%PDF-1.4 1 0 obj << /Title (Multiphysics Simulation of a Self-heating Paraffin Membrane Microactuator) /Producer (wkhtmltopdf) /CreationDate (D:20131114165617) >> endobj 4 0 obj << /Type /ExtGState /SA true /SM 0.02 /ca 1.0 /CA 1.0 /AIS false /SMask /None>> endobj 5 0 obj [/Pattern /DeviceRGB] endobj 9 0 obj [0 /XYZ 62.4599999 270.659999 0] endobj 10 0 obj [0 /XYZ 62.4599999 723.779999 0] endobj 11 0 obj [0 /XYZ 62.4599999 575.940000 0] endobj 6 0 obj << /Type /Page /Parent 2 0 R /Contents 12 0 R /Resources 14 0 R /Annots 15 0 R /MediaBox [0 0 612 792] >> endobj 14 0 obj << /ColorSpace << /PCSp 5 0 R /CSp /DeviceRGB /CSpg /DeviceGray >> /ExtGState << /GSa 4 0 R >> /Pattern << >> /Font << /F7 7 0 R /F8 8 0 R >> /XObject << >> >> endobj 15 0 obj [ ] endobj 12 0 obj << /Length 13 0 R /Filter /FlateDecode >> stream x]Ko6й@lzr@AӴnwW|ሔ5R۴p);'?|gyiCUՇ:?lͫͫ6}~S6"/hYZʏF蕌`섃p 8yk-Lw8zQ<Ax:ka\f04\H2^|D~47J:ɬd牎w.2u5. Uu5L>ۨ"G[9+Ck@RaC Lݰ+Խd i$g+'|b~s9SLoTR]>Հâ wLQƠ>ܖ4Tod\aB.ʔ6GA6l˧A*dD(\WkF|bKUAdpw!1G1.R=O!Y28>h%K(D`+d#zi/>r")|U<;  ($ZWL,% S9S>,+ (C(tr ]G5Lxm^sSb ;@!,QpՅ<Ek-3` ր 8H[Ly[Q#qrA\W~q6K?*A9>'5|ə*zKp15Ձmc4Zƈl3W9?Ju ~l"M2 ]Rq.[Ch-BH Ҹ6$M ;p봎, J"i j01dqWl5EvsJSi03jM#zNxr#aqt,ZюQ*R8qrľX2$y#9l:iE*bȊ#)s&F.RXkO(s]D(<S\JWD1BN e3} FZ.ycQn^kGcGrmTuT]&,tsE76*EVa^'xTJp)G!/>s$#xl82{C5y 9a26id˵PTKN̅u%ëo&ERrEx$TTf^IkffÉC- qfhWA/)Lo!eRǀT)QT(WJ:{I[y(2r|-~[@G5kexWPxZ á@4E9Q/ p n:\_ gI١IHHq-؊=Xx A4l\Za%IhV̷ m_&)ZQ-Z1LrCx8JXR"}4PaK!+2B8A"وbc2u> 2XzPLr!G6vq-W/>g>{{~5z{)endstream endobj 13 0 obj 2815 endobj 17 0 obj << /Type /XObject /Subtype /Image /Width 570 /Height 220 /BitsPerComponent 8 /ColorSpace /DeviceRGB /Length 18 0 R /Filter /DCTDecode >> stream JFIFKKC      C  :" }!1AQa"q2#BR$3br %&'()*456789:CDEFGHIJSTUVWXYZcdefghijstuvwxyz w!1AQaq"2B #3Rbr $4%&'()*56789:CDEFGHIJSTUVWXYZcdefghijstuvwxyz ?(((((( h)_5YlMoO ~ⴸt8주%g>\~ab%ɭǿ_mtT}&P.."+{id2};#yCP\|=rO{;_'4'0ӵ/TԢ{;y#_f)mˏ|u-iu٫Ek V>0Ox)*ҋY5{جAq%URdf?/v~sA[30N^0mza-J_W5X-p1pJIq9%MB~9x|-_k_<><{MfX)m5O<E$Q2y ^M a|0ˆ_$yowjֺt9$^${+q}$_ae}kui*dl>h֞=M>$YWLH.,/.|)IH>PO隿ox]oOdq^#1y>>N1N.Z|?8Ù_k\jłG~|xk w~ o[j^)ɴ[?)-.I./34D#I_c¼v,e|Q- -RSq|ryF#2&rc?Q?CcMX>uMYW#Zܽ6]fD8-3 2i {AER((((((=( pYk俍/6?9<:o7GO\kq%vvrIq$2q̃Z ~<:?l]'/_:dic'<"jߌzGyxT0,uK{8#6f4q$$&_#gw~fcX|5g_ 2\hp0~h= WWMcۿ[xe2/m1EMcv> q|k:ƙ?,c_k_ jZTo}m7zw >kx&%͎Ksw ?2Y ˷77}B1V~6jSTQz?!#Bmmۦ+KOH.dIoo͏aJ?~˚ǀuZÝ3ᧉ5i&ka&/q矙~#o37V4'Sg6 Ku躜s<Gg9//u-/*<-˅cϷ1 5 Ƨ^]#W,I/nr tvK$>?OQ ;ec =~aqǦ#S㾏Nqz'\##|]| tmKƗ2j.$e =oiGw8̘?v?I?j_۫E+xxO~0oG4Z[M%ܶInG#\A߾GHMG'3)o}Ҿ xo}[uO|;%UWyyof.ʎ;I#I#(o^x|K?%ִck}c˹!o&ɜ[t95ɼso4ok>kizGZ=c&LF$'$^ܲTrʟoqh4o~5Iz;m;{-zLb;0 }ʎAo} {/s|A_O v [i'Y;vI!LƟLVwd8xO żY0:Lv'-9jA#Q'+>?|*ګ8/%3)[٤/)w~$Ӵx_Y.qhvI#so4~XVQܱLZIEU(((((((((((((oڃiw3? }lxK {`IFs"FByWO]m/Fkica{}G-ռ}{(Iotϲ\rx$G͎CpS5Wc7ĿKx>#YЧ/]P'[ww,RFsq_,K|O??\.-ȣMEU/S P?bWM_n9{N RN^o= E5>Xx.#4Ė'K ɣ '2[G.%ǿ~y?yʼ c'i'Sc{O:s* \sԹ? (M}:Ekr4`ǐ?3-3:OL|JW>+ $Z <^Wߌjcߤۧ 8\cS?)=/Q5f 7cx0W3ؾװyG^fg8y?U#=)vʜQhfEPEPEPEPEPEP(3Yƽg"Q..&Q˹ ѯ !K[o|D|M8/7{~0gB0Eyy6y޿N_,?d 3խ]=G[.ysrJcF+j1F( QEQE`QEQEQEQEQEQEQEQEQEQEQEQEQEQEQ֊>(gŭw1kx7rXVpx{V-gH9rAsbg? >#x/FWŝ[QgV(gE 7_-O V}M ]9gE o?Fx(a-~ Ž_ >TnQ G*ב;>z ?5E@"跟#TnO4ga-5E@Q G* ?(cP?'`!'#"跟#Tnga-5E@Q G* ?(cP?'`!'#"跟#Tng?t4?&x+O ~QًDgoZ/uе8㺸De{I-ă˴1$qӏ> "_ Y"oΓou_ |eiWdӭ>ɐ7׫%|5L\`Ob8OOϬ"跟#Tnga-5E@Q G* ?(cP?'`!'#"跟#?m3ǕѾx HM1NyMf0d<4!y!'x}[m>%|+u{╟N)-GOKnMs.';2v<93 X,1ty]<.xJ?b/^fH?Qz?_O&?_O&8$؟ׇY=OE,rF o"rF o"8?'j?GDz 5G$ѹ| j$ѹ| j"@x#ѿ`|mv~/𱺓OuRx2FRHӷq^]Rܾ5mW_eT4EPEPEPEPEPEPEPEPoJGeOYӶ]q!T;jUW "ZQE|EPEPEP^?A?;5E݁ g?{.]~gT|8qm ]?! 4?:7zddO29S̒Dk$85濳?ůei$cdY.#Zd2gۭvrCU)҄=z/~G)etaӜ4V9Ü?lO* ?9[^G'șn*EmÜ?lO* ?9[G9}{ nJ/$bQ[O_Vp?$m^?o"۵?KV9Ü?lO* ?9[Gײ'ȇKV9Ü?lO* ?9[Gײ'ȇOF%p?$mO_V !?F%p?$mO_V !?F%p?$mO_V !?F%p?$mO_V !?G~8>RuO[㷙!8 8-鲩|'~U|^~:=gƞ ^)=H45<Ȓoϙ>u?~|flo 5 xD:<_XqEhտ:,_Ӝ]-}ݻ?3p>i'o((((((|7)GvӫċWwJ?keOFӶ_$?pW_ȓolw:(>L((+ Yʞ"`+ Yʞ"?`((((((((MC)I?vԫ??/ʦmJ v?KCŠ(>((((+ROƯڗúgjnڗúgjqǥ=3?`$E_Ç%_jDI`~^&U|50h{gG-$zO.wG4KB3$qJ+i~c O]Z /WzbI/+x;xHI$G_? `q3fx?xR9ݶTss|Ƽ10?P(if}ra)M޸wÿZƗ3zy>o{qg"F~gq/@{?*?$u.كVEWwٻa؟S'C2nU\gcA}g~uNe8TaEWOҾt{}_~_T_?  C~.WwZpXT<fy<OQca?Op?y,> ȺMmcD+(Sʜ4Q-vK>=PPh}bҌj(+Q@Q@Q@Q@Q@(=NuX_߇?=NuX (&;n(uQ_Z|QEQEWa(=CM:E~Wa(=CM:E~QEQEQEQEQEQEQEPzW-g⷇ 8ּYN-þPoGx`>N9o?:OTѴ_[swq(1^q{T%SZӶ]hO3| ~}kρ>$jяhVk+SYu;9`2\ii%n1$7~6[F7Yw*;?SOԇû>Mv6~}/2k,u֩jCh&q ? ȾeV5?l}_ş|ң94H|;dn1coᛝٞơ+P?jx!e>2k,u֩jCh&q? ȾeV5?l}_ş|ң94H|;dn1coᛝٞơ,P?jx!e>2k,u֩jCh&q? ȾeV5?l}_ş|ң94H|;dn1coᛝٞơ,P?jx!e>2k,u֩jCh&q? ȾeV5?l}_ş|ң94H|;dn1coᛝٞơ,P?jx!e>2k,u֩jCh&q? ȾeV5)A#_gtNnM;RG5یXifg~Eg,hd GIۋ"8S8ǽz?7|kv7+k-q*;?SNԇû>Mv6~_f{+G9A M~׾mn~w[>E1g:q˯k#p&i5SSo}+ǛfX:|IiEOW~|MM? <xn_Zio;K[y$d~_EQ|xV޽ljr|-:˒}O~F,q'Od\w~վ1L[yhG~dr$q4 38%B*8-{&㵕Ga^Ys!{FsF3_έݟlGp@Ѽj#Ķ..!F?~8 /࢟>x|KiwfGCi#Yp$9N=j&bm{zcxSfmIo-7w2&n/%bomk=3Eկ:Zdla>_Gk=ks 6!fɾǀ[GKaG:G$e-O$FIdt)1/ѻ)LJGx)?pg#Ezaw|uIQu"BO$jǗw4+"Ag G?&^xR?jx]|/!?=P<_ Gyw3Mg Կ“iS|E )J?x~˻l?F.AC|gEzaw|uIQu"BO%ڼ?q6}H#R OO / ǖ!(.&iWDyq~C"my ׅ'GS ?UjǗw4+"Ag)qO / ǖ!(.&iWDyq~C"mx/*/lhvk_? 3GIZ#U҄WsĿm|.DqǬw0\[S^I<O'~NYc 4?s |1X%}[-[5?la!gO*>LH|n-O?n )#d4 |Gחi1$_$GN_⏉SL#dm׮ A?/3s@c~~/'o;/|/hZd I{t'?w?Yd DWPp!~9,MA{UqOtY$IǎMO#Ld+W+1xo~9ybv3YsdA`jɯȏ*cS-Onś]w''c-q yd\BOs Sg$m_Am/o?g+G^jZ/[;}↕?ԣ4W2_r r gd~ngrb&|qaAe~9?1_W]_Y>0Y?? ?7 }g0Y?? ?7 }g0Y?? ?7 } ?,~(7g玗>^Wǿ_ _{kx\m,i6R΢`9ALktO὎K-a-~xn$6>sAͼT/⼆GBEJ>㡌/i˶x42?kQ>2Ѿ/xf~J|{5(Ch  wt_#.3V'$^q_2tX?\|PȳVϾ$dK׆#~*4]>u-.~oxy*z8~.VY?垫q&˯t}Cմ^{GsC1y6{*T*U4' ӷ;k>Ύ/S5Z(MKtz#(Ykc_[ÿ>"kzpZ+b{I%Dx٘Rc`^ ;apX;SnuߑuN'r(~WϝQMg1$#ryQM&QE$wv\߂'z|z"z8HۻEË[MJ;h%z[)`M}t*\ѲR@;SwHjopLdKgr DIy7ഺMO>%2|G$z?~g~q|ExwN.҂"?y!,:C}s$tDtO$q%v=/ښ? nx_e;?$ > k7Ý *6=2$KlY-x}>ُ x ~i1¼QikτF[|]Bͮ[ci2.َ?ݟ<߲ǯ )>]CPe]--?ey_FQ_ڟvQYoә:󟇿e^?mwISL} C6o(<[[f8v~~_$4/mu BOPywDq?}EvQX99{Z!ctE4д3kj{̲˿ſ%cg8CB.?ihfP-?eKlcqєQeә:󟇿e^?mwISL} C6o(<[[f8v~~_$4/mu BOPywDq?}EvQX99{Z!ctE4д3kj{̲˿ſ%cg8<=-|zпkoImu BOPywDq?}EvQ'59M}ÿǟ4mu BOPywDq?q|-;M𦅫_ؿ?44 Ce\Z}G~)ѣ:٣Bůφ-oZجm69.LwY'3YޟK6NJl>1~חV(o~>Hz#!0|xL!;[?noʹgI/-3*~yi1EV ("M1\2(QEQE|'>&u˛}CS GS;DqGy~^c< Li"WZXrf-:-(XoI"@A x# %4_ <}uY%ޙw&;7!o [y>"V{2RIS6F>o0Ɍ4A@TQEQFq@Q@1]J@ǟ~c@<Ě]ĻڃP7k1so%Hx?y$N\#"ʿz1ۇym?Nz ҿ?yyUxAW*¬?9?uA:MFM+F`Oq$8b0o|l<='v~gB^OCy.=W/<ɍ3\7m)~.%E|kGiy{%M28-;'-_唗8>i}h_q7;Ւ? f KhY=98$&^E? |;'Ot ;; 6>qƜ Wc⍷k߄g)$=OѬg1丸[!?ୗߵ/ǿ^ecL rFIy-Op\.c8$g˔߼&ד##7?w?O(P()/'i= a=:|qǩ?9>TOMa_ K6xUA叹9/$SZ+|)j^񆁦z>E%ŵΏ2`j{J7COG7khަ&>ZP ?&uo3jn/%֡c0`!k ~z(:\ͼZEԟO4xp?4͸z HLZ(sֻQ@Q@ .&%࿊zO߇eo-#K/`/3^_M򋿈?T4- ?Oज+_x~~bg$tm^u*_ÝGPM5@.`l^aMlٯ2|'?~J}sDL }Њ4י8{_^NG9hӽ#u\Mϳ|aj?L/D}+Vx5 O~1 |!\ #DIG_; o ;_œoqmџ`a!3d8؆e~aio-'1O{=G!ֵh96hQ]& ?eW۟ۏw ֱ]i. Oip?%pڷ W$>e/(=xx1w~wRqMb::~o5׆/簶=-?Yy`_7&j_O/" 'v9W_ڗߵ/-6:_y$@?y|' *4Z\U~']MmY DOSO9_?g18TnvSOz97&=mN. џ|+ϒG@O'o&vӿbVȟ|_ڄYO~$%-}E$u<? '\i/y_Cl7c }47-_ 4.ov_[s5. rMkz|^Vh_E(o߀Nu7~G x?e\?¦}:W~?bt(`jB-?ʢ+Т(([ǠsEM*M+*QTtBOxvT/m.?2y㊼w>8c~&]x|Ү|; [ZŞ'i8?'Ěgxj<hRFx J#;Ÿ]'o h6Zvm9ryʸjWg{?Hxb Išb7eF_e>!jJ+o}Y9|qᧄ-ZhEZvֶP'/$HvFu$'>M{XxGΏ|HbHJhgǕ$T)`|o/²kgOVԭe1;7/#ڻb>د)Lқ9e?M.u Fݾ%rK#<22~pi|gvg6^Og+ 3_+?gȒy̑rçi$9/+?jv\qH9ВHw'^w:l3gg<3Zc}]hOOǞ(5-h 4sX#qKX@Sv>tF4?'|KSEu;k $Ɋ4ܜ"3U}W4{ڵ4M^.u>.moa9#;=A"%,|].AVncxy5 q>\Z'C'^7ˊH#~NO7E4a~ [ fkّ,P; g)!F.:KJr_i7"oF2ۏ38&<7a]𮋨x |7OT>XI#e坔Ǘ(7$T.|aG')l;OoOy}mu,a]12=.d?g֎ K?7/$L]/6\)֝~9/mlض1~SU_`5ojwqV{HYlb%?ĜC+YÐ/z×* " vWZoᶛysq_?zlm~_ٿ<,Z95_5]@K>eo&Ή_ |FO⇋.~_|33HaEPEP_W_7;޳}G%¯oQo')/oӚ KOS<${:ȓT$8܌b4 MP#RQJh7|sG5Y ͖]y=Df9:f2 |~iߍ:gjZ v &KOh<&w?8~ x@٩@? 3#e/6G^]|]?~0 >#YG?~[I%QEq o/J~C*L> 1NS=*Үb.3˵;h<wV+]_ÿ|okTլ.?'?g%tu5 R?,J: (3 g ]xʞ"fˏE׏?i+Oo^tP!EPEP\W> |; ^0xKlcHx7EvPn? j~a"c#\vO !ݵ ק5~FPFPF)}~_'%V_k>,J_P4qf_?#*(c@(Us+wස5M_ey;.*~~1u/"+hh6'9!8u|Cr j{HĶZb?'r|!k>4^[Ytɸ|?)mAGq ?_MMCoLVu=V u=vPnṅ F3_@fsFcSWg~UCNԐ1EWzAEPF( z MR@ z R@ z \J(=( ~~ p̺=dZ[Y&NRDv瓀9=+$ xKg%<בkE$Mf1ˊCq@GQ@1EPEPFPF( ( R"ٗ'(1zxo>sWxN{((]BBGZYK(W̱<d3<6& Pkښ5>Npmo,f?[8?૟^F'KB#-NmKI9/'<~0Oj_ObǍNHm4׎H>x Ib9"GYJ oV[i'$녎^^9t>`<.q=>cxšw<9{kup qms$Gt9&l˱> xNׇ_գ2]Ooq%q\Ip#[~0"l8,_*oW4xRO<[ss4a,W<ӼI.*?jOW3h:Dž|{j9O2?_1k?+WWO %nߵgqFy#Gc$LF]S_s\9k?97*:>0n{? [gǟi<$hsxu(5 {I⹷̎xb:)~ҁe09*lI_LSӤWo(=GM:E|W[Px+j(((1_&;Cm|C_~ -ĖolSieFm[($PW+~+8-ό|1YEv`IloWj'>gԾkw2}+ʀ?K袊(((n?5+|Ykݯ?8kV$d?*aCqÙT(Ʊkwv6vIEu Zd+h;G'|Aԝ-4 >3,dĞW=IVW|So yzw{Dǭ];Gs̞g$>\|WkA A# X|cw3y̜&N~y_g8|E_ےI.8OSǟ##_"_z qڳ_J2gFQkqۿ?7Ŀw|/9nt}.˓dGG(DxŷmcNl uu o{m~*KmSOqVQ84$9$jQ$J#_LovoOowĭj"jZv_薏owYžOǟr ğ~|'|O/tKO:|'\[\zeqo\#N32IێmB/0ᯃMiX}vֶP>H[U1y/m|6jm?'P&5r*>8kMW.D?>LDWh#u'P\Zyj̩$rG=t`1،, Z| )_Q?>]͌He{U=CM:EdTƛŗ?d;oARIc5ռRu_ik O|M}nM-İ;MJ#̂Pq^}ʕ>x{<&U=;EWQEr~/x[wI#V_acm8<"4ː9=H oW]玾xvz^bk&egs,wK.4p~y^3X ?3]2ߌƣq N4ؿbӏi{f_D/2_i?hqCq۾n?ڿc+%x )~>|e5  >5hM?~FDLLz H2#<J6t%M~~ĿjBH75@s$Qw| <5q??(s,cwO܁<;~~?{Sy| šo<9#g ,K!8̒b#ڣjFWL3jFWe|~(jFWe|~(jFWe|~(jFWe|~(jFWe|~(jFWe|~(jFWe|~(jFWe|~(Ei)#ڣ /|y/7_Gg_+];_o%:vJ H#,( ( ( ( ( ( ( ( Q((`QEb(((h( ( Ÿ>xĿ,>>񍧉|)b T_.;ĸ18x_-$3}1s.CixZx{OIqcGomV>n-/%rKs'-y'# xgWխS"ڊ|!˝'1:#֭.%L}Imc?*hVJ{_ל u߇_Ro#hwEB𦽦[^֮4oߗ=ܒJms"4iH??MNUR|Zc~r|1^ _^RX٤'˒H/.?.HW 1zX\cJO3F_yLQ_׺{]+Gx_^jψ}Z&>Yxeƣge%G?7˒{l?fOvv|G=sⷴ}[8廒)O_ſ$H~-?Ź~V^Zu _K;ϱId ^y#ˑ9?_ "J =+VY^Šx2[5H%̌<ۉ#gY0t|Ij).V/rTw䏆:?~_[#ÿu]>=ti[`I'#$I5)-Hw^Qڛ'^ ?Cki?i jßuhڎ+YGݜerݟ%~ HYO;%JDu%/M{kOCLұGWƟz}hX[ZlHD8[Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@Q@(1F( QEb(b((((((((((((((((((((((((((((((((((((((((((((((((((((endstream endobj 18 0 obj 28619 endobj 20 0 obj [1 /XYZ 62.4599999 735.299999 0] endobj 21 0 obj << /Type /Catalog /Pages 2 0 R /Dests << /__WKANCHOR_2 9 0 R /__WKANCHOR_3 20 0 R /__WKANCHOR_0 10 0 R /__WKANCHOR_1 11 0 R >> >> endobj 16 0 obj << /Type /Page /Parent 2 0 R /Contents 22 0 R /Resources 24 0 R /Annots 25 0 R /MediaBox [0 0 612 792] >> endobj 24 0 obj << /ColorSpace << /PCSp 5 0 R /CSp /DeviceRGB /CSpg /DeviceGray >> /ExtGState << /GSa 4 0 R >> /Pattern << >> /Font << /F7 7 0 R /F19 19 0 R /F8 8 0 R >> /XObject << /Im17 17 0 R >> >> endobj 25 0 obj [ ] endobj 22 0 obj << /Length 23 0 R /Filter /FlateDecode >> stream xVM0Ws!Γl}&P1PݖC~e˛8ohC$hi$2}Bߞh:_pl!d XWї0qU-jVU[|<QM*! }9w_aBU̦f|B!,] =vLkˮuU'nЋ0U52+qў8kt05^tk*$Ԛ;boyrw=¶Gt1ѮG.\'DY38 F1xJXb3^`Y9R97yW2,PָR[ѵ/ T|&OĘn4}՞:L]wdjv;:bj=PK# PI/IA{ '8४+{ba;V1lQ:Bҍɑ,Y֋2Ҝ; |=חϒioIeR+UͲ{ .s!<0L?us@p)a lT yq$͆Ht%kIiOf:J9yendstream endobj 23 0 obj 579 endobj 26 0 obj << /Type /FontDescriptor /FontName /QABAAA+NimbusRomNo9L-Medi /Flags 4 /FontBBox [-168 -341 1093 960 ] /ItalicAngle 0 /Ascent 960 /Descent -341 /CapHeight 960 /StemV 50 /FontFile2 27 0 R >> endobj 27 0 obj << /Length1 1820 /Length 30 0 R /Filter /FlateDecode >> stream xUIlg~of< ILŒf{O^>Vȳ^,4'Ya н a5E gsrہW6jpF'Z[;jA'P9[ vU)%[R݈1-`!>fh]T])bA7ݼKpP|ٵuLHG JQ R^Q~ްx;ހ?sѩ?G,@[wQg|57r!VqTssB1=~S欞.xToO\d/^뮋3$2sӁڹ!<ޅW*T sv4 Yxƥ; 摢f*oDXbutaHt2uNW7E07]3m]uŅz[-<_ "&w0wU^(J)tWZFшY3LWHy;>MI~ 9 qz60LoGB`Fm2N_c/*)CABmG6KLB@yb19)J f:LE6iwLhrNpT>ڞ;$7$}}O(Ȇw]jш[oe4>ӐH v\t݋[hީ+VRg.QgmEa^\+r؅~zmйιqf%B+̀uk;#ɏ_2Q YC,[8ZGL dqk1碱M|O"+vӻ°fEA%yEUhey'9 I0 ` '@>N% t5jh 1kJpv+^VVi+(Ic5N;|0@!&+K9$!WK!͊&2\%LhPtF1UcŎRV6S:HXNR !?}=Tyua_>endstream endobj 30 0 obj 1313 endobj 28 0 obj << /Type /Font /Subtype /CIDFontType2 /BaseFont /NimbusRomNo9L-Medi /CIDSystemInfo << /Registry (Adobe) /Ordering (Identity) /Supplement 0 >> /FontDescriptor 26 0 R /CIDToGIDMap /Identity /W [0 [496 606 276 496 552 440 440 248 496 ] ] >> endobj 29 0 obj << /Length 420 >> stream /CIDInit /ProcSet findresource begin 12 dict begin begincmap /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> def /CMapName /Adobe-Identity-UCS def /CMapType 2 def 1 begincodespacerange <0000> endcodespacerange 2 beginbfrange <0000> <0000> <0000> <0001> <0008> [<0046> <0069> <0067> <0075> <0072> <0065> <0020> <0031> ] endbfrange endcmap CMapName currentdict /CMap defineresource pop end end endstream endobj 19 0 obj << /Type /Font /Subtype /Type0 /BaseFont /NimbusRomNo9L-Medi /Encoding /Identity-H /DescendantFonts [28 0 R] /ToUnicode 29 0 R>> endobj 31 0 obj << /Type /FontDescriptor /FontName /QFBAAA+NimbusRomNo9L-Regu /Flags 4 /FontBBox [-168 -281 1031 924 ] /ItalicAngle 0 /Ascent 924 /Descent -281 /CapHeight 924 /StemV 50 /FontFile2 32 0 R >> endobj 32 0 obj << /Length1 11828 /Length 35 0 R /Filter /FlateDecode >> stream xz tՕvݪ^ԭnHVU7uWZwɒ,dK,o#1l@c:!8N`L B~&8dN VU)ޫzw}{EAR ƱF}gfߴ 5X DV,gv_g}J{ [ON=8nC&` &6ztIwqLAFMİhdI6diqg%H𕬆NcF) ۖ #l*0.IqGD-䙛[i@;xmUj5)Ꙅs6 8*-^a:+h)P$ѽ{uH]ԌǬPCq `kQ< F7GW(r"!L. 茮]7CI@I`iDl_DRHp>{eĩWkt8W@ї&atH68DFjҾ6PpPm,72`gW+5F$LX` p9 Qd5)Q)U%G_b-6ua,~D@/ctei9ƨ/f"ϠÙkxLFc<&8(PRk& & *1ib@]6[ 2LĪ)@ ;婄lF]$K!ؑ|I+ѺOP2ޯ v(:w+M%MOojO<@l/ spwv=r4Qgmᛛ+u7SкpfBKCOf8 Vџ/{raJA9P;7":Rkْu}О8v[`M Ts.JYpU25SVQm~wC(03v:g3D%Ć$! ʂ*HsGU%͊rGF&{|j|*URrL\\_Ӣ,I(E?湏(uEc`1ANvu:\L*}jt[!K5ض4^:/VqPh,w`;7 &uP oGR#Z>Uƛ_7s/4om½i-sT22<}vgn2 }AVD3QIp[,Z[e5Yp4Ბ,!V}^*֝MTDX?ܾv*V*l]']輸 e}K;ël1o9@cH-ݚDGD;Y *)~R{2#zcAĒ$F'G8)c 'ȶ~x֞ϨP)*Y7eċ'E~ ; f-x%B $.xl^Sk=*Clï*9l"U ~57дXcOQV/{ SbTyOH9Ю 1 cH..8x+*NPh"#s?:wʫDxrٯV\qF=$OoJܕL+(3DB]*Xw}!I:"cA)vWnC+IHT.sB^F}!_%SO4`\@U\8j-;GD]$}ZaF͠LԦ!X=902ǥd7jqS< <߀RT"bԦ{EYtr^Z)-*-EǞy`!:9rx p)#y {T+.6\\9EZ% #@c+8)c!/(jhҧ[i8$ Z 1!.M|YeI<\b)bJofK$`Uobܪ142E*C@53W  h_EH!AU(-g {.7^-KeRc۹=dwv#kQ {QtSꃰ~NVtT(yg2_/\)_ L_F"#97Gԍ)yRPqB \zαBts߶{EnH&ʔӛ"!6ё#u ɮ.CkșP({h MO_߼^i l %s~A6Y ¿dA0>֟SJ@]޻j;{w͋-몛öR߽<[D3 Y2<f{,V/Iǧ&BǝTIr->w3\-0Pe6YVRi`b>,XCAb$N};ywad {.{S\e‰!UJKΪa*{GShcUd$ֶ@ƥ)LDO$tյחy[/ں/ :}Ud3eR\I-4EHQS91ZV5Za 9<\I`^ʠC!kA&]kWKq ,|,P@sE"^ e֚ Q$bVGG4 z=$cư=ˡ ,HW!T.DNE& 2nJN52|S hU@Lʭx;3.oq v(ȅPJ G_|bO=4uHTۭs_[?rFtgËrM;di+٤/@#L")8,K~RBˍNRlUF6Fc96>46A%eŷI]QA٬'d\ȸ'S۩OHqBDQ^0a]$ܘ.'$ hjw> 5xr "Pk'e,}PZF_??q0R, henViqg̺$*Hw?JDP@^]E'{b׃kW(4K˻W[2_+mB pêHٗ*-2Wr1ʁ|9_M43\1 >JrT*Rf/f9I%/."yi/*,w+rO4t"+Qv⺆gn@{LꎌwTtn]pMlx^Ы5252_Ey6ҎX9ķ b ᵿKqQŭ!ܲbȏ[։n̅G\Oy- +U5 JLLej]蹹6tr KC-%Z!zsq5(9 ɚ{Yxlz=Zȅ}% A]5/B&S4*\VtohAR-};$ =4yl >'=3VWSךLtjO[-y釻v:>'%-CV'GIȗ,`c1p,wZD%ֆ$WYM"Z^m^l*6 ض_BU$a?wD&T =pqD"YI^hB,?1z`@zK_Np>XDyLvau:<˼'!:V/˔ȗeL7QVj@;jwkA֨}DT- V`L)y?W ?qz jd. o͐*Bs>*SNRȒ?1FD!J#τ6gQGI.&Ա:|Q"%p*U}u$ν@̮sc:Ř_es1+f 'gl}捠/ zfmi׸ި7a2~{ r%i zMD'yTYcI1Y*bP5QV;ʁ_vl(2z~NE̒ ON7faD-j׏Wh!}8;ЙT6'SlIh|'c|p\ YXB0^&=`$]NR֒%÷;0ޙuNm tī -o8|÷gCύ ozɝ^^hw@uv12?΍naBfJ+M] bl_|s}YIY6gcR.F~w}k1%v]#f w} 뼓uLҡ*TBv]Sz7ͧK@o~=dV>u[o.m#R}!5,W[uaϵnJYU5Y.AS8;䎻2V`_X'w`=7 ܋*99Bر5rF$#qpo{m+*|VhFcAo7NAE1;872b 0ˡRj .DJ3w,ր/0vNѷk j) TeClP.%+ю3wϾ[&SMYKq0!Xo@?ڎ@;izS'5[C"Jo{;kbzQ;ꭳtssaJյBL+Ttg̦y =m2wTj~S:$/PiV'B̅DryR>y)̟{H^S?f]#K"^tF\cFqBv$-DENQ1\CyënF,E5"`q2Z;d^KĹs@dB,$k(.ul-gh餣c0u+· znc-sZ+23Nrh'ֲͭ]97C7o9UfsS"Ϗ4)>[/D19(S8P']x<p[n}MUvN)qk /ǣpJ7j} 2orNIc6 (2xO~9V0-y8t+ Os;,SWi?L͓O OAkdDMe{W_)bz1h&]\'"W|!l&>) !T7wgK tM[RH|s-oЊ@Iްe잴X$ۥB61T<߿j˻ ]0WK֨>mch&<4P3qcݏ9ORB)`іwV>*`L~O@8mO۰C:CKy<|H_]8ǡV(a@/L/u.}2jի|=Cq/;iȐMuƉ_NzaĦ%wz - :{H O.#<|HnMB癹- 0 d`ήO/P-Y<)G#:L#^5eIS5cI[t..Tֱ[IOaW[ؘ(nL-[,sksrsoW85R$6GD*xL1Z͈E B'PTE@ #4@QS\R{`(C!]\{X,./2BE^Qp!h`׆wu蘤[v8auHkC8D8 ã`F}ֆKy/-^xH"ӄ/;67FϗuJ`g}F-,^V1$xcF/^x_$6`9^͒gX^Xk / iZrE8^Vawx|i^n Z"v9pAKarWo(*IћxZGP*vHߔ~^䌬_lI>-AT[z]/ _*,seʆN櫚5/k+l;t?KN(IA$Z(R$ Ya}K^(ۉ~b&f݄sr$F(_Kߏig'6ގe#·o Ktf/^[n'8[񷙘Ěiۏo`vbFb#XkfUhށ=B%D "x*%^l3Ķs+/m/ڍ(%GZ\N³ny73endstream endobj 35 0 obj 8416 endobj 33 0 obj << /Type /Font /Subtype /CIDFontType2 /BaseFont /NimbusRomNo9L-Regu /CIDSystemInfo << /Registry (Adobe) /Ordering (Identity) /Supplement 0 >> /FontDescriptor 31 0 R /CIDToGIDMap /Identity /W [0 [496 552 248 248 606 440 440 330 496 496 496 248 662 662 276 276 496 606 716 330 552 606 276 716 386 552 440 440 496 772 276 496 496 496 496 496 496 496 330 330 496 716 496 179 330 496 496 826 330 330 330 496 496 496 716 882 754 386 440 440 496 496 496 716 405 496 496 716 276 716 716 496 ] ] >> endobj 34 0 obj << /Length 861 >> stream /CIDInit /ProcSet findresource begin 12 dict begin begincmap /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> def /CMapName /Adobe-Identity-UCS def /CMapType 2 def 1 begincodespacerange <0000> endcodespacerange 2 beginbfrange <0000> <0000> <0000> <0001> <0047> [<0050> <002E> <0020> <004C> <0061> <007A> <0072> <006F> <0075> <0031> <002C> <0043> <0052> <0074> <0069> <006E> <0045> <0041> <0049> <0053> <0054> <002F> <0044> <0073> <0046> <0063> <0065> <0076> <006D> <006C> <0064> <0079> <0067> <0068> <0062> <0070> <0071> <0066> <002D> <006B> <0077> <0078> <0027> <0028> <0030> <0035> <0025> <0029> <005B> <005D> <0032> <0033> <0034> <004F> <004D> <00AE> <004A> <201C> <201D> <0036> <2013> <0037> <0048> <0022> <0038> <0039> <004B> <003A> <0056> <0047> <00F6> ] endbfrange endcmap CMapName currentdict /CMap defineresource pop end end endstream endobj 8 0 obj << /Type /Font /Subtype /Type0 /BaseFont /NimbusRomNo9L-Regu /Encoding /Identity-H /DescendantFonts [33 0 R] /ToUnicode 34 0 R>> endobj 36 0 obj << /Type /FontDescriptor /FontName /QKBAAA+NimbusSanL-Bold /Flags 4 /FontBBox [-173 -307 1097 979 ] /ItalicAngle 0 /Ascent 979 /Descent -307 /CapHeight 979 /StemV 69 /FontFile2 37 0 R >> endobj 37 0 obj << /Length1 3576 /Length 40 0 R /Filter /FlateDecode >> stream x}V P<p e,B67Z<@ ;h"4QLЉiVc>&ƪf:Xi3MkiBvϹsw= HI${ctv 9#joX'$8y.dd#]t|W@a@%_ @Q,B6#}O: W #Hl%iЀL#_oF@Xx;o 7s k[ ܙ\BoUqnNI$āEawȹ**me9շ_]>&. +q LhLY*KK%JӢd" (&%:Cf]GR6V!XzsB-_- xû H_L~;ZYܷ~ ^Mp q^I3 n;:NcR?m3lV',#B*vZ!!jhr9Fski{mQ񤁥i51<e- "$ b fQzEiP&S`FP7M9dҹmi.ߔh:Ea|W݊DMI%:@Ev D_!ԋR~)2 ӕo͎xd{I1޺殱+ïs][;S*sGJ|=Qӯв*sT_L5‚iXpZr,lP2o9$ l:ŜI \dr9R*㜖gRfaspggZc!ڸ xa-ZYʸ! ( Hz*aΏ.. R>VkĜ'YvMhqMG/7$ Ӝ͜*>92sel#3{s6NUM6MS奓MV$f& -+;>Mw^[{ U.@m;x$!#t6Yv`F\0|KAc3O> Eٳ @D/S 0=s)(bDT,BmEyvMwGxp- ' `SxOzg7G1KcazфL>3T;?>^jjzr{)90mQplpk.Q#=m-sڱQݴ`\+zX9d⯻աC(?dكw&(Jzke=e[jM'_opXweʜU͹[)"#shyuCD,HMrcwbdAX|Zz)R: `'vhcwޣG}t`SN7qQr 8[| b}}f7;7\xDd?]+JKnv_C|N숗|eP{7Ai_tF<)&xk,޺޼/4㟄Y9@$wXFt] b8_$G?AF"Q/Ms$ [!򉸚IUd4/6 mį B3/RI/3؟Ƒk1[Zgcp.8?7DQ\ѴhVtSs4qlYCb c1D!S[WW UhW/#CM:Imm )x2R.&5M$MxH+q$~a>tl݂CN3n|v6tbogu8Bc[\n~r7C~Ǧ8<)H)Ay(qsnт(yG|C+?Auendstream endobj 40 0 obj 2647 endobj 38 0 obj << /Type /Font /Subtype /CIDFontType2 /BaseFont /NimbusSanL-Bold /CIDSystemInfo << /Registry (Adobe) /Ordering (Identity) /Supplement 0 >> /FontDescriptor 36 0 R /CIDToGIDMap /Identity /W [0 [496 826 606 276 330 276 606 606 552 552 552 276 662 882 552 606 606 330 552 330 606 662 386 606 716 716 606 606 ] ] >> endobj 39 0 obj << /Length 553 >> stream /CIDInit /ProcSet findresource begin 12 dict begin begincmap /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> def /CMapName /Adobe-Identity-UCS def /CMapType 2 def 1 begincodespacerange <0000> endcodespacerange 2 beginbfrange <0000> <0000> <0000> <0001> <001B> [<004D> <0075> <006C> <0074> <0069> <0070> <0068> <0079> <0073> <0063> <0020> <0053> <006D> <0061> <006F> <006E> <0066> <0065> <002D> <0067> <0050> <0072> <0062> <0041> <0052> <0046> <0064> ] endbfrange endcmap CMapName currentdict /CMap defineresource pop end end endstream endobj 7 0 obj << /Type /Font /Subtype /Type0 /BaseFont /NimbusSanL-Bold /Encoding /Identity-H /DescendantFonts [38 0 R] /ToUnicode 39 0 R>> endobj 2 0 obj << /Type /Pages /Kids [ 6 0 R 16 0 R ] /Count 2 /ProcSet [/PDF /Text /ImageB /ImageC] >> endobj xref 0 41 0000000000 65535 f 0000000009 00000 n 0000050633 00000 n 0000000000 00000 n 0000000245 00000 n 0000000340 00000 n 0000000532 00000 n 0000050492 00000 n 0000046450 00000 n 0000000377 00000 n 0000000428 00000 n 0000000480 00000 n 0000000849 00000 n 0000003739 00000 n 0000000653 00000 n 0000000829 00000 n 0000032769 00000 n 0000003760 00000 n 0000032549 00000 n 0000036147 00000 n 0000032571 00000 n 0000032623 00000 n 0000033112 00000 n 0000033766 00000 n 0000032891 00000 n 0000033092 00000 n 0000033786 00000 n 0000033998 00000 n 0000035422 00000 n 0000035676 00000 n 0000035401 00000 n 0000036292 00000 n 0000036504 00000 n 0000045032 00000 n 0000045538 00000 n 0000045011 00000 n 0000046594 00000 n 0000046803 00000 n 0000049561 00000 n 0000049888 00000 n 0000049540 00000 n trailer << /Size 41 /Info 1 0 R /Root 21 0 R >> startxref 50738 %%EOF