.0143 -0.8942 TD ()Tj -1.7883 0 TD ()Tj /F6 1 Tf -0.6539 -0.9876 TD ()Tj 0 0.8541 TD ()Tj 0 -1.0276 TD ()Tj 0 1.9885 TD ( )Tj -7.9141 -1.815 TD (\012)Tj 0 0.8541 TD (\012)Tj 0 -1.0276 TD ( )Tj 0 1.9885 TD ( )Tj /F2 1 Tf 5.5118 -1.6015 TD ()Tj -1.6549 0.7741 TD ()Tj -2.5224 -0.7741 TD ()Tj -2.9494 0.7741 TD ()Tj -2.4556 0 TD ()Tj /TT6 1 Tf 15.6813 -0.7741 TD (g)Tj -0.3737 1.5481 TD (z)Tj -4.8979 -1.5481 TD (z)Tj -1.5882 0 TD (g)Tj 1.2278 1.4013 TD (g)Tj -3.8569 -1.4013 TD (z)Tj -1.5615 0 TD (g)Tj 1.2145 1.4013 TD (g)Tj -4.9913 -1.4013 TD (C)Tj 0.1335 1.428 TD (C)Tj -2.7893 -1.428 TD (V)Tj -0.5472 1.5481 TD (V)Tj 5.2453 0 0 5.2453 499.1205 726 Tm (def)Tj -8.396 -2.6538 TD (def)Tj -7.2064 0 TD (def)Tj -8.5105 0 TD (f)Tj 0 2.4479 TD (i)Tj -4.9415 -2.4479 TD (i)Tj -0.7092 2.6538 TD (final)Tj /TT2 1 Tf 9.96 0 0 9.96 523.9606 725.88 Tm 0.0039 Tc -0.0009 Tw [( \(1)9.9(2\) )]TJ -20.0723 -2.7108 TD 0 Tc 0 Tw ( )Tj 0 -1.1566 TD 0.0025 Tc [(w)13.8(h)-3.5(ere )]TJ /TT6 1 Tf 2.6988 0 TD 0 Tc (z)Tj 6.48 0 0 6.48 354.7606 685.8 Tm 0.0003 Tc (def)Tj /TT2 1 Tf 1.2222 0.9444 TD 0 Tc ( )Tj 9.96 0 0 9.96 364.4806 687.36 Tm 0.0023 Tc 0.0007 Tw [( is)-6.1( th)8.3(e)-11.7( pre-)10(loaded def)10(l)3(ectio)-15.8(n)8.3( of)10( )-12.1(th)8.3(e)-11.7( plates)5.9( a)-11.7(n)8.3(d )]TJ /TT6 1 Tf 18.3614 0 TD 0 Tc 0 Tw (g)Tj /TT2 1 Tf 0.506 0 TD 0.0005 Tc 0.0025 Tw [( is)-7.9( )]TJ -22.9277 -1.1566 TD 0.0001 Tc 0.015 Tw [(th)6.1(e i)-11.2(n)6.1(itial)-11.2( f)7.8(i)-11.2(n)-5.9(g)6.1(er g)6.1(a)-1.8(p)-5.9(.)-2.9( )-12(As d)-5.9(e)-1.8(sc)-13.9(rib)-5.9(e)-1.8(d)-5.9( in)6.1( th)6.1(e p)-5.9(r)-4.2(ev)6.1(io)-18(u)6.1(s)3.7( )-12(sectio)-5.9(n)6.1(,)-15( )]TJ T* 0.0006 Tc 0.0988 Tw [(th)6.6(is)-7.8( )-12(v)6.6(o)-5.4(ltag)6.6(e)-13.4( g)6.6(a)-1.3(i)-10.7(n)6.6( )-12(is d)-5.4(e)-13.4(g)6.6(r)-3.7(ad)-5.4(ed)-5.4( b)-5.4(y)6.6( an)-5.4(y)6.6( p)-5.4(a)-1.3(ras)-7.8(itic cap)-5.4(acita)-13.4(n)6.6(c)-1.3(e)-13.4( )]TJ T* 0.0005 Tc 0.0025 Tw [(in)6.5( th)6.5(e )-12.1(s)-7.9(y)6.5(ste)-13.5(m)7.2(. )]TJ 0 -1.1446 TD 0 Tc 0 Tw ( )Tj /TT4 1 Tf 6.1687 -1.1807 TD -0.0036 Tc 0.0066 Tw [(III.)-6.6( IM)-23.6(P)-7.2(LEM)-23.6(ENTA)-16.4(TIO)-8.9(N)-4.3( )]TJ /TT2 1 Tf -6.1687 -1.1325 TD 0 Tc 0 Tw ( )Tj 0 -1.1566 TD -0.0036 Tc 0.0066 Tw [(A)7.7(.)-6.6( P)-13.7(r)-7.9(o)-9.6(c)-5.5(e)-5.5(ss )]TJ T* 0 Tc 0 Tw ( )Tj T* 0.002 Tc 0.3504 Tw [(T)-13.7(o)-4( ach)8(iev)8(e)0.1( a h)8(i)-9.3(g)8(h)-4( capacitan)8(ce per un)8(it area, an)8( )-12.1(SOI)-14.4( )]TJ 0 -1.1446 TD 0.0008 Tc 0.1347 Tw [(p)-5.2(r)-3.5(o)-5.2(cess is d)-5.2(e)-1.1(sirab)-5.2(l)1.5(e. In)6.8( ad)-5.2(d)-5.2(itio)-5.2(n)6.8(,)-2.2( to)-5.2( create a reliab)-5.2(l)1.5(e an)6.8(d)6.8( )]TJ 0 -1.1566 TD 0.0046 Tc 0.2514 Tw [(robu)10.6(s)8.2(t)5.3( des)8.2(i)5.3(gn)10.6(, a s)8.2(i)-6.7(ng)10.6(l)5.3(e)2.7( )-12.1(m)11.3(a)2.7(sk)10.6( proces)8.2(s)8.2( )-12.1(w)15.9(a)2.7(s)8.2( )-12.1(u)10.6(s)8.2(ed. S)6.5(o)-13.5(m)11.3(e)-9.4( )]TJ T* 0.0038 Tc -0.0008 Tw [(rel)4.5(e)1.9(v)9.8(a)1.9(n)9.8(t)4.5( proces)7.4(s)7.4( para)-10.2(m)22.6(e)1.9(t)4.5(e)1.9(r)-12.6(s)7.4( are s)7.4(h)9.8(o)-14.3(w)15.1(n)9.8( bel)4.5(o)-14.3(w)15.1( i)-7.5(n)9.8( T)-11.9(a)1.9(bl)4.5(e 1:)4.5( )]TJ T* 0 Tc 0 Tw ( )Tj T* ( )Tj /TT8 1 Tf 8.04 0 0 8.04 358.4806 516 Tm 0.0007 Tc -0.0119 Tw [(Pro)-6.8(c)11.7(ess Pa)-6.8(r)16.7(a)8.2(m)-12.5(e)11.7(t)-5.1(e)-3.2(r )-7432.8(V)25.9(a)-6.8(l)-5(u)4.6(e )]TJ ET 352.841 523.92 0.48 -0.48 re f 352.841 523.92 0.48 -0.48 re f 353.321 523.92 98.04 -0.48 re f 451.361 523.92 0.48 -0.48 re f 451.841 523.92 80.52 -0.48 re f 532.361 523.92 0.48 -0.48 re f 532.361 523.92 0.48 -0.48 re f 352.841 523.44 0.48 -9.24 re f 451.361 523.44 0.48 -9.24 re f 532.361 523.44 0.48 -9.24 re f BT /TT2 1 Tf 8.04 0 0 8.04 358.4806 506.52 Tm -0.008 Tc 0.0117 Tw [(St)-13.7(ru)-15.5(ct)-13.7(ua)-11.9(l s)-6.9(i)-13.8(lic)-11.9(on)-15.5( )14.9(t)-13.7(h)-0.5(i)-13.7(c)3(kn)-15.5(es)-6.9(s)-6.9( )]TJ 15.4478 -0.0746 TD 0.0075 Tc 0 Tw (50)Tj /F2 1 Tf 1.0149 0 TD 0 Tc ( )Tj /TT2 1 Tf 0.5522 0 TD -0.0017 Tc (m )Tj ET 352.841 514.2 0.48 -0.48 re f 353.321 514.2 98.04 -0.48 re f 451.361 514.2 0.48 -0.48 re f 451.841 514.2 80.52 -0.48 re f 532.361 514.2 0.48 -0.48 re f 352.841 513.72 0.48 -9.84 re f 451.361 513.72 0.48 -9.84 re f 532.361 513.72 0.48 -9.84 re f BT 8.04 0 0 8.04 358.4806 496.2 Tm -0.011 Tc 0.0147 Tw [(S)-7.1(h)-18.5(eet)-16.7( r)-6.4(e)0(s)-9.9(i)-16.8(s)-9.9(t)-16.7(an)-18.5(c)-14.9(e)0( )]TJ 15.1642 -0.0746 TD 0.0075 Tc 0 Tw [(1k)15( )]TJ /F2 1 Tf 1.2388 0 TD 0 Tc (\012)Tj /TT2 1 Tf 0.7761 0 TD 0.6028 Tc (/ )Tj ET 352.841 503.88 0.48 -0.48 re f 353.321 503.88 98.04 -0.48 re f 451.361 503.88 0.48 -0.48 re f 451.841 503.88 80.52 -0.48 re f 532.361 503.88 0.48 -0.48 re f 352.841 503.4 0.48 -9.84 re f 451.361 503.4 0.48 -9.84 re f 532.361 503.4 0.48 -9.84 re f BT 8.04 0 0 8.04 358.4806 485.88 Tm -0.0039 Tc [(Si)-9.6(O)]TJ 5.04 0 0 5.04 370.9606 484.92 Tm 0 Tc (2)Tj 8.04 0 0 8.04 373.4806 485.88 Tm -0.009 Tc 0.0127 Tw [( th)-16.5(ic)-12.9(kn)-16.5(es)-7.9(s)-7.9( )]TJ 13.8358 -0.0746 TD 0 Tc 0 Tw (2)Tj /F2 1 Tf 0.5075 0 TD ( )Tj /TT2 1 Tf 0.5522 0 TD -0.0017 Tc (m )Tj ET 352.841 493.56 0.48 -0.48 re f 353.321 493.56 98.04 -0.48 re f 451.361 493.56 0.48 -0.48 re f 451.841 493.56 80.52 -0.48 re f 532.361 493.56 0.48 -0.48 re f 352.841 493.08 0.48 -9.84 re f 451.361 493.08 0.48 -9.84 re f 532.361 493.08 0.48 -9.84 re f BT 8.04 0 0 8.04 358.4806 475.56 Tm -0.0166 Tc 0.0203 Tw [(M)-23(i)-7.4(n)-24.1(i)-22.3(mu)-24.1(m g)-9.1(a)-20.5(p)-24.1( )]TJ 15.7015 -0.0746 TD 0 Tc 0 Tw (2)Tj /F2 1 Tf 0.5075 0 TD ( )Tj /TT2 1 Tf 0.5522 0 TD -0.0017 Tc (m )Tj ET 352.841 483.24 0.48 -0.48 re f 353.321 483.24 98.04 -0.48 re f 451.361 483.24 0.48 -0.48 re f 451.841 483.24 80.52 -0.48 re f 532.361 483.24 0.48 -0.48 re f 352.841 482.76 0.48 -9.84 re f 451.361 482.76 0.48 -9.84 re f 532.361 482.76 0.48 -9.84 re f BT 8.04 0 0 8.04 358.4806 465.24 Tm 0.0067 Tc -0.003 Tw [(Mi)15.9(nim)23.3(u)-0.8(m)23.3( f)11.4(e)17.7(atur)11.3(e)17.7( w)27.4(i)0.9(dt)15.9(h )]TJ 15.7015 -0.0746 TD 0 Tc 0 Tw (4)Tj /F2 1 Tf 0.5075 0 TD ( )Tj /TT2 1 Tf 0.5522 0 TD -0.0017 Tc (m )Tj ET 352.841 472.92 0.48 -0.48 re f 353.321 472.92 98.04 -0.48 re f 451.361 472.92 0.48 -0.48 re f 451.841 472.92 80.52 -0.48 re f 532.361 472.92 0.48 -0.48 re f 352.841 472.44 0.48 -9.72 re f 451.361 472.44 0.48 -9.72 re f 532.361 472.44 0.48 -9.72 re f BT 8.04 0 0 8.04 358.4806 455.04 Tm 0 Tc (E)Tj 5.04 0 0 5.04 363.4006 454.08 Tm -0.0082 Tc [(sc)7.1(s)]TJ 8.04 0 0 8.04 369.4006 455.04 Tm 0.0103 Tc -0.0066 Tw [( [7)17.8(] )-11716.5(~)14(1)2.8(7)17.8(0)2.8(G)31(p)2.8(a)6.4( )]TJ ET 352.841 462.72 0.48 -0.48 re f 353.321 462.72 98.04 -0.48 re f 451.361 462.72 0.48 -0.48 re f 451.841 462.72 80.52 -0.48 re f 532.361 462.72 0.48 -0.48 re f 352.841 462.24 0.48 -9.24 re f 352.841 453 0.48 -0.48 re f 352.841 453 0.48 -0.48 re f 353.321 453 98.04 -0.48 re f 451.361 462.24 0.48 -9.24 re f 451.361 453 0.48 -0.48 re f 451.841 453 80.52 -0.48 re f 532.361 462.24 0.48 -9.24 re f 532.361 453 0.48 -0.48 re f 532.361 453 0.48 -0.48 re f BT 9.96 0 0 9.96 324.0406 443.52 Tm 0 Tc 0 Tw ( )Tj 0 -1.1566 TD 0.005 Tc -0.002 Tw [(B. V)4.3(o)-1(l)5.7(t)5.7(a)3.1(g)11(e)3.1( pum)23.8(p des)8.6(i)5.7(gn)11( )]TJ T* 0 Tc 0 Tw ( )Tj T* 0.0024 Tc 0.0006 Tw [(T)-13.3(o)-3.6( realize th)8.4(is)6( )-12.1(m)9.1(e)0.5(c)-11.6(h)8.4(anis)-6(m)9.1( i)-8.9(n)-3.6( t)-8.9(h)8.4(e proces)6(s)6( )-12.1(s)-6(h)8.4(o)-15.7(w)13.7(n in T)-13.3(a)0.5(ble 1,)11.4( )]TJ T* 0.0036 Tc -0.0006 Tw [(t)4.3(h)9.6(e f)11.3(o)-2.4(l)4.3(l)4.3(o)-14.5(w)14.9(i)-7.7(ng)9.6( des)7.2(i)4.3(gn)9.6( )-12.1(w)14.9(a)-10.4(s)7.2( ch)9.6(osen)9.6( \(s)7.2(ee F)5.5(i)-7.7(g)9.6(u)9.6(r)-0.7(e 3. bel)4.3(o)-14.5(w)27(\))-0.7(. )]TJ T* 0 Tc 0 Tw ( )Tj ET q 201.6 0 0 180.48 342.0406 202.56 cm /Im1 Do Q 341.561 383.52 0.48 -0.48 re f 341.561 383.52 0.48 -0.48 re f 342.041 383.52 201.6 -0.48 re f 543.641 383.52 0.48 -0.48 re f 543.641 383.52 0.48 -0.48 re f 341.561 383.04 0.48 -180.48 re f 543.641 383.04 0.48 -180.48 re f 341.561 202.56 0.48 -0.48 re f 341.561 202.56 0.48 -0.48 re f 342.041 202.56 201.6 -0.48 re f 543.641 202.56 0.48 -0.48 re f 543.641 202.56 0.48 -0.48 re f BT 9.96 0 0 9.96 544.1205 202.08 Tm ( )Tj -22.0964 -0.9157 TD ( )Tj 0 -1.1566 TD ( )Tj 0 -1.1446 TD 0.0021 Tc 0.4226 Tw [(T)-13.6(h)8.1(e s)5.7(i)-9.2(m)20.9(p)-3.9(li)-9.2(f)9.8(i)2.8(ed s)5.7(t)2.8(r)-14.3(u)8.1(ctu)8.1(r)-2.2(e ab)-16(ov)8.1(e con)8.1(s)5.7(i)-9.2(s)5.7(ts)5.7( o)-16(f)9.8( )-12.1(f)9.8(i)2.8(v)8.1(e)-11.9( )-12(m)20.9(a)-11.9(in )]TJ 0 -1.1566 TD 0.0052 Tc 0 Tw [(com)24(pon)11.2(e)-8.8(n)11.2(t)-6.1(s)8.8(:)5.9( )]TJ T* 0 Tc ( )Tj T* 0.0045 Tc -0.0015 Tw [(1. S)6.4(u)10.5(s)8.1(p)-1.5(en)10.5(si)5.2(on)10.5( con)10.5(s)-3.9(i)5.2(s)8.1(t)5.2(i)-6.8(ng)10.5( of)12.2( )-12.1(f)12.2(o)-1.5(u)10.5(r)0.2( f)12.2(o)-1.5(l)5.2(d)-1.5(ed-)12.2(b)-1.5(ea)-9.5(m)23.3( )-12.1(s)8.1(p)-1.5(ri)5.2(ng)10.5(s)8.1(.)1.5( )]TJ T* [(2. V)3.8(o)-1.5(l)5.2(t)5.2(a)2.6(g)10.5(e)2.6( pum)23.3(p capaci)5.2(t)5.2(o)-1.5(rs)8.1( \(on)10.5(l)-6.8(y)22.6( on)10.5(e )-12.1(f)12.2(i)-6.8(n)10.5(g)10.5(e)2.6(r sh)10.5(o)-13.6(w)15.8(n)10.5(\))0.2( )]TJ T* -0.0014 Tw [(3. V)3.7(o)-1.6(l)5.1(t)5.1(a)2.5(g)10.4(e)2.5( pum)23.2(p an)10.4(c)-9.6(h)10.4(ors)8(.)1.4( )]TJ 0 -1.1446 TD 0.0034 Tc 0.096 Tw [(4. Gap clos)7(in)9.4(g)9.4( actu)9.4(a)1.5(tors)7( \(t)-7.9(wo f)11.1(i)4.1(ng)9.4(ers)7( s)-5(h)9.4(o)-14.7(w)14.7(n)9.4(\))-0.9( are us)7(ed to )]TJ 0 -1.1566 TD 0.0026 Tc 0.0004 Tw [(pre-)10.3(load th)8.6(e )-12.1(m)21.4(e)0.7(c)-11.4(h)8.6(an)8.6(ica)-11.4(l)3.3( s)6.2(p)-3.4(ring)8.6(. )]TJ T* 0.001 Tc 0.6406 Tw [(5)-5(.)-2( Main)7( s)-7.4(h)-5(u)7(ttle)-13( \(electrical)-10.3(l)-10.3(y)19.1( )-12(g)7(r)-3.3(o)-5(u)-5(n)7(d)-5(e)-0.9(d)-5( th)7(ro)-5(u)-5(g)7(h)-5( t)-10.3(h)7(e )]TJ T* -0.0032 Tc 0 Tw [(su)-9.2(sp)-9.2(e)-5.1(n)2.8(sio)-21.3(n)2.8(s\))-7.5(.)-6.2( )]TJ T* 0 Tc 0.003 Tw [(6)-6(.)-3( Sh)6(u)6(ttle )-12.1(g)6(a)-1.9(p)-6(-)-4.3(sto)-6(p)-6( )]TJ ET 1 1 1 scn 0.72 w 70.481 626.76 m 70.481 634.2 64.361 640.2 56.921 640.2 c 49.481 640.2 43.481 634.2 43.481 626.76 c 43.481 619.32 49.481 613.2 56.921 613.2 c 64.361 613.2 70.481 619.32 70.481 626.76 c b* 58.001 667.68 m 67.001 667.68 l 101.561 576.84 m 101.561 585.84 l S 97.601 575.28 54 -27 re f q 104.801 559.68 5.28 12 re W n BT /F2 1 Tf 9.96 0 0 9.96 105.0406 561.84 Tm 0 0 0 scn 0 Tw ()Tj -0.0241 -0.0241 TD ()Tj 0.0241 0 TD ()Tj -0.0241 0.0241 TD ()Tj ET Q BT /TT4 1 Tf 6.48 0 0 6.48 110.0806 560.28 Tm 0 0 0 scn 0 Tw (1)Tj 9.96 0 0 9.96 113.3206 561.84 Tm ( )Tj ET 1 1 1 scn 196.601 577.8 54 -27 re f q 203.801 562.2 5.28 12 re W n BT /F2 1 Tf 9.96 0 0 9.96 204.0406 564.36 Tm 0 0 0 scn ()Tj -0.0241 -0.0241 TD ()Tj 0.0241 0 TD ()Tj -0.0241 0.0241 TD ()Tj ET Q BT 6.48 0 0 6.48 209.0806 562.8 Tm 0 0 0 scn (2)Tj 9.96 0 0 9.96 212.3206 564.36 Tm ( )Tj ET 56.561 612.36 m 56.561 576.36 l 101.561 576.36 l 57.641 640.32 m 57.641 667.32 l 67.121 667.32 m 85.121 676.32 l 91.601 667.32 m 100.601 667.32 l 79.121 666.36 m 75.161 674.52 l S 77.561 675.24 m 70.121 684.24 l 73.001 672.96 l f* BT 8.04 0 0 8.04 79.2406 550.6801 Tm 0.0062 Tc -0.0025 Tw [(F)5.1(i)0.4(gu)25(re )14.9(2.)17.4( D)12(i)15.4(a)13.7(g)-1.3(r)17.2(a)-1.3(m)33.2( of v)28.6(o)-1.3(lt)25.8(ag)13.7(e p)10.1(u)10.1(m)33.2(p p)10.1(l)0.4(at)25.8(es)7.3( )]TJ /TT2 1 Tf 9.96 0 0 9.96 54.2806 627.72 Tm 0.0023 Tc 0 Tw (+ )Tj 0 -1.1807 TD -0.0077 Tc (- )Tj ET q 113.081 684.36 m 80.081 651.24 l 80.081 582.84 l 91.601 582.84 l 124.601 615.84 l 124.601 684.36 l W* n 1 0 0 scn 80.081 684.12 44.64 -0.12 re f 80.081 683.64 44.64 -0.12 re f 80.081 683.16 44.64 -0.12 re f 80.081 682.68 44.64 -0.12 re f 80.081 682.2 44.64 -0.12 re f 80.081 681.72 44.64 -0.12 re f 80.081 681.24 44.64 -0.12 re f 80.081 680.76 44.64 -0.12 re f 80.081 680.28 44.64 -0.12 re f 80.081 679.8 44.64 -0.12 re f 80.081 679.32 44.64 -0.12 re f 80.081 678.84 44.64 -0.12 re f 80.081 678.36 44.64 -0.12 re f 80.081 677.88 44.64 -0.12 re f 80.081 677.4 44.64 -0.12 re f 80.081 676.92 44.64 -0.12 re f 80.081 676.44 44.64 -0.12 re f 80.081 675.96 44.64 -0.12 re f 80.081 675.48 44.64 -0.12 re f 80.081 675 44.64 -0.12 re f 80.081 674.52 44.64 -0.12 re f 80.081 674.04 44.64 -0.12 re f 80.081 673.56 44.64 -0.12 re f 80.081 673.08 44.64 -0.12 re f 80.081 672.6 44.64 -0.12 re f 80.081 672.12 44.64 -0.12 re f 80.081 671.64 44.64 -0.12 re f 80.081 671.16 44.64 -0.12 re f 80.081 670.68 44.64 -0.12 re f 80.081 670.2 44.64 -0.12 re f 80.081 669.72 44.64 -0.12 re f 80.081 669.24 44.64 -0.12 re f 80.081 668.76 44.64 -0.12 re f 80.081 668.28 44.64 -0.12 re f 80.081 667.8 44.64 -0.12 re f 80.081 667.32 44.64 -0.12 re f 80.081 666.84 44.64 -0.12 re f 80.081 666.36 44.64 -0.12 re f 80.081 665.88 44.64 -0.12 re f 80.081 665.4 44.64 -0.12 re f 80.081 664.92 44.64 -0.12 re f 80.081 664.44 44.64 -0.12 re f 80.081 663.96 44.64 -0.12 re f 80.081 663.48 44.64 -0.12 re f 80.081 663 44.64 -0.12 re f 80.081 662.52 44.64 -0.12 re f 80.081 662.04 44.64 -0.12 re f 80.081 661.56 44.64 -0.12 re f 80.081 661.08 44.64 -0.12 re f 80.081 660.6 44.64 -0.12 re f 80.081 660.12 44.64 -0.12 re f 80.081 659.64 44.64 -0.12 re f 80.081 659.16 44.64 -0.12 re f 80.081 658.68 44.64 -0.12 re f 80.081 658.2 44.64 -0.12 re f 80.081 657.72 44.64 -0.12 re f 80.081 657.24 44.64 -0.12 re f 80.081 656.76 44.64 -0.12 re f 80.081 656.28 44.64 -0.12 re f 80.081 655.8 44.64 -0.12 re f 80.081 655.32 44.64 -0.12 re f 80.081 654.84 44.64 -0.12 re f 80.081 654.36 44.64 -0.12 re f 80.081 653.88 44.64 -0.12 re f 80.081 653.4 44.64 -0.12 re f 80.081 652.92 44.64 -0.12 re f 80.081 652.44 44.64 -0.12 re f 80.081 651.96 44.64 -0.12 re f 80.081 651.48 44.64 -0.12 re f 80.081 651 44.64 -0.12 re f 80.081 650.52 44.64 -0.12 re f 80.081 650.04 44.64 -0.12 re f 80.081 649.56 44.64 -0.12 re f 80.081 649.08 44.64 -0.12 re f 80.081 648.6 44.64 -0.12 re f 80.081 648.12 44.64 -0.12 re f 80.081 647.64 44.64 -0.12 re f 80.081 647.16 44.64 -0.12 re f 80.081 646.68 44.64 -0.12 re f 80.081 646.2 44.64 -0.12 re f 80.081 645.72 44.64 -0.12 re f 80.081 645.24 44.64 -0.12 re f 80.081 644.76 44.64 -0.12 re f 80.081 644.28 44.64 -0.12 re f 80.081 643.8 44.64 -0.12 re f 80.081 643.32 44.64 -0.12 re f 80.081 642.84 44.64 -0.12 re f 80.081 642.36 44.64 -0.12 re f 80.081 641.88 44.64 -0.12 re f 80.081 641.4 44.64 -0.12 re f 80.081 640.92 44.64 -0.12 re f 80.081 640.44 44.64 -0.12 re f 80.081 639.96 44.64 -0.12 re f 80.081 639.48 44.64 -0.12 re f 80.081 639 44.64 -0.12 re f 80.081 638.52 44.64 -0.12 re f 80.081 638.04 44.64 -0.12 re f 80.081 637.56 44.64 -0.12 re f 80.081 637.08 44.64 -0.12 re f 80.081 636.6 44.64 -0.12 re f 80.081 636.12 44.64 -0.12 re f 80.081 635.64 44.64 -0.12 re f 80.081 635.16 44.64 -0.12 re f 80.081 634.68 44.64 -0.12 re f 80.081 634.2 44.64 -0.12 re f 80.081 633.72 44.64 -0.12 re f 80.081 633.24 44.64 -0.12 re f 80.081 632.76 44.64 -0.12 re f 80.081 632.28 44.64 -0.12 re f 80.081 631.8 44.64 -0.12 re f 80.081 631.32 44.64 -0.12 re f 80.081 630.84 44.64 -0.12 re f 80.081 630.36 44.64 -0.12 re f 80.081 629.88 44.64 -0.12 re f 80.081 629.4 44.64 -0.12 re f 80.081 628.92 44.64 -0.12 re f 80.081 628.44 44.64 -0.12 re f 80.081 627.96 44.64 -0.12 re f 80.081 627.48 44.64 -0.12 re f 80.081 627 44.64 -0.12 re f 80.081 626.52 44.64 -0.12 re f 80.081 626.04 44.64 -0.12 re f 80.081 625.56 44.64 -0.12 re f 80.081 625.08 44.64 -0.12 re f 80.081 624.6 44.64 -0.12 re f 80.081 624.12 44.64 -0.12 re f 80.081 623.64 44.64 -0.12 re f 80.081 623.16 44.64 -0.12 re f 80.081 622.68 44.64 -0.12 re f 80.081 622.2 44.64 -0.12 re f 80.081 621.72 44.64 -0.12 re f 80.081 621.24 44.64 -0.12 re f 80.081 620.76 44.64 -0.12 re f 80.081 620.28 44.64 -0.12 re f 80.081 619.8 44.64 -0.12 re f 80.081 619.32 44.64 -0.12 re f 80.081 618.84 44.64 -0.12 re f 80.081 618.36 44.64 -0.12 re f 80.081 617.88 44.64 -0.12 re f 80.081 617.4 44.64 -0.12 re f 80.081 616.92 44.64 -0.12 re f 80.081 616.44 44.64 -0.12 re f 80.081 615.96 44.64 -0.12 re f 80.081 615.48 44.64 -0.12 re f 80.081 615 44.64 -0.12 re f 80.081 614.52 44.64 -0.12 re f 80.081 614.04 44.64 -0.12 re f 80.081 613.56 44.64 -0.12 re f 80.081 613.08 44.64 -0.12 re f 80.081 612.6 44.64 -0.12 re f 80.081 612.12 44.64 -0.12 re f 80.081 611.64 44.64 -0.12 re f 80.081 611.16 44.64 -0.12 re f 80.081 610.68 44.64 -0.12 re f 80.081 610.2 44.64 -0.12 re f 80.081 609.72 44.64 -0.12 re f 80.081 609.24 44.64 -0.12 re f 80.081 608.76 44.64 -0.12 re f 80.081 608.28 44.64 -0.12 re f 80.081 607.8 44.64 -0.12 re f 80.081 607.32 44.64 -0.12 re f 80.081 606.84 44.64 -0.12 re f 80.081 606.36 44.64 -0.12 re f 80.081 605.88 44.64 -0.12 re f 80.081 605.4 44.64 -0.12 re f 80.081 604.92 44.64 -0.12 re f 80.081 604.44 44.64 -0.12 re f 80.081 603.96 44.64 -0.12 re f 80.081 603.48 44.64 -0.12 re f 80.081 603 44.64 -0.12 re f 80.081 602.52 44.64 -0.12 re f 80.081 602.04 44.64 -0.12 re f 80.081 601.56 44.64 -0.12 re f 80.081 601.08 44.64 -0.12 re f 80.081 600.6 44.64 -0.12 re f 80.081 600.12 44.64 -0.12 re f 80.081 599.64 44.64 -0.12 re f 80.081 599.16 44.64 -0.12 re f 80.081 598.68 44.64 -0.12 re f 80.081 598.2 44.64 -0.12 re f 80.081 597.72 44.64 -0.12 re f 80.081 597.24 44.64 -0.12 re f 80.081 596.76 44.64 -0.12 re f 80.081 596.28 44.64 -0.12 re f 80.081 595.8 44.64 -0.12 re f 80.081 595.32 44.64 -0.12 re f 80.081 594.84 44.64 -0.12 re f 80.081 594.36 44.64 -0.12 re f 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W)-8.4(ith)5.6( th)-6.4(is in)5.6( )-12(m)-5.7(i)0.3(n)5.6(d)-6.4(, th)5.6(e f)7.3(o)-6.4(llo)-18.5(w)10.9(i)-11.7(n)5.6(g)5.6( d)-6.4(e)-2.3(si)-11.7(g)5.6(n)-6.4( )]TJ T* 0.0051 Tc 0.01 Tw [(m)11.8(e)3.2(t)-6.2(h)11.1(odol)5.8(ogy)23.2( w)16.4(a)3.2(s)8.7( u)11.1(s)8.7(ed. )]TJ T* 0 Tc 0.2199 Tw [(T)-15.7(h)6(e f)7.7(i)0.7(rst)-11.3( step)-6( i)-11.3(s)3.6( to)-6( e)-14(s)3.6(ti)-11.3(m)6.7(a)-1.9(te)-14( C)]TJ 6.48 0 0 6.48 180.8806 581.52 Tm 0.0001 Tc 0 Tw (parasitic)Tj 9.96 0 0 9.96 202.8406 583.08 Tm 0.0019 Tc 0.218 Tw [(.)-13.2( T)-13.8(h)7.9(is)-6.5( is)-6.5( a proces)5.5(s)-6.5( )]TJ -15.3012 -1.1566 TD 0.0024 Tc 0.1331 Tw [(depen)8.4(d)-3.6(en)8.4(t v)8.4(a)0.5(lu)8.4(e t)-8.9(h)8.4(at allo)-15.7(w)13.7(s)6( t)-8.9(h)8.4(e des)6(i)3.1(gn)8.4(er to ch)8.4(oos)6(e C)]TJ 6.48 0 0 6.48 272.9206 570 Tm 0.0001 Tc 0 Tw (initial)Tj 9.96 0 0 9.96 288.0406 571.56 Tm 0 Tc ( )Tj -23.8554 -1.1446 TD 0.0008 Tc 0.1106 Tw [(f)8.5(o)-5.2(r a d)-5.2(e)-1.1(sired)-5.2( v)6.8(o)-5.2(ltag)6.8(e)-1.1( g)6.8(a)-1.1(i)-10.5(n)6.8(. Th)6.8(e )-12.1(m)19.6(a)-1.1(i)-10.5(n)6.8( so)-17.3(u)6.8(r)-3.5(ces o)-5.2(f)8.5( p)-5.2(a)-1.1(rasitic)-13.2( )]TJ 0 -1.1566 TD 0.0018 Tc 0.2301 Tw [(capacitan)7.8(ce of)9.5( th)7.8(e s)5.4(t)2.5(ru)7.8(c)-12.2(t)2.5(u)7.8(r)-2.5(e )-12.1(in)7.8( Fi)-9.5(g)7.8(u)7.8(r)-2.5(e 3 are th)7.8(e v)7.8(o)-4.2(ltag)7.8(e)-0.1( )]TJ T* -0.0054 Tc 0.0325 Tw [(p)-11.4(u)-11.4(m)13.4(p)-11.4( a)-7.3(n)0.6(c)-19.4(h)0.6(o)-11.4(r)-9.7(s.)-8.4( )12(T)-21.1(hus,)-8.4( t)-4.7(h)0.6(e)-7.3( )-12.1(fo)-11.4(l)-4.7(l)-16.7(o)-23.5(w)18(i)-16.7(ng i)-4.7(s)-1.8( a)-7.3( ge)-19.4(ne)-7.3(r)-9.7(a)-7.3(l)-4.7( e)-7.3(x)0.6(p)-11.4(r)-9.7(e)-7.3(ssi)-4.7(o)-23.5(n)0.6( )]TJ T* 0.002 Tc 0.001 Tw [(f)9.7(o)-4(r th)8(e lo)-16.1(w)13.3(e)0.1(r b)-4(o)-4(u)8(n)8(d)-4( o)-4(f)9.7( C)]TJ 6.48 0 0 6.48 149.4406 524.04 Tm 0.0001 Tc 0 Tw [(para)-19(sitic )]TJ 9.96 0 0 9.96 173.2006 525.6 Tm 0.0005 Tc 0.0025 Tw [(f)8.2(o)-5.5(r th)6.5(is d)-5.5(e)-1.4(s)-7.9(i)1.2(g)-5.5(n)6.5(: )]TJ -12.3253 -1.1566 TD 0 Tc 0 Tw ( )Tj ET q 0.95 0 0 -1.0526 0 0 cm /Cs6 CS 0 0 0 SCN 1 J 1 j 0.356 w 10 M []0 d 1 i 114.86 -457.612 m 149.848 -457.612 l 177.636 -457.612 m 250.518 -457.612 l S Q BT /F8 1 Tf 9 0 0 9 238.4806 470.52 Tm ()Tj 0 0.84 TD ()Tj 0 -1.0133 TD ()Tj 0 1.9733 TD ()Tj -16.68 -1.8 TD ()Tj 0 0.84 TD ()Tj 0 -1.0133 TD ()Tj 0 1.9733 TD ()Tj /F2 1 Tf 9.0324 0 0 9.0324 199.4806 486.24 Tm ()Tj -6.1512 -0.7573 TD ()Tj -7.3336 0 TD ()Tj 2.9494 2.604 TD ()Tj -2.9892 0 TD ()Tj /TT6 1 Tf 5.2453 0 0 5.2453 201.8806 470.16 Tm (ox)Tj 2.3335 2.6309 TD (effective)Tj -6.8633 0 TD (drawn)Tj -3.2944 -1.304 TD (air)Tj -7.0005 -1.3269 TD (ox)Tj -1.0981 2.6309 TD (effective)Tj -3.0427 -1.304 TD (ox)Tj -8.5104 0 TD (parasitic)Tj 11.9192 4.5069 TD (overetch)Tj -5.8338 0 TD (drawn)Tj -6.1083 0 TD (effectuve)Tj 9.0324 0 0 9.0324 199.2406 472.44 Tm (t)Tj 0.9034 1.5278 TD (W)Tj -3.9857 0 TD (W)Tj -5.5135 -1.5278 TD (t)Tj -1.1027 1.5278 TD (W)Tj -6.6693 -0.7573 TD (C)Tj 6.8819 2.604 TD (W)Tj -3.4011 0 TD (W)Tj -3.5339 0 TD (W)Tj /TT2 1 Tf 5.25 0 0 5.25 234.2806 490.32 Tm (2)Tj -7.5429 0 TD (2)Tj -7.7714 -2.5143 TD (0)Tj -2.9257 2.5143 TD (2)Tj -8.1829 -2.5143 TD (0)Tj 9 0 0 9 231.0406 486.24 Tm (\))Tj -2.8667 0 TD (\()Tj -1.5333 0 TD (\))Tj -2.4667 0 TD (\()Tj -3.7733 0 TD (\))Tj -2.8667 0 TD (\()Tj -2.8267 -0.76 TD (2)Tj 2.9067 2.6133 TD (2)Tj /F2 1 Tf 9 0 2.7816 9 156.4006 479.4 Tm ()Tj -0.76 0 TD ()Tj -5.72 0 TD ()Tj -0.76 0 TD ()Tj /TT2 1 Tf 9.96 0 0 9.96 243.4006 493.56 Tm 0.0047 Tc -0.0017 Tw ( \(13\) )Tj -19.3735 -3.6145 TD 0 Tc 0 Tw ( )Tj 0 -1.1446 TD 0.0047 Tc 0.5646 Tw [(F)6.6(o)-1.3(r t)5.4(h)10.7(i)5.4(s)-3.7( S)6.6(O)4(I proces)8.3(s)8.3(,)1.7( )-12(t)5.4(h)10.7(e)-9.3( )-12(m)23.5(i)-6.6(n)10.7(i)-6.6(m)11.4(u)-1.3(m)11.4( dra)-9.3(w)16(n a)-9.3(n)10.7(c)-9.3(h)10.7(or )]TJ 0 -1.241 TD 0.0056 Tc 0.1781 Tw [(di)-5.7(m)24.4(e)3.7(ns)9.2(i)6.3(ons)9.2( \(W)]TJ 6.48 0 0 6.48 113.0806 432.24 Tm 0.0003 Tc 0 Tw (drawn)Tj 9.96 0 0 9.96 129.2806 433.8 Tm 0.0038 Tc 0.1799 Tw [(\) are )12(80)]TJ /F2 1 Tf 3.4337 0 TD 0 Tc 0 Tw ( )Tj /TT2 1 Tf 0.5663 0 TD -0.0188 Tc 0.2146 Tw [(m x)-12.8( )12.1(8)-24.8(0)]TJ /F2 1 Tf 3.1566 0 TD 0 Tc 0 Tw ( )Tj /TT2 1 Tf 0.5663 0 TD -0.0076 Tc 0.1913 Tw [(m.)-10.6( A )-12.1(mi)-6.9(n)-13.6(i)-18.9(mu)-13.6(m o)-13.6(f)-11.9( )]TJ -15.6386 -1.1446 TD 0.0036 Tc 0.0837 Tw [(t)-7.7(w)27(o a)-10.4(n)9.6(c)-10.4(h)9.6(ors)7.2( are )-12.1(n)9.6(eeded \(on)9.6(e)1.7( )-12.1(f)11.3(o)-2.4(r each s)7.2(i)4.3(de o)-14.5(f)11.3( t)-7.7(h)9.6(e )-12.1(s)7.2(h)-2.4(u)9.6(t)4.3(t)-7.7(l)4.3(e\). )84.3( )]TJ 0 -1.241 TD 0.0037 Tc 0.1198 Tw [(T)-12(h)9.7(eref)11.4(ore, as)7.3(s)7.3(u)-2.3(m)22.5(i)-7.6(ng)9.7( a 10)]TJ /F2 1 Tf 10.5663 0 TD 0 Tc 0 Tw ( )Tj /TT2 1 Tf 0.5663 0 TD 0.0032 Tc 0.1203 Tw [(m)9.9( )-12(ov)9.2(eretch)9.2( of)10.9( th)9.2(e a)-10.8(n)9.2(ch)9.2(ors)6.8( a)-10.8(n)9.2(d )]TJ -11.1325 -1.2289 TD 0.0034 Tc 0.0719 Tw [(an)9.4( ox)9.4(ide t)-7.9(h)9.4(ickn)9.4(es)-5(s)7( of)11.1( 2)]TJ /F2 1 Tf 9.5542 0 TD 0 Tc 0 Tw ( )Tj /TT2 1 Tf 0.5783 0 TD 0.0018 Tc 0.0735 Tw [(m)8.5(,)-1.2( th)-4.2(e lo)-16.3(w)25.2(e)-0.1(r b)-4.2(o)-4.2(u)7.8(n)7.8(d)-4.2( )-12.1(f)9.5(o)-4.2(r C)]TJ 6.48 0 0 6.48 256.0006 396.24 Tm 0.0001 Tc 0 Tw (parasitic)Tj 9.96 0 0 9.96 277.9606 397.8 Tm 0.0099 Tc 0.0654 Tw [( is )]TJ -22.8434 -1.1446 TD 0.0031 Tc 0.1565 Tw [(150 f)10.8(F)5(. T)-12.6(h)9.1(e paras)6.7(itic)-10.9(s)6.7( o)-15(f)10.8( t)-8.2(h)-2.9(e v)9.1(o)-2.9(lta)-10.9(g)9.1(e)1.2( pum)9.8(p )-12.1(f)10.8(i)-8.2(ng)9.1(ers)6.7( al)-8.2(s)6.7(o)-2.9( )]TJ 0 -1.1566 TD 0.0016 Tc 0.0617 Tw [(in)7.6(creas)5.2(e C)]TJ 6.48 0 0 6.48 92.8006 373.32 Tm 0.0001 Tc 0 Tw [(parasi)-18.4(tic )]TJ 9.96 0 0 9.96 117.0406 374.88 Tm 0.0006 Tc 0.0627 Tw [(, b)-5.4(u)6.6(t f)8.3(o)-5.4(r th)6.6(e i)-10.7(n)6.6(itial iteratio)-17.5(n)6.6( it is n)6.6(e)-13.4(g)6.6(l)1.3(ected)-5.4( )]TJ -6.6867 -1.1566 TD 0.001 Tc 0.002 Tw [(d)-5(u)7(e to)-5( th)7(eir relativ)7(el)-10.3(y)7( s)-7.4(m)7.7(all co)-17.1(n)7(t)1.7(rib)-5(u)7(tio)-17.1(n)7(.)-2( )]TJ T* -0.0056 Tc 0.4182 Tw [(A)5.7(c)-7.5(c)-7.5(o)-11.6(r)-9.9(d)-11.6(i)-4.9(n)-11.6(g t)-4.9(o)-11.6( e)-7.5(q)-11.6(ua)-7.5(t)-4.9(i)-4.9(o)-11.6(n \()-9.9(4)-11.6(\))-9.9(,)3.4( t)-4.9(o)-11.6( sust)-4.9(a)-7.5(i)-4.9(n a)-7.5( vo)-11.6(l)-4.9(t)-4.9(a)-19.6(ge)-7.5( ga)-7.5(i)-16.9(n)-11.6( )]TJ T* 0.0042 Tc 0.1675 Tw [(deg)10.2(r)-0.1(adat)4.9(i)4.9(o)-1.8(n)10.2( of n)10.2(o)-1.8( )-12(m)10.9(o)-1.8(re t)-7.1(h)10.2(a)-9.8(n)-1.8( 25%)5.9(, C)]TJ 6.48 0 0 6.48 206.6806 338.76 Tm 0.0002 Tc 0 Tw (final)Tj 9.96 0 0 9.96 218.6806 340.32 Tm 0.0025 Tc 0.1812 Tw [( m)9.2(u)-3.5(s)6.1(t)3.2( )12(be g)8.5(r)-1.8(eater )]TJ -16.8916 -1.1446 TD 0.0044 Tc 0.0107 Tw [(t)5.1(h)10.4(an 450f)12.1(F)6.3(.)1.4( We co)-13.7(n)10.4(s)8(erv)10.4(a)-9.6(t)5.1(i)5.1(v)10.4(e)-9.6(l)-6.9(y)10.4( des)8(i)-6.9(gn)10.4(ed C)]TJ 6.48 0 0 6.48 224.4406 327.36 Tm 0.0002 Tc 0 Tw (final)Tj 9.96 0 0 9.96 236.4406 328.92 Tm 0.005 Tc 0.0101 Tw [( t)5.7(o)-1( be 500f)12.7(F)6.9(.)2( )12.1( )]TJ -18.6747 -1.1566 TD 0.0041 Tc 0.3122 Tw [(T)-11.6(h)10.1(e l)4.8(e)2.2(n)10.1(g)10.1(t)-7.2(h)10.1( an)10.1(d )-12(w)15.4(i)4.8(dt)4.8(h)10.1( of)11.8( e)-9.9(ach)10.1( f)11.8(i)-7.2(ng)10.1(er )-12(w)27.5(a)-9.9(s)7.7( des)7.7(i)4.8(gn)10.1(ed t)4.8(o)-1.9( )]TJ T* 0.0019 Tc 0.0854 Tw [(ach)7.9(iev)7.9(e)-12.1( a )-12.1(h)7.9(i)2.6(gh)7.9( capacita)-12.1(n)7.9(ce i)-9.4(n)-4.1( a s)-6.5(m)8.6(all area )-12.1(w)13.2(h)-4.1(ile)-12.1( av)7.9(oidi)-9.4(n)7.9(g)-4.1( )]TJ T* 0.0012 Tc 0.0861 Tw [(f)8.9(i)-10.1(n)7.2(g)7.2(e)-0.7(r)-15.2(-)8.9(to)-4.8(-f)8.9(i)-10.1(n)-4.8(g)7.2(e)-0.7(r p)-4.8(u)7.2(ll i)-10.1(n)7.2(. T)-14.5(h)7.2(e f)8.9(o)-4.8(llo)-16.9(w)12.5(i)1.9(n)-4.8(g)7.2( eq)-4.8(u)7.2(a)-12.8(tio)-4.8(n)7.2( i)-10.1(s)4.8( cru)7.2(c)-0.7(ial)-10.1( )]TJ T* 0.0006 Tc 0.0024 Tw [(in)6.6( d)-5.4(e)-1.3(ter)-15.8(m)19.4(i)-10.7(n)6.6(i)-10.7(n)6.6(g)6.6( t)-10.7(h)6.6(e p)-5.4(u)6.6(ll)-10.7(-)8.3(i)-10.7(n)6.6( stab)-17.5(ilit)-10.7(y)18.7( o)-17.5(f)8.3( th)6.6(e )-12.1(f)8.3(i)-10.7(n)6.6(g)6.6(e)-1.3(rs)-7.8(: )]TJ T* 0 Tc 0 Tw ( )Tj ET q 1.0309 0 0 -0.97 0 0 cm /Cs6 CS 0 0 0 SCN 1 J 1 j 0.378 w 10 M []0 d 1 i 131.221 -260.291 m 165.093 -260.291 l 125.285 -257.569 m 126.449 -258.311 l S Q q 1.0309 0 0 -0.97 0 0 cm /Cs6 CS 0 0 0 SCN 1 J 1 j 0.756 w 10 M []0 d 1 i 126.449 -258.064 m 128.078 -247.919 l S Q q 1.0309 0 0 -0.97 0 0 cm /Cs6 CS 0 0 0 SCN 1 J 1 j 0.378 w 10 M []0 d 1 i 128.311 -247.919 m 130.523 -275.012 l 172.892 -275.012 l 179.76 -260.291 m 209.674 -260.291 l 173.707 -257.074 m 174.871 -257.816 l S Q q 1.0309 0 0 -0.97 0 0 cm /Cs6 CS 0 0 0 SCN 1 J 1 j 0.756 w 10 M []0 d 1 i 174.871 -257.569 m 176.617 -247.919 l S Q q 1.0309 0 0 -0.97 0 0 cm /Cs6 CS 0 0 0 SCN 1 J 1 j 0.378 w 10 M []0 d 1 i 176.733 -247.919 m 179.061 -273.775 l 210.373 -273.775 l S Q BT 5.2448 0 0 5.2448 211.8406 247.2001 Tm (4)Tj -1.6016 -1.1897 TD (0)Tj 1.5329 3.5921 TD (3)Tj -1.7846 0 TD (3)Tj -8.9459 -3.5921 TD (0)Tj 2.082 3.8438 TD (3)Tj 8.9911 0 0 8.9911 184.8406 243.1201 Tm (108)Tj 0.1335 1.4147 TD (8)Tj -5.0183 -1.4014 TD (27)Tj -0.6006 1.5348 TD (8)Tj /TT6 1 Tf 7.9679 -1.5482 TD (L)Tj -0.1602 1.4147 TD (g)Tj -1.6283 0 TD (Ea)Tj -3.5368 -1.4014 TD (A)Tj 0.1201 1.5348 TD (g)Tj -2.2422 0 TD (k)Tj -4.9649 -0.7607 TD (V)Tj 5.2448 0 0 5.2448 145.8406 254.7601 Tm (finger)Tj -6.0631 -1.3041 TD (in)Tj -2.3108 0 TD (pull)Tj /F2 1 Tf 8.9911 0 2.7787 8.9911 198.5206 243.1201 Tm ()Tj -5.3828 0.0133 TD ()Tj 8.9911 0 0 8.9911 172.6006 250.2001 Tm ()Tj -5.6723 0 TD ()Tj 5.2448 0 0 5.2448 110.9206 247.92 Tm ()Tj /TT2 1 Tf 9.96 0 0 9.96 219.1606 254.16 Tm 0.0039 Tc -0.0009 Tw [( \(14)9.9(\))-0.4( )]TJ -16.9398 -2.5181 TD 0 Tc 0 Tw ( )Tj 0 -1.2289 TD 0.0029 Tc 0.0122 Tw [(T)-12.8(h)8.9(e ch)8.9(os)6.5(en)8.9( di)-8.4(m)21.7(e)-11.1(n)8.9(s)6.5(io)-15.2(n)8.9(s)6.5( )-12(w)14.2(e)1(re )]TJ /TT6 1 Tf 11.9157 0 TD 0 Tc 0 Tw (L)Tj /TT2 1 Tf 0.5542 0 TD 0.0051 Tc (=310)Tj /F2 1 Tf 2.0843 0 TD 0 Tc ( )Tj /TT2 1 Tf 0.5663 0 TD -0.0068 Tc 0.0219 Tw [(m a)-20.8(n)-0.8(d)-12.8( )]TJ /TT6 1 Tf 2.759 0 TD 0 Tc 0 Tw (a)Tj /TT2 1 Tf 0.506 0 TD 0.0023 Tc (=5)Tj /F2 1 Tf 1.0723 0 TD 0 Tc ( )Tj /TT2 1 Tf 0.5663 0 TD 0.0018 Tc 0.0133 Tw [(m)8.5( \(n)7.8(o)-4.2(tice)-12.2( )]TJ -20.0241 -1.1446 TD 0.0002 Tc 0.1112 Tw [(th)6.2(at t)-11.1(h)6.2(e p)-5.8(u)6.2(ll)-11.1(-)7.9(i)-11.1(n)6.2( )-12.1(v)6.2(o)-5.8(ltag)6.2(e)-1.7( i)-11.1(s)3.8( )]TJ /TT6 1 Tf 10.8313 0 TD 0.0048 Tc 0 Tw [(i)5.5(ndependent)]TJ /TT2 1 Tf 4.9277 0 TD -0.0011 Tc 0.1125 Tw [( )12(o)-7.1(f)6.6( th)4.9(e t)-12.4(h)4.9(ic)-15.1(k)4.9(n)4.9(e)-15.1(ss )]TJ /TT6 1 Tf 7.2169 0 TD 0 Tc 0 Tw (t)Tj /TT2 1 Tf 0.2771 0 TD 0.0039 Tc -0.0009 Tw [(\).)-11.2( )]TJ -23.253 -1.241 TD 0.0053 Tc 0.0941 Tw [(A)4.6(s)8.9(sum)12(i)6(ng)11.3( a g)11.3(a)3.4(p of)13( 1.5)]TJ /F2 1 Tf 9.4578 0 TD 0 Tc 0 Tw ( )Tj /TT2 1 Tf 0.5663 0 TD 0.0026 Tc 0.0968 Tw [(m)9.3( af)10.3(t)-8.7(e)0.7(r pre-)10.3(loadin)8.6(g)8.6( th)8.6(e s)6.2(p)-3.4(ri)-8.7(n)8.6(g)8.6( \(to)-15.5( )]TJ -10.0241 -1.1446 TD 0.0041 Tc -0.0011 Tw [(be di)4.8(s)7.7(c)2.2(u)10.1(s)7.7(s)7.7(e)2.2(d bel)4.8(o)-14(w)15.4(\))-0.2(, t)4.8(h)10.1(e pul)4.8(l)-7.2(-)11.8(i)-7.2(n)10.1( v)10.1(o)-1.9(l)4.8(t)4.8(a)-9.9(g)10.1(e)2.2( i)-7.2(s)7.7( 8V)3.4(, s)7.7(a)2.2(f)11.8(e)-9.9(l)-7.2(y)22.2( l)4.8(a)2.2(r)-12.3(g)10.1(er )]TJ 0 -1.1566 TD 0.0003 Tc 0.0509 Tw [(th)6.3(an)6.3( t)-11(h)6.3(e in)-5.7(ten)6.3(d)-5.7(ed)-5.7( in)6.3(it)-11(ial v)6.3(o)-5.7(lta)-13.7(g)6.3(e)-1.6( o)-5.7(f)8( th)6.3(e s)-8.1(y)6.3(s)-8.1(t)1(e)-13.7(m)19.1(. W)-7.7(ith)6.3( t)-11(h)6.3(ese)-13.7( )]TJ T* 0.0047 Tc 0.1911 Tw [(di)-6.6(m)23.5(e)2.8(ns)8.3(i)5.4(ons)8.3(, t)5.4(e)-9.3(n)10.7( v)10.7(o)-1.3(l)5.4(t)5.4(a)-9.3(g)10.7(e)2.8( p)-13.4(u)-1.3(m)11.4(p)-1.3( f)12.4(i)5.4(ng)10.7(ers )-12(w)16(e)2.8(re n)10.7(ece)-9.3(s)8.3(s)8.3(a)2.8(r)-11.7(y)10.7( t)5.4(o)-13.4( )]TJ T* 0.0014 Tc 0.098 Tw [(ach)7.4(iev)7.4(e)-0.5( C)]TJ 6.48 0 0 6.48 90.8806 145.56 Tm 0.0002 Tc 0 Tw (final)Tj 9.96 0 0 9.96 102.7606 147.12 Tm 0.0045 Tc 0.0828 Tw [(=500f)12.2(F)6.4(,)1.5( as)8.1(sum)11.2(i)-6.8(ng)10.5( an)10.5( i)5.2(n)10.5(i)-6.8(t)5.2(i)5.2(a)2.6(l)5.2( f)12.2(i)-6.8(ng)10.5(er s)8.1(p)-1.5(aci)5.2(ng)10.5( of)12.2( )]TJ -5.253 -1.241 TD 0 Tc 0 Tw (5)Tj /F2 1 Tf 0.5181 0 TD ( )Tj /TT2 1 Tf 0.5663 0 TD -0.0188 Tc [(m.)-21.8( )]TJ -1.0843 -1.1446 TD 0.0028 Tc 0.0123 Tw [(T)-12.9(o)8.8( ach)8.8(iev)8.8(e)0.9( an)8.8( )-12(u)8.8(n)8.8(c)0.9(orrected v)8.8(o)-3.2(l)-8.5(t)3.5(ag)8.8(e g)8.8(a)0.9(i)-8.5(n)8.8( of)10.5( 2, C)]TJ 6.48 0 0 6.48 238.7206 121.8 Tm 0 Tc 0 Tw (initial)Tj 9.96 0 0 9.96 253.8406 123.36 Tm -0.0052 Tc 0.0323 Tw [( mu)-11.2(st)-4.5( )12(b)-11.2(e)-7.1( )]TJ -20.4217 -1.1566 TD 0.0041 Tc 0.1314 Tw [(>1pF)6(. G)3.4(i)4.8(v)10.1(e)2.2(n)10.1( t)4.8(h)10.1(e di)-7.2(m)22.9(e)-9.9(ns)7.7(i)4.8(o)-1.9(n)10.1(s)-4.3( s)7.7(p)-1.9(eci)4.8(f)11.8(i)4.8(ed abov)10.1(e, t)4.8(h)10.1(e g)10.1(a)2.2(p of )]TJ 0 -1.2289 TD 0.0029 Tc 0.1085 Tw [(th)8.9(e pre-)10.6(loaded s)6.5(t)3.6(ru)8.9(ct)-8.4(u)8.9(r)-1.4(e )-12.1(m)9.6(u)-3.1(s)6.5(t)-8.4( be 1.5)]TJ /F2 1 Tf 15.012 0 TD 0 Tc 0 Tw ( )Tj /TT2 1 Tf 0.5663 0 TD 0.0005 Tc 0.1109 Tw [(m)7.2(.)-2.5( Si)-10.8(n)6.5(ce t)-10.8(h)6.5(e i)-10.8(n)6.5(itial)-10.8( )]TJ -15.5783 -1.241 TD 0.002 Tc 0.2902 Tw [(s)5.6(p)-4(acing)8( is)5.6( 5)]TJ /F2 1 Tf 5.3253 0 TD 0 Tc 0 Tw ( )Tj /TT2 1 Tf 0.5663 0 TD 0.003 Tc 0.2892 Tw [(m)9.7(,)0( an)9(d th)9(e pre-)10.7(loaded g)9(a)1.1(p is)6.6( 1.5)]TJ /F2 1 Tf 14.6145 0 TD 0 Tc 0 Tw ( )Tj /TT2 1 Tf 0.5663 0 TD -0.0188 Tc 0.311 Tw [(m,)-21.8( t)-30.1(h)-12.8(e)-20.7( )]TJ -21.0723 -1.2289 TD 0.0004 Tc 0.0026 Tw [(d)-5.6(i)1.1(sp)-5.6(lace)-13.6(m)19.2(e)-13.6(n)6.4(t)1.1( o)-5.6(f)8.1( t)-10.9(h)6.4(e s)-8(h)6.4(u)6.4(t)-10.9(tle is )-12.1(3)-5.6(.)-2.6(5)]TJ /F2 1 Tf 13.2289 0 TD 0 Tc 0 Tw ( )Tj /TT2 1 Tf 0.5663 0 TD -0.0067 Tc 0.0097 Tw [(m.)-9.7( )]TJ -13.7952 -1.1446 TD 0 Tc 0 Tw ( )Tj 27.4699 67.1687 TD -0.0038 Tc 0.0068 Tw [(C.)-6.8( Su)-9.8(sp)-9.8(e)-5.7(n)2.2(sio)-21.9(n)2.2( d)-9.8(e)-5.7(si)-15.1(gn )]TJ 0 -1.1566 TD 0 Tc 0 Tw ( )Tj T* 0.0027 Tc 0.0606 Tw [(Equ)8.7(a)0.8(tion)8.7( \(10\) s)6.3(t)3.4(ates)-5.7( th)8.7(a)-11.3(t)3.4( t)-8.6(h)8.7(e )-12(v)8.7(o)-3.3(ltag)8.7(e)-11.3( pum)21.5(p, a)-11.3(f)10.4(ter recei)-8.6(v)8.7(i)-8.6(n)8.7(g)-3.3( )]TJ 0 -1.1446 TD 0.002 Tc 0.4347 Tw [(a con)8(s)5.6(ta)-12(n)8(t)-9.3( ch)8(ar)-14.4(g)8(e)0.1( )-12.1(f)9.7(r)-2.3(o)-16.1(m)8.7( t)-9.3(h)-4(e s)5.6(o)-4(u)8(r)-2.3(ce, pres)5.6(e)-12(n)8(ts)-6.4( a )-12.1(f)9.7(o)-4(rce )]TJ 0 -1.1566 TD 0.0045 Tc 0.0467 Tw [(oppos)8.1(i)5.2(n)10.5(g)10.5( t)5.2(h)10.5(e su)10.5(s)8.1(p)-1.5(ens)8.1(i)5.2(on)10.5( t)-6.8(h)10.5(at)5.2( i)-6.8(s)8.1( equ)10.5(i)5.2(v)10.5(a)2.6(l)5.2(e)-9.5(n)10.5(t)5.2( t)5.2(o)-1.5( a s)8.1(p)-1.5(ri)5.2(n)10.5(g)10.5( )-12.1(w)15.8(i)5.2(t)-6.8(h)10.5( )]TJ T* -0.0054 Tc 0.3578 Tw [(c)-7.3(o)-11.4(nst)-4.7(a)-19.4(nt)-4.7( K)]TJ 6.48 0 0 6.48 370.4806 673.56 Tm 0.0006 Tc 0 Tw (eq)Tj 9.96 0 0 9.96 376.6006 675.12 Tm 0.0005 Tc 0.3519 Tw [(. Usi)-10.8(n)6.5(g)6.5( t)-10.8(h)6.5(e v)-5.5(a)-1.4(lu)6.5(es calc)-13.5(u)6.5(lated)-5.5( in)6.5( p)-5.5(a)-1.4(rt B)-7.2(,)-2.5( )]TJ -5.2771 -1.1566 TD 0 Tc 0 Tw (K)Tj 6.48 0 0 6.48 331.2406 662.04 Tm 0.0006 Tc (eq)Tj 9.96 0 0 9.96 337.3606 663.6 Tm 0.2553 Tw [(=1)-5.3(.4)-5.3(8)-5.3(.)-2.3( )12(T)-15(h)6.7(eref)8.4(o)-5.3(r)-3.6(e, to)-5.3( retu)6.7(rn)6.7( t)-10.6(h)6.7(e )-12.1(sh)-5.3(u)6.7(t)1.4(t)-10.6(l)1.4(e to)-5.3( it)-10.6(s i)-10.6(n)6.7(itial)-10.6( )]TJ -1.3373 -1.1566 TD 0.0009 Tc 0.1587 Tw [(p)-5.1(o)-5.1(s)4.5(itio)-5.1(n)6.9( a)-13.1(f)8.6(ter t)-10.4(h)6.9(e c)-13.1(h)6.9(arg)6.9(e)-1( )-12.1(h)6.9(a)-1(s)-7.5( b)-5.1(een)6.9( ap)-5.1(p)-5.1(lied)-5.1(,)-2.1( th)6.9(e)-13.1( f)8.6(o)-5.1(llo)-17.2(w)12.2(i)-10.4(n)-5.1(g)-5.1( )]TJ T* -0.0012 Tc 0.0163 Tw [(m)5.5(u)-7.2(st h)4.8(o)-7.2(ld)-7.2(: )]TJ 0 -1.1446 TD 0 Tc 0 Tw ( )Tj ET /Cs6 CS 0 0 0 SCN 1 J 1 j 0.382 w 10 M []0 d 1 i 402.041 621 m 402.041 608.16 l 436.001 621 m 436.001 608.16 l 443.561 621 m 443.561 608.16 l 458.561 621 m 458.561 608.16 l S BT /TT6 1 Tf 5.2576 0 0 5.2576 451.6006 610.08 Tm (eq)Tj -7.8516 0 TD (suspension)Tj 9.0131 0 0 9.0131 444.7606 612.36 Tm (K)Tj -4.6066 0 TD (K)Tj /TT2 1 Tf 5.2576 0 0 5.2576 439.4806 620.64 Tm (!)Tj /F2 1 Tf 9.0131 0 0 9.0131 437.8006 612.36 Tm ()Tj /TT2 1 Tf 9.96 0 0 9.96 461.2006 614.4 Tm 0.0039 Tc -0.0009 Tw [( \(15)9.9(\))-0.4( )]TJ -13.7711 -1.7108 TD 0 Tc 0 Tw ( )Tj 0 -1.1566 TD 0.0003 Tc 0.3762 Tw [(Ho)-17.8(w)23.7(e)-13.7(v)6.3(e)-1.6(r, th)6.3(e actu)6.3(a)-13.7(to)-5.7(r th)6.3(at)-11( p)-5.7(r)-4(e-)8(lo)-5.7(ad)-5.7(s th)6.3(e sh)-5.7(u)6.3(ttle )-12.1(m)7(u)-5.7(st)-11( )]TJ T* 0.003 Tc 0.0241 Tw [(ov)9(erco)-15.1(m)21.8(e)1.1( th)9(e )-12.1(f)10.7(o)-3(rce pres)6.6(en)9(ted by)21.1( t)-8.3(h)9(e s)-5.4(u)9(s)6.6(p)-3(e)-11(n)9(s)6.6(i)3.7(on)9(, )-12.1(s)6.6(o)-3( caref)10.7(u)9(l)-8.3( )]TJ 0 -1.1446 TD 0.0009 Tc 0.0503 Tw [(d)-5.1(e)-1(sig)-5.1(n)6.9( is cru)6.9(c)-1(ial. W)-7.1(e)-1( ch)6.9(o)-5.1(s)4.5(e th)6.9(e targ)6.9(et v)6.9(a)-13.1(lu)6.9(e K)]TJ 6.48 0 0 6.48 513.5206 561.36 Tm -0.0001 Tc 0 Tw [(suspe)-19.2(n)-0.1(sion)]TJ 9.96 0 0 9.96 542.0806 562.92 Tm 0.0023 Tc 0.0489 Tw [(= -)10(4)-3.7(.)-12.8( )36.1( )]TJ -21.8916 -1.1566 TD 0.005 Tc 0.1908 Tw [(T)-10.7(h)11(e f)12.7(o)-1(l)5.7(d)-1(ed bea)-9(m)23.8( )-12(s)8.6(u)-1(s)8.6(p)-1(ens)8.6(i)5.7(on sh)11(o)-13.1(w)16.3(n)11( )-12(i)5.7(n)-1( F)6.9(i)-6.3(gu)11(re 3 gi)5.7(v)11(e)-9(s)8.6( a)-9( )]TJ T* 0.0004 Tc 0.0147 Tw [(to)-5.6(tal m)19.2(ech)6.4(a)-13.6(n)6.4(ical sp)-5.6(rin)-5.6(g)6.4( )12.1(co)-5.6(n)6.4(s)4(ta)-13.6(n)6.4(t)1.1( )12.1(o)-5.6(f)8.1(: )]TJ T* 0 Tc 0 Tw ( )Tj ET 432.281 511.56 m 461.321 511.56 l S BT /F10 1 Tf 9.0187 0 0 9.0187 461.9206 507 Tm ()Tj 0 -0.785 TD ()Tj 0 1.743 TD ()Tj -3.7256 -0.958 TD ()Tj 0 -0.785 TD ()Tj 0 1.743 TD ()Tj /F2 1 Tf -1.3439 -0.7052 TD ()Tj /TT2 1 Tf 5.2608 0 0 5.2608 447.5206 506.28 Tm (3)Tj 1.4142 2.4407 TD (3)Tj 9.0187 0 0 9.0187 423.4006 509.28 Tm (2)Tj /TT6 1 Tf 2.1688 -0.785 TD (L)Tj 1.6499 1.437 TD (t)Tj -0.9181 0 TD (a)Tj -1.8096 0 TD (E)Tj -4.1647 -0.652 TD (K)Tj 5.2608 0 0 5.2608 439.3606 512.88 Tm (SCS)Tj -7.0027 -1.1177 TD (total)Tj /TT2 1 Tf 9.96 0 0 9.96 467.4406 513.2401 Tm 0.0039 Tc -0.0009 Tw [( \(16)9.9(\))-0.4( )]TJ -14.3976 -2.494 TD 0 Tc 0 Tw ( )Tj 0 -1.1566 TD 0.0025 Tc [(w)13.8(h)-3.5(ere )]TJ /TT6 1 Tf 2.747 0 TD 0 Tc (a)Tj /TT2 1 Tf 0.506 0 TD 0.003 Tc (, )Tj /TT6 1 Tf 0.5542 0 TD 0 Tc (t)Tj /TT2 1 Tf 0.2771 0 TD 0.003 Tc (, )Tj /TT6 1 Tf 0.5542 0 TD 0 Tc (L)Tj /TT2 1 Tf 0.5542 0 TD 0.0038 Tc 0.0474 Tw [( are t)-7.5(h)9.8(e di)-7.5(m)22.6(e)-10.2(ns)7.4(ion)9.8(s)7.4( o)-14.3(f)11.5( each s)-4.6(u)9.8(s)7.4(p)-2.2(ens)7.4(i)4.5(on)9.8( bea)-10.2(m)10.5(.)-11.3( )48.2( )]TJ -5.1928 -1.1566 TD 0.0043 Tc 0.071 Tw [(T)-11.4(o)-1.7( re)14.4(du)10.3(ce t)5(h)10.3(e)-9.7( s)7.9(p)-1.7(ri)-7(n)10.3(g)-1.7( area, di)5(m)11(e)2.4(ns)7.9(i)5(on )]TJ /TT6 1 Tf 15.6024 0 TD 0 Tc 0 Tw (a)Tj /TT2 1 Tf 0.506 0 TD 0.004 Tc 0.0713 Tw [( )-12(w)15.3(a)-10(s)7.6( c)-10(h)10(os)7.6(en as)-4.4( t)-7.3(h)10(e)-10( )]TJ -16.1084 -1.241 TD 0.0006 Tc 0.0145 Tw [(lith)6.6(o)-5.4(g)6.6(rap)-17.5(h)6.6(ic )-12(m)7.3(i)1.3(n)6.6(i)-10.7(m)7.3(u)-17.5(m)7.3( o)-5.4(f)8.3( 4)]TJ /F2 1 Tf 10.8916 0 TD 0 Tc 0 Tw ( )Tj /TT2 1 Tf 0.5783 0 TD 0.0042 Tc 0.0109 Tw [(m. )]TJ /TT6 1 Tf 1.5663 0 TD 0 Tc 0 Tw (L)Tj /TT2 1 Tf 0.5542 0 TD 0.0046 Tc 0.0105 Tw [( )-12(w)28(a)-9.4(s)8.2( ch)10.6(os)8.2(e)-9.4(n)10.6( t)5.3(o)-1.4( be 600)]TJ /F2 1 Tf 8.9277 0 TD 0 Tc 0 Tw ( )Tj /TT2 1 Tf 0.5663 0 TD -0.0067 Tc (m )Tj -23.0843 -1.1446 TD 0.0011 Tc 0.0742 Tw [(in)7.1( o)-4.9(r)-3.2(d)-4.9(e)-0.8(r to)-4.9( )-12(m)19.9(eet t)-10.2(h)7.1(e targ)7.1(et )-12(sp)-4.9(rin)7.1(g)-4.9( co)-4.9(n)7.1(s)4.7(ta)-12.9(n)7.1(t)1.8(. It i)-10.2(s)4.7( p)-4.9(r)-3.2(ed)-4.9(icted)-4.9( )]TJ 0 -1.1566 TD 0.0024 Tc 0.0488 Tw [(th)8.4(at proces)6(s)6( v)8.4(a)0.5(riat)-8.9(ion)8.4(s)6( o)-15.7(n)8.4( th)8.4(e )-12.1(s)6(u)-3.6(s)6(p)-3.6(en)8.4(s)6(i)3.1(o)-15.7(n)8.4( cou)8.4(l)3.1(d caus)6(e)0.5( K)]TJ 6.48 0 0 6.48 550.0005 428.52 Tm 0.0001 Tc 0 Tw (total)Tj 9.96 0 0 9.96 561.6406 430.08 Tm 0 Tc ( )Tj -23.8554 -1.1446 TD 0.0045 Tc 0.0347 Tw [(t)5.2(o)-1.5( v)10.5(a)2.6(r)-11.9(y)22.6( f)12.2(r)0.2(o)-13.6(m)23.3( 3.4 N)3.8(/)-6.8(m)23.3( t)5.2(o)-1.5( 5 N)3.8(/)-6.8(m)23.3(,)1.5( )-12(w)15.8(i)5.2(t)-6.8(h)10.5( a n)10.5(o)-13.6(m)11.2(i)-6.8(n)10.5(a)2.6(l)5.2( v)10.5(a)2.6(l)-6.8(u)10.5(e of )]TJ 0 -1.1566 TD 0.0048 Tc 0 Tw [(4N)4.1(/)-6.5(m)23.6(. )]TJ T* 0 Tc ( )Tj T* 0.0008 Tc 0.0022 Tw [(D. A)12.1(c)-1.1(t)-10.5(u)6.8(ato)-5.2(r)-3.5( Desi)-10.5(g)6.8(n)6.8( )]TJ T* 0 Tc 0 Tw ( )Tj T* 0.0037 Tc 0.1439 Tw [(T)-12(h)9.7(e ch)9.7(os)7.3(en)9.7( act)-7.6(u)9.7(a)1.8(t)4.4(o)-2.3(r t)4.4(opol)4.4(og)9.7(y)9.7( )-12(w)15(a)1.8(s)7.3( a )-12(g)9.7(a)1.8(p-)11.4(cl)4.4(osi)4.4(n)-2.3(g)9.7( act)-7.6(u)9.7(a)1.8(t)4.4(o)-2.3(r )]TJ 0 -1.2289 TD -0.0059 Tc 0.0451 Tw [(w)5.4(i)-5.2(t)-17.2(h)0.1( a)-19.9(n)0.1( o)-11.9(p)-11.9(t)-5.2(i)-17.2(m)0.8(u)-11.9(m)12.9( )-12(fi)-17.2(nge)-7.8(r)-10.2( sp)-11.9(a)-7.8(c)-7.8(i)-17.2(ng o)-24(f)1.8( )]TJ /F2 1 Tf 14.3855 0 TD 0 Tc 0 Tw ( )Tj /TT2 1 Tf 0.6145 0 TD ( )Tj /F2 1 Tf 0.2892 0 TD ( )Tj /TT2 1 Tf 0.5663 0 TD 0.0057 Tc 0.0335 Tw [( 2.)14.7(7. )12.1(T)-10(h)11.7(i)6.4(s)9.3( t)6.4(opol)6.4(og)11.7(y)11.7( )]TJ -15.8554 -1.1566 TD 0.0041 Tc 0.1435 Tw [(w)15.4(a)-9.9(s)7.7( c)-9.9(h)10.1(os)7.7(e)-9.9(n)10.1( t)4.8(o)-1.9( produ)10.1(ce a)-9.9( predi)4.8(c)2.2(t)4.8(a)2.2(bl)4.8(e act)4.8(u)10.1(a)2.2(t)4.8(o)-1.9(r a)-9.9(n)10.1(d redu)10.1(ce)-9.9( )]TJ 0 -1.1446 TD 0.0011 Tc 0.3634 Tw [(th)7.1(e n)7.1(eces)-7.3(sar)-15.3(y)19.2( area. )12.1(T)-14.6(h)7.1(e p)7.1(a)-0.8(rasitic cap)-4.9(acitan)7.1(ce o)-4.9(f)8.8( th)7.1(i)-10.2(s)-7.3( )]TJ 0 -1.1566 TD 0.0023 Tc 0.0971 Tw [(s)5.9(t)3(ru)8.3(ct)-9(u)8.3(r)-2(e is)5.9( )-12(n)8.3(o)-3.7(t as)5.9( cru)8.3(c)0.4(ial as)5.9( )-12(on)8.3( th)8.3(e )-12.1(v)8.3(o)-3.7(ltag)8.3(e)0.4( pum)9.1(p fing)8.3(ers)5.9(.)-12.8( )84.3( )]TJ 0 -1.241 TD 0.0053 Tc 0.058 Tw [(F)7.2(i)6(ng)11.3(er di)-6(m)24.1(e)-8.7(n)11.3(s)8.9(i)6(o)-12.8(n)11.3(s)8.9( of)13( )]TJ /TT6 1 Tf 8.9639 0 TD 0 Tc 0 Tw (L)Tj /TT2 1 Tf 0.5542 0 TD 0.0051 Tc (=310)Tj /F2 1 Tf 2.0964 0 TD 0 Tc ( )Tj /TT2 1 Tf 0.5663 0 TD -0.0067 Tc 0.07 Tw [(m a)-8.6(n)-0.7(d)-12.7( )]TJ /TT6 1 Tf 2.8434 0 TD 0 Tc 0 Tw (a)Tj /TT2 1 Tf 0.506 0 TD 0.0023 Tc (=5)Tj /F2 1 Tf 1.0843 0 TD 0 Tc ( )Tj /TT2 1 Tf 0.5663 0 TD 0.0043 Tc 0.059 Tw [(m)11( )-12(w)15.6(e)2.4(re us)7.9(ed f)12(o)-1.7(r )]TJ -17.1807 -1.1446 TD 0.0029 Tc 0.0242 Tw [(area ef)10.6(f)10.6(i)3.6(cie)-11.1(n)8.9(c)-11.1(y)21(. T)-12.8(o)-3.1( ch)8.9(oos)6.5(e th)8.9(e n)8.9(u)-3.1(m)21.7(b)-3.1(er of)10.6( )-12.1(f)10.6(i)3.6(ng)8.9(ers)6.5(,)-0.1( t)-8.4(h)8.9(e pu)8.9(ll)-8.4(-)]TJ 0 -1.1566 TD 0.0019 Tc 0.1216 Tw [(in)7.9( v)7.9(o)-4.1(lta)-12.1(g)7.9(e)0( of)9.6( t)-9.4(h)7.9(e s)-6.5(t)2.6(ru)7.9(ct)-9.4(u)7.9(r)-2.4(e )-12(m)8.6(u)7.9(s)5.5(t)2.6( be les)-6.5(s)5.5( t)-9.4(h)7.9(an)7.9( t)-9.4(h)7.9(e i)-9.4(n)7.9(ten)7.9(d)-4.1(ed)-16.2( )]TJ T* 0.0023 Tc 0.073 Tw [(actu)8.3(a)0.4(tor v)8.3(o)-3.7(lta)-11.7(g)8.3(e)-11.7( of)10( 5V.)-12.8( T)-13.4(o)-3.7( ach)8.3(iev)8.3(e)-11.7( a co)-15.8(n)8.3(s)5.9(er)-14.1(v)8.3(a)0.4(tiv)8.3(e)-11.7( pu)8.3(l)-9(l)3(-)10(i)-9(n )]TJ T* -0.0061 Tc 0.0091 Tw [(vo)-12.1(l)-5.4(t)-5.4(a)-8(ge)-8( o)-24.2(f)1.6( 3)-12.1(.)-9.1(5)-12.1(V)-6.8(,)-9.1( 3)-12.1(2)-12.1( a)-8(c)-8(t)-5.4(ua)-8(t)-5.4(o)-12.1(r)-10.4( fi)-5.4(nge)-8(r)-22.5(s)-2.5( a)-8(r)-10.4(e)-8( use)-8(d)-12.1(.)-9.1( )]TJ 0 -1.1446 TD 0 Tc 0 Tw ( )Tj 0 -1.1566 TD 0.002 Tc 0.001 Tw [(E. Fin)8(a)0.1(l Des)5.6(i)-9.3(gn)8( )]TJ T* 0 Tc 0 Tw ( )Tj T* 0.0047 Tc 0.0947 Tw [(A)16( summ)11.4(ar)-11.7(y)22.8( of)12.4( t)5.4(h)10.7(e des)8.3(i)-6.6(gn)10.7( para)-9.3(m)23.5(e)2.8(t)5.4(e)2.8(rs)8.3( i)5.4(s)8.3( sh)10.7(o)-13.4(w)16(n)10.7( i)-6.6(n)10.7( T)-11(a)2.8(bl)5.4(e 2)22.8( )]TJ T* 0.0041 Tc -0.0011 Tw [(bel)4.8(o)-14(w)27.5(,)1.1( an)10.1(d t)4.8(h)10.1(e co)-14(m)22.9(p)-1.9(l)4.8(e)-9.9(t)4.8(e)2.2(d des)7.7(i)4.8(g)10.1(n)10.1( i)-7.2(s)7.7( sh)10.1(o)-14(w)15.4(n)10.1( i)-7.2(n)10.1( F)6(i)-7.2(gu)10.1(re 4. )]TJ T* 0 Tc 0 Tw ( )Tj 0 -1.1446 TD ( )Tj /TT8 1 Tf 8.04 0 0 8.04 372.4006 165.2401 Tm 0.0003 Tc 0.0034 Tw [(Desi)-5.5(g)-7.2(n)19.1( P)14.1(a)-7.2(ra)22.7(m)-12.9(e)-3.6(t)9.5(e)-3.6(r )-5716.5(V)25.5(a)-7.2(l)-5.5(u)4.2(e )]TJ ET 354.881 173.16 0.48 -0.48 re f 354.881 173.16 0.48 -0.48 re f 355.361 173.16 93.96 -0.48 re f 449.321 173.16 0.48 -0.48 re f 449.801 173.16 80.52 -0.48 re f 530.321 173.16 0.48 -0.48 re f 530.321 173.16 0.48 -0.48 re f 354.881 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A)14( tes)6.3(t)3.4( s)6.3(t)3.4(ru)8.7(ct)-8.6(u)8.7(r)-1.6(e array)20.8( )-12(h)8.7(a)0.8(s)6.3( been )]TJ T* 0.0007 Tc 0.1348 Tw [(d)-5.3(e)-1.2(sig)-5.3(n)6.7(ed)-5.3( to)-5.3( ch)6.7(aracterize sen)6.7(s)-7.7(itiv)6.7(e p)-5.3(a)-1.2(ra)-13.3(m)19.5(e)-1.2(ters an)6.7(d)-5.3( p)-5.3(r)-3.6(o)-5.3(cess )]TJ T* 0.0008 Tc 0.4721 Tw [(v)6.8(a)-1.1(riatio)-5.2(n)-5.2(s)4.4(. Fu)6.8(t)-10.5(u)6.8(re )-12(w)24.2(o)-5.2(rk)6.8( i)-10.5(n)6.8(clu)6.8(d)-5.2(e)-13.2(s)4.4( cascad)-5.2(in)-5.2(g)6.8( )-12(m)7.5(u)6.8(ltip)-5.2(le)-13.2( )]TJ T* 0.0006 Tc 0.0747 Tw [(p)-5.4(u)-5.4(m)19.4(p)-5.4(s)4.2( to)-5.4( ach)6.6(ie)-13.4(v)6.6(e)-1.3( h)6.6(i)-10.7(g)-5.4(h)6.6(er v)6.6(o)-5.4(lt)-10.7(ag)6.6(e )-12(m)7.3(u)6.6(ltip)-5.4(licat)-10.7(io)-5.4(n)6.6( ratio)-5.4(s, an)6.6(d)-5.4( )]TJ T* 0.0004 Tc 0.1833 Tw [(to)-5.6( u)6.4(tilize )-12.1(m)19.2(e)-1.5(c)-13.6(h)6.4(a)-13.6(n)6.4(ical reso)-5.6(n)6.4(a)-13.6(n)-5.6(ce to)-5.6( ach)6.4(iev)6.4(e)-1.5( g)6.4(r)-3.9(eater in)6.4(itia)-13.6(l )]TJ 0 -1.1446 TD 0.0021 Tc 0.0009 Tw [(dis)5.7(p)-3.9(lace)-11.9(m)20.9(e)-11.9(n)8.1(t)2.8(. )]TJ 0 -1.1566 TD 0 Tc 0 Tw ( )Tj /TT4 1 Tf 6.6265 -1.1807 TD -0.002 Tc [(ACK)-7.3(NO)-7.3(WL)-9.7(ED)-14.8(GM)-22(ENT )]TJ /TT2 1 Tf -6.6265 -1.1325 TD 0.003 Tc ( )Tj 0 -1.1566 TD -0.0057 Tc 0.2858 Tw [(T)-21.4(h)0.3(e)-7.6( a)-7.6(u)0.3(t)-5(h)0.3(o)-11.7(r)-10(s 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