%PDF-1.4 1 0 obj << /Title (þÿDesign and Simulation of a MEMS Directional Acoustic Sensor) /Creator (þÿwkhtmltopdf 0.12.3) /Producer (þÿQt 4.8.7) /CreationDate (D:20161219162325-05'00') >> endobj 3 0 obj << /Type /ExtGState /SA true /SM 0.02 /ca 1.0 /CA 1.0 /AIS false /SMask /None>> endobj 4 0 obj [/Pattern /DeviceRGB] endobj 8 0 obj [0 /XYZ 34.0799999 813.679999 0] endobj 9 0 obj [0 /XYZ 34.0799999 661.039999 0] endobj 5 0 obj << /Type /Page /Parent 2 0 R /Contents 10 0 R /Resources 12 0 R /Annots 13 0 R /MediaBox [0 0 595 842] >> endobj 12 0 obj << /ColorSpace << /PCSp 4 0 R /CSp /DeviceRGB /CSpg /DeviceGray >> /ExtGState << /GSa 3 0 R >> /Pattern << >> /Font << /F6 6 0 R /F7 7 0 R >> /XObject << >> >> endobj 13 0 obj [ ] endobj 10 0 obj << /Length 11 0 R /Filter /FlateDecode >> stream xœí\Ánã6½ë+t.G$%YŠ')ÐC� zXôPd±-ÝEƒ=ô÷+Y,Ï“<Ï,)Ûhv�õš¡ÈáÌð½™!•ÛŸ^~OÿøžÞn^þN_ûÏÍK’­²2ëþ¤íß›qƒ­VÎvÿ­Œ[•ëºù“¾~MÞÒ·ä9ynþm?ßSîî?šÃ4Ý ß_¿%·�I×ò²ù¥ùß?©Mn¾}I?þÖ||êÇl;|MªºldÉ2㚯�¿—UfÕHišöL~m;ÿ™üúCú­Ì®ªÝL'àáWAñ‡vÿ÷#£Þo“Û§2µyºýœvRÜtÛfÉéMûƒOé�­ˆÒí—ĬÛu-¶kqû-ù®eôPÑu)ö-%´¬åCŒ‹Õú0w]—òˆx÷»kö-÷Aïq×R™èÉGð�ÉäD„îdÓ™Öfû+5…}&´ s£ÏH=˜Îeê#^eòHêEÍ€eAU…\Ñ„t87úîuMýL�Û–¢í÷¢œ7/îwÔ)® }Ö…ZǺEøéu˜L8!xX.…Î¥ê«Sé#“ÊuYC—Jv©¥¬wÓFynJyužÞÔù¡çF´•i¸ol­‡iMG• >�à̤[ßÃÇú}aç�߃{=ßÝzè.RÁ“e½/éRÖ:Æ¥ö =¹Å6ùÀª#žuÐ’ƒ(30ò“BÀ•)a�èFv.nLÎ×b¼+–ƒ©¢ù’›AÁkؼ`” l î^ÓõE]w@°rdñžéD>zæA.pºà¦Q·â,JE-Á‚AI°š~šüÈ3º¦Á¢V†ãÌÖ„8A k�Ià< ]�FŠõq-uku5¢N@KH+9×B,¨ú°ÅX¶>J«’=!½Î^d¨‡úÖ@#«›çÕUOldXØ�u(:i2­l®²bêÃÍ;£Á½­\©&%{8©¿J>3¬F‰›ŒÙbXª�‹LŽA3R¢7Dc0,avu÷ é0‹›”à EXFrfã „?ˆZi©éD�ž�!I ·;11Aㄯ¨17]vbbð‚JôQñÁÁ0>@7ÕQßcÉ�‰*>C°0D´¶’8L@>”«ÜÙÊÌÊH˜Ž@2 ZÒ-…˜*±}iŽø3‡ÂŠíŽ­Ç�R°° uø¼vüG÷RÑžÙäà˜†ŸNûF!aâ n9/G žÑ½8|êÅ &�ÓùMw� Q¢$ª^“ÓÛ%èÂenž¯(ˆ:ÔL]y´,˜‡qµÂ�0§‹v6Œ^hC N<2 ½¤n‚a†š0á3Ç‚¹`‚£ˆXWAXÁ@db= Œ^�¤'ǀÉÏÎJáCl|]V¤IÒŒ¬Y-2Æ—âLú´ 'ΩÌU•¯¼g$Dn�ÀÃExiSØEŠ?P©�8ÀWkãH àx.FÜsÓ‰OM‰&‚•�˜hO…Ð/trì•Ò©ùD*lÌ�CD /íÔ_ ùÔfÖÈD®€ET%�ì—¹"éu‚Ó™K‡Îz¡JÁ$X={ÓB”è'ÊBgNç²±~äD5sŸK§IØø8ªÉǹÚäCgÄ�#¼KЬ4;ºqy!7ÃIõRÁ˜—ù<âU¦$4у/=¦Ã€[/Çêµ¢Ú¬¿ù’Ý1­¼ß‹;㽸A³ÿ—ªY“þö qφ(êIG�‘‘|ÿÂÞ{Ú«M\*¼˜ìâ‚ï Á¸  ˆ‚›:éç’ùΧV�S}ý5Ë¥nÀ…¹^ìézz¢#Ò2¹£‡«Ñ!bdb)N8›ÖkIÌ{¢ú¹=y@†&BÄ/¨ØADÖ¬çÄqîU\0³ &Œî‘‹-tÓ‘�g°†zŒL¬†¯”DÄš|��Ñ&ÐAÏÿìx,ÈÁÖ"wcóõpH©$t¹6 r} Ë窕\S´÷^)¹‚JÉ5pf˜wÅ!Td~±Šz%|n}q½ÈÌüÂ/8Q `„x¹÷ôËâqÞxü¯|?üªß`¿æ7}Nþ6‹   endstream endobj 11 0 obj 1752 endobj 15 0 obj [1 /XYZ 34.0799999 813.679999 0] endobj 16 0 obj << /__WKANCHOR_2 8 0 R /__WKANCHOR_4 9 0 R /__WKANCHOR_6 15 0 R >> endobj 19 0 obj <> endobj 20 0 obj <> endobj 18 0 obj <> endobj 17 0 obj <> endobj 21 0 obj << /Type /Catalog /Pages 2 0 R /Outlines 17 0 R /PageMode /UseOutlines /Dests 16 0 R >> endobj 14 0 obj << /Type /Page /Parent 2 0 R /Contents 22 0 R /Resources 24 0 R /Annots 25 0 R /MediaBox [0 0 595 842] >> endobj 24 0 obj << /ColorSpace << /PCSp 4 0 R /CSp /DeviceRGB /CSpg /DeviceGray >> /ExtGState << /GSa 3 0 R >> /Pattern << >> /Font << /F6 6 0 R /F7 7 0 R >> /XObject << >> >> endobj 25 0 obj [ ] endobj 22 0 obj << /Length 23 0 R /Filter /FlateDecode >> stream xœí\ßk#7~ß¿bŸ q$­¼^C)$NRèC!ÄЇ£%G[ŽÞQsý÷»öúG2ŸÖßXYmì œmY+�F£™ùfF¾þùé�ò¯ïåõâéßòyûºx*ÌÄÔ¦û+×ÿ®^6¸fR¹îmc«I=›·åó×bU®ŠÇâ±ýUØzóàö¥ýr7E7à÷çoÅu7yѵ<-~mßýWºò—öÓ—òÓïíËçíxë_‹f^·tc«öã?/?ÚÊ4vÒRhÛv#?®;ÿ]üöCùmM˜›4âmGàË�W/Œ'¿t‡/WGF½]×uéL¹ü³ìÈ»ê^–íâÛ÷Æ»rù¹ü±¥oöS¹üRX¿þrÓb\×b÷-ÖlZfǺT›–æHSw-îð�‡>ÝS÷Ëv»Þ¶úÙZbúVßìV_udO,6 ó}Cåe�î‘¿ª©xÄÌeÃ–Çæ°ò©`—­esËG1² ÐV‹�yÔÂÃeHCâÂPxÓÀ xlp�ðW\X£lƒkÀ6€°à¶ÀZ rqˤš¯ržä'¶šW¯Î,ª<…ÛÇ„K—_g%�AaÓnHø·àÛAí,)Í›·¯U-êD|鲡W!W† ’;Õ½Ð2Š1$ÿF9ÖÕ;$ÈA!ˆ9œ»ï…=¬;]þ$hE4[\µrÏ–b|„‚d ¢>Í9C¸aìgÀ�ålÉxÌoä’Ó8N nSyR¸CÒ`;/7ö0 <‚ÊèÁ ©Í…oú-)ˆ\V夿ƒ.À@؃ ¨åÞ1à�*+ôÞY£A�¶OX!;ë)€�Ç7Ô´"æÊîßxÔY@,l¡Æ@Pd‡+Ò¤1Ý?Èðô< ‚�(¥Þ1…½e{ju<ë]wà‚ZäŽ)·£i£r'9«ªpƒŒÿ(˜À±¾âÀð£à 7BƒX œG‰$VXC.˜Oã+øxºˆ‚ùGï�ÇRyî�G�¼ÄöÃx3ÀÃÀ}Í(§ã—A,ÔÝ(†`¾Oé ó‚uñŒhIT1¨ï (%f§³»"DÅ NÇ£b1Z[ãuž®�(DÈQ½%§gf1žÌÏŽ#êuNÄÉ€¯8j Lä8¥ yEÕÓqEŒK ÁT‹Ó�³Î%ß�±\¼Qâ*QÅïíÀ¥¶%Õ.Ãr‰eÇØ…2`™{«�ï È&Ô|á6s;ÌͽÂÒT:.ðhA¸Wž£ÓøˆûN¡š{^£€‰&ÌÏq{Á£ €ô¸R °Ãy0Ïk"´ÓÄE",1¨&®rb1ãÈ¥ ä>¦¦G‘ßê‰q¦¶Ó]Š’¾Ù�ˆØG Zl†5{†Ú¤0Ì ¬)r ÔaÃO”Û´!Œ�Ðæ¨COwã #p&½•$2ç_‹ßË@ô ÷…n¸xlÔ€ºåa^Ð(|»yÈ|¤Úm,@# '`€Ð/6ÐD£&có^‰Ó·„‡Û„ÊÈ;IN�G%€ƒ’'d�"¹Î3ºÌƒ¸&â  RÌÙ„’ÄÓ1¸wÞWh}Ô~Ä0šבΜF£p  Ó**I9$SÀ8^ÓŠê@‘Bâ¨,i<µ‘q¾ŸÅ˜ Á2M…ú¤·L<ÈøL2ÙGŽõüLªd€I••м%dºQàuåû Þ3¦> endobj 27 0 obj << /Length1 3196 /Length 30 0 R /Filter /FlateDecode >> stream xœ}V{PT×?ßÝ»» Yö®À.°®°o`y Èû±¼V^.°Àª (¢!º%_©U˜D‘8ÆÚ¦Ó؉&Ö$ítÔÆ¶qtÇ8išq2Úi§uj§íÀ^úÝËFiú¸gÏÝï|çœï|�ß÷�K€"$Ù„"É]݃�ºýþrö²"ÍÝÑêê¸\”ˆô5äYÜÈÜ&|Šã¿â8ÖݳóÕn* „�@ Ž�Ý½í­ŠÛÝ8Þ‰cCOë«}$‚dâø"Ž•ÛZ{:Ö|bRãø6!pÏœ&„ßÏ÷’"#Ĩ2X,VK¨UMiÔêˆT±¼Ð¸ijCÍ¡;ZZÅßÌú®ƒ$ÐÀ¼+Îjrƒæ½+×½±z^Ëó#fd€’u‹÷h#í"1d-že±˜MjªÖð‘Jd2™³XUAÌvFcµe29þh=@˜8í£Øv ?oôÆîæs�áÌ“Èíå™Î(i(E¯þØÒ¨Kùð[‘4È~Ò69¢¨>õûï|p¼\ßòzõúB}R¤£âæè£‹­ˆ õI@}Œ¨ ꡎñ+‚'â™|™LŠš8MT2Úh°¢r&MœZm5Y¬9Hå ¿×»õÒ®ŒèèUQšÔ¨3ka{{J}„<,€ùƒ|O†2òás¦¥6–ÝåQÏêÇ[Í`l«ImR†È¥² -¢¥)¤â�uk?ø°Íp´Æ›³Y³F—'zmµ»ˆñà!&¨D\ƒ‹Ìcˆf;mŸÿ߻Ȯ,`rè´'ž¤ãJéKƒÐ³2Ö³RvÌúVÅiey">g­mS#———s²ÙuaÏú¬Ýº’*‹  .»ÁTí~…yhNɹ±oîîðÍ™óÔê¼&«©6C Ê¬£í³­�ÐpöѾý÷'« $.3餩*#:';»}­Å pzª�ÞýX6yJK‡ÉÉŽáÒrO‹&BèÔ?”1‰Êɤø�î_#š= C[¯áûÓ÷ͤ³vSSmõK_õäƒ[àh˜a½�‚QÕs^H!„ +@ÉS¡Y£] dmâ[.‘³˜³ drpæ›Õ+ë‹•Ö«#ž|Íd‡ƒ„O*²œ‡Õ²¹Òfì÷,”ë–\Ÿ„UR°2ça §¤ J7¶EÆÊ%Á1Êt-ÕyiObZŒ¨W¡[(”(®?Vc°Lk×ÉàÆÈÁ‚¬¬q( \!D­m‹ŸÓMeÁÜV©8³—ãh屑’¾ˆ”ÙÄF*ƒ…�åD§kv$?35m¼ÝÔyÂòÜRŸ ±Ù“µ![¥Ênà{}ÏìÐpæÁp¿·²jC”Wóh0¶xÊK÷4&ë÷–•îmf�ä.Þã¿ÂÆe— \~Ê,JP¡A2ZÅe« °Y¬f³ƒMÕ/�æò¿ÏŒÝ³`�ë�÷&÷uæÐéËBÆ é <öøL5$ùÍ«{³"Þüþô :¸óx†½ s×lwýëÎ\iB¤k£Ó=2ø|!gèjý'âuÁ1:[Bm;Àî¨ç!‚)®šph1q§/'–pý>CÝÙRX /þ¨ëçݧ²Ou%WmÉ[BSG?@Y®/ú%Å ~ç}ª¢¦¼B­öqLA„®J#� VÄEQgh$0oúÌ<@ÐÊ;4 PSD5 º 1'£¯ÄDƒR¿SoÙà ÿ½pТÜûî)*:òÙ¾‘ÛGËŠßÝ›æÌ�ÃŒÏw¦Úœù±±ùNÚUS_ŒM<š¬¨˜|06ñ»·*Ÿ‚©y´ªÂÓl0´ŒVbr›X«05=h1g•Y͆Ȭæb#•²ªÐ*Ï,T„j¥‰ùñ«ŽM¼ý6DÏÒ¶žZõ�¢Æ'Þ\å £´1Œ½¥­DiÀ^J"¶úàëCX…7Q=3Çü�ÁRKO̰�ï�o¢Ï¡‹qÿY¬4 îzYQ9^ê3Ÿ™GÏß¡›R£@ÀdN þêDý}âǛр(cs”+M ÒxEx`ÇÌ:I¥ |b(x­ïîÌGïë–�ÊÝ3lBñËï;6Ë·ìU‹¤[Q4t©køç¿È?ðé×…‘² æY¤³ª÷5PD„5fÕµ„SW]3}6€Ê§Ì“ñ/Ž—Ùzg\[›~z®b¨KÆ{¹ãŽe•?ƒv I ž-V¡¯TbüÑT¤û˜+¾¿@š ¾d†~:æ>‹@ÐáU]ˆ{éoqKä,6ã…áÇ —ïlr‰Ä/qó-l!ÚprsûÅáB€,«¢¼±]ï>i|nräÄÄæ8L½­KiN»½ºÓÞ½}^{|κÕPa§B}3`lÞ[Z6Ò¤‡ OUÉžF#[ÕÏ¡%[P›Xb`cf�I%B�DÊU%•™½¶¸GcaÓ?T0B"\%g•Ã’¥�‡àlkFÑ+$!P¤ÎLY³i×�…¯6ýÙ‘ExxQ6UY×$‰�6ˆÌÅ)I«­¡)zûÈ›�ÚHÑ&uœJíœÓò*á€H–Üe­F°Ÿl–º©È±)$¿ÙÈ>LŽ` «+Á îáÝg~�ßpµ„,^Lq’–?a4¾ø·È4ÝOtØmT*§¿!Ø=Hä¥"mãב\¡‚ !½›]CÍÒ…ì¿`–ŒáüYž‚xp}Ê3ãÜ þŸãNÑ‘r›|àÄöE¨ê(õêêO<-ÏÎÛÁ;Ä»Ä{JÓt }ÚooÉÀè|kýw>ÉŇ>Çi¼Õý4�Õ8Z¢) ký4�ü4?- QPCÖ“^ÒGɲ™t7ÙI”¤‰$#®“I-±“zÿHO´ØÖþ×õz’Ê5%iÙÿ·_IòHéçönÑÚÏÙ…½›“܃Ô6”jÙõþsº±m&íÈéBjW¹Q†’´¶ìßž\‡¼nälEº€Û¹W÷¡ä]ËôZÿB'%b=›#³D™I9îéAyÜÕ(qG•¢5¨ÁJmE½þ÷ºå3KüR”Ÿ‹Zt׿pˆË© endstream endobj 30 0 obj 2388 endobj 28 0 obj << /Type /Font /Subtype /CIDFontType2 /BaseFont /NimbusSanL-Bold /CIDSystemInfo << /Registry (Adobe) /Ordering (Identity) /Supplement 0 >> /FontDescriptor 26 0 R /CIDToGIDMap /Identity /W [0 [496 716 552 552 276 606 606 276 552 606 662 882 606 276 330 606 330 826 662 386 552 716 606 716 ] ] >> endobj 29 0 obj << /Length 525 >> stream /CIDInit /ProcSet findresource begin 12 dict begin begincmap /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> def /CMapName /Adobe-Identity-UCS def /CMapType 2 def 1 begincodespacerange <0000> endcodespacerange 2 beginbfrange <0000> <0000> <0000> <0001> <0017> [<0044> <0065> <0073> <0069> <0067> <006E> <0020> <0061> <0064> <0053> <006D> <0075> <006C> <0074> <006F> <0066> <004D> <0045> <0072> <0063> <0041> <0062> <0052> ] endbfrange endcmap CMapName currentdict /CMap defineresource pop end end endstream endobj 6 0 obj << /Type /Font /Subtype /Type0 /BaseFont /NimbusSanL-Bold /Encoding /Identity-H /DescendantFonts [28 0 R] /ToUnicode 29 0 R>> endobj 31 0 obj << /Type /FontDescriptor /FontName /QFBAAA+OpenSans /Flags 4 /FontBBox [-549.804687 -270.996093 1204.10156 1047.85156 ] /ItalicAngle 0 /Ascent 1068.84765 /Descent -292.968750 /CapHeight 1068.84765 /StemV 49.8046875 /FontFile2 32 0 R >> endobj 32 0 obj << /Length1 7172 /Length 35 0 R /Filter /FlateDecode >> stream xœmY XTG¶®S÷ÞîQi¶¡í°‹MÓ "®È#;²*"¸°j*Q$î ˆàu¢Œ :<âã�Ã3>â�ÄçLuœ8‰Y&‹v_ß©{u2¯û+úÖ­ªS§ÎòŸs „YM8B’R‚öOÙ;€o6aË_P¾bþƒ°Ÿ¢9YZRP\r.ÆŸ�Qûð]H)¾ù™â[ìßÂþ+¥ÕË' c±o"ÜË—ÜýÇí_=Ç·U,_JHö{±ï¾¸ ¢Äá³€XìˆóƒÇ÷C ˆJØ)èñ�›üË]'óá[¥Ã Nà)åÿJè7S‰û\¤â��NK™AðÅ3³ÂMt kU›i¦;�7Ù-ô³Ýð„”\À¾5ö9¢$Ä^«Ö±]àbLo—Òæf¡ÿIl)·&eϾâ©p•`G¡Tèx/ƒ“ÆÉd 1{yÊ_£§1Dï¤QzêÆ)…ÆIþò6nz,>ݘµ¨¬ôpFŒu�Šiý # `õªë·Oú{šã\]fN_/3 š..*‡™=�40-²:.h¢�·!º¤xÿ¡’bHj�Ÿ>?! ÈË'0%wr¶ãÙ°ž|GF"1„{: ‡ã¼<;Á}lØ$­hµaz­®l†nÜ8ÝŒéãtînìL¨Yîg<½@ˆ^­WkzhžùË�eƒ£|)ŽZGœŒµ:µN­u½šXÇ—îèïé�zª3Ût}ŽüAÞ¼�³¼ÍÝÚåæ B¿Ùbcö·ÎŽFq?Ò™/ÜEiÛ‚Ôôòkdü¢D½^ž�ÞÝÝ®c|½]ÇŒqõöãÊGƒO˜‹3¸Œ1†º¸2)!çh/üL>‡ŒB:j”?¸#r§×èC�$ ÝQÍí�˜Òx4)¹»ÙE¥Ï™[y¹¤˜^nš1=7÷có>ºã7þ~ÈmþŸÍäíY«h/ñ6œ¸¢%(P»ì˜ ý5—~ù“fÎLð|¥þð+^EÝìã}3xÓS[ñŒ2÷WœS’÷ì+îŸMÆ’ñÈ»—ŽÑDMl=Œù ^!²ÕŒƒR!7G«JINYqpn.µ?m [±áˆ>¹p^á¥yyâˆ�Ù™Ýï3‹ Ù]ªó„ÔÔ]§VÌlœ‘ºÊo´sFÆy³C ¤§u)U†Ðʹ˜!39r^(G;æoÃ}!Gz0:\33x]î¼îõöªˆô4>ÇfçÈòŠ}æ>>újYø$oîáG³’w­MLN#¢f;ÀövP‚ÕîÝÍëï,¼XT±íž¶jî¤eìØ“:‡ñ|Õuír˜dCÁFFÚ ôôê•“³Ë�LX³‰·{½ÚÉIs¤üØŠHñg¨ _£%¦D¥Ž ä�Üà¢uñµ¦dͺe vvå°ù %Þ“,Ÿ€tØœ4!FÞæmó·‡Ì?ôAr˜NΰAè7%ì:°_ö%!רW s’¤z† j½yÑô7•ížóœ«Š*UÜ›üÕ[}&ô�§“\ÚZ§r³Q ÄStàQ’2›¤àÎŽJfÆ É“%0ê-F¨eã);¡!øÅ/b8È $Ù’¤M{|£2³xÕEã‹Ïù.ðôȾx2? u›ø÷[U50mj5Z±»[TzpHyùûiQ¢:.nÓ‡ó‹�¡;®,‹ŒÌž6µæûk"#ùè…£^1NŠÚŸŸ¯ MówÔ@\ü–·óò““ÚŠbcFÛ!`Mö÷÷—–ZÞWXöOIÖ„ˆŒ(Ï|e\ˆ±˜Û_=)üÑO‘‘âé”Lnj9ÿðO毺zzèŽs½ü†5bö£7ÍMlÄ5ÀK([•å¡~|¨ê�V°y}ˆ�Íâ^qða_jjZú»wh¾yŸÐ¿ ôÄÿ�o^Bó·EGµ´L›Êøù-Zt-SF±á€î¹³ÕS&¯9’œÔ½~”•>;§êOhª|´9lÝôé0/ï&�úôTÛoüÆãóŸé5"ùÉ#Þ¨p Ä­P'Á³ÅUô^^Œ¼ãÛ€ªdÛ8¢Ö¸�VÕ_Þª]¾¼î“»uÕ|w³¸÷pb<Ä'n‹OLˆo{«mØÂÈŽŽI pö—Gu¹su/)‚¥•ƒ7ÊáY>{ÄU¡MÈŽ›²¨5$!ùk�áMéé5NÞWþrU•U×>]‘˜“�Ú8;ʶ¯kê47wX\~®·'¼»©.|²Æ)(pë{³f€ßÎ9)³vú8i|½Ó#ü§„Ž÷ ‰kJЇèæàá9u¼›»‹kðìèh2„Ý(‰Ñ¿ÆnµBÉPGÿïèÝ Jë‰9ÙÕøÎ›wÓüžÂAôI7&ø#€ˆ.Y„�ù]ÚÑŽ4{Ñ#k$ló‘±ÍËâך!>Õ¸‡ü+™ÜŒ–¸H�-ÊÌšlcÓݬQE¦§-¾½¼vù«ÿ< ñ¿ßò›$€¤9àã™R�&F(‚;²|¼¡½CüAü¶½ƒû"7ï¿= 5AuåÕk‹+˜ÄÜž=¢‡„(⌖Ãö�@Á]­ÖŒF½£ÖQ«ÆÝ©�Ÿ¯·³K°ÁW¼¸gOT>L/L¨• Z5BiItSò¬ˆ�æúâ`ƒEŠ«x:_¦f Yì‘å//êþ<ªjÔ 0†ÖícXíîèX`ñuBFê" ɪÀÜܺӹs�¼>c*@fö)ónù9wÞGRÔMšà:Mø"òJ¤ùP³Â4Ç\ŒED9ê‚à ƒežÁ67ÝVY1e]Ó7÷Ö7›ÞMM9x =55ýàÁ9)ÔCü~{'ÌšÕØxl:Ú¡«K|z£bñâò�>\\eåìäá¹ 7ÉR´xL”#Æ_)qc2pÔÒ½âÃîK—  £Æ¯`Ƽñþ á®˜Â¸+q“#  `\“DDn˜ýRÅÐ -ÎÑÒ¸ŸM×¹s=Í3`9ÕѧÃ|翆§Ä<Ò÷F)«m%»qd ¥§šy¢ì‹\øw657=é¼ÜyW|÷x/¤§ìóÖ½£Ño ú}ûŇâßvïÅ`¿= .¿eŸ÷F¡§nK´à©brÄr, DL�ZÄSD –:à’E[ÕpØUpCì¡mÛ]7Ly�by kܱýçž|7䫮諶ØÁˆ©Bh…R}³ ð²8>% Œ(‚:Ñß¼‘*ÊÅù Ó•ÐJ OP%åÙR¦9Ðâ'¾¯D|ÚˆºGi ©ìV Œ<½Üí’êtþ7�k`ÝÚ%&'ùëC§NO¤$ï£u‰C[+ »`kç´ÙiäpÓ¯.*o “ù‡t䟓óM–_bEÏV Æk0×ÓÛ;Iöm¯…"qS#=ù8ÑA5Ü×ûÁIÑgvμæ„ãÌžØDù­Ÿä5ÔÓמºŸŽOT7ÙœßÍâ7‹Ig¥ À•U!ö }6ðj†½Z{íóȤvTk-¥ƒnu1nÍëѱ aíºŠ´Fý!9)3ëÜ<‘� ssÞú32ßY“’>Êz’øÙåŠÅÜÌ0có«¡!¢¶Å|gÖŒ¶f ]”å-‚­pk™x^N˱Ô8æÙŸßoîï;B§o¥‘bIϸqï#p] Î<™IËàrÚÊü*1œùc/Zh JɉxJY¡“=ú¤NB?åJk,¡‚A;=vky-,õ¦„|º:mUÕµž¸8D¼®8üðÙmÛÅïÂ1àÛŒø½nuño7>�°nÙ’ë/\ÈvoxöH8+\ÃjÆÍ‚ãîr ÔòˆTÎnÔ¶2F gOüA¼Ìü£÷8Ì‚ð'žVÁê†ï¾kx­¾áÛïW®¦wÄýï_‚…Prù\ù“¸Oü¤ktu‚xu퀮]„'EÏ)f¢OZ£“x–õ EH�À4h¯ã¤Ú‡™¦0ä¤Nr�%WZˆWz)t²•CÑ•E6¥‚Þ(O šè7>§ NúŽ�ÿúÐ`s;ÝÈŸÞ…’¢ÞcW¯ôÇÊ© ðXïààñÞüÂ…é�Û�ÛÞž•‘‘ÑÞqüxûöŒ,úÄ×{ZÖro$GL+Ö@¡¸—«‡©ÓšúåõÅ%ÇzÞ?rlAié‚£G®íèLÃåÛÛ{Ÿbžˆ�Xͤ«EË@ÀcVb§‘}Àø²7ðz•�ëàyñæ±²P£Je=z”Ý@ß%££Š·³=D¼N×Lúsožy-ݺš“m 5æ�G«_‰‹£Ÿ==ÅvÄÚ‚ÏF¿PJ>¨5 >Ò�=b ® Üvì`sŠqŽj€q¥5@ˆ$CK ‚Hª'˜¬ÁQË{˜"¡ñx˜Ë®¨Ù+s’SŠ2¾¹V[“˜ø±xž>Þ kN$ÄGG§Ô`f2vlÒ²C �ØÔ¼~P¼¢Â�šÐº]‘›±²m3ª:Å‹¬ÈV‹ûÙ#‹\õ¿¿nmË6óÏ�Q¥ æ/*×Ï{3ÝH?1¿íQÅ5TV¿ÿEc#$ïów�2g/Á#=Ò%Æ8Y*ŠR¶aü’HaŸ˜òQÒH•õäIœóLjïÍ>ÔM'¢°0".m¥,‘™’dI–„P3”3"=£Ï4ñw ñBb¢œ6ܬ­Ã|ñ¯¯Z�ZÓ=lxu]VæG÷æc]Ž9á`ùâ X_Ù€Mç8ÜñËp³hö[Ìëæ£TüŸ{•c°z(ÛÊI°=•ÂûCíòÕ××ÕþëŸ õ¦¿ÅÅ쎋ˆ‰ë>ˆz¿#®=}Ο…*XùÇSpá¢Ø&žoÙÛÛ Â®[¶Yb‚àö¼ŽÓJQE‹µ’[�Iìéáhí5'cο�.ÆÙXúq(Q+ÙB˜�–«0Ý£éæAúÀ|’æ.ãÒM§ínñ ]"ÛX"2]"a@¼ ZñŒâÉæ',Ù zñ ˜äy-³MµV�îâDc¿pwó/Š¡z°g©°ƒˆŠœb¹ëN‰£ŽˆÎ§é§ôSS£y€pÍ2§<«ÿ�S>Òdϩ̶Ü9ÓÏÜØ&¾³«ééBF#Ÿ2g�–ª9 c%§=+9-•§½^¸|H¼íä<4âç‡Äú¾(úÀ~¢ÖÞp¿�»1µ¸Èaí“kÒçºú{¹¦U»ÞÛò×DàY¾¸ Ø]ÎH”¢%ÀI5 Z¿ÍIâXOƒºŽt�À®FŒø#�õõncÆ7bãZ?݃»àô1XUoݖ®éUñ§§ƒÙȵ¿�QûÒ%€Aºx5Ê�z�51ÐØà<Î}„ÐïÄîÀõ–SÎÚu+ŠvíÌeÔüP³eÂYŒì¾DŠÌ«ô˜>£#*�/»ý¦9Œö÷Þ߀aª‰¾hqÉb/$·rwL>pËåGšk™´Rá6�¤ËX^b�ö‘ _ÁíÎN6’‡u¢ "a \±)�d�b5¿|åè®¶õÐôN/RâçWFÜ׉É[�§§a=ÿcu~av^EYÔ‹y-ÛzJŠcbWæ§¥—§fÕU¯ù¨®–ÏÛœ™5V¥ÉšÛz}é2;[ÿ½£Fø€l…„¸ueS"ÀytÔÒ(_ï‚"vú&®›öÝ•§cù‘Þ }¨ŸO©zêcjËέÆSHY.Vžö,zi%^9½œáYn(…¡@+…JGéδæP7Ä,�žPô¨¾a˜MÅ7—ª–Âk+o|Ñ´mNNŒ‰mÉŽ‹÷óïØhº Ž}rÓ~«3´¶‹WŽ@mÝ_¾¾æ÷‡¯dgö´¦ÌaÅç´¨Ò̬`V#–!W,ʸJÒµÕy‚½ÎÅ¥K)²ƒr¥»Nù¶Ó“÷0—ÖÌHZð¸~…�Mhvβ‹••«W^o_¶dòdÑakbbttÛÜ„øñ~Þ>1q\”©ÛaëhD½à¿ñÕU׿\»6>±µ &ÂÜÜß¶ÌIÏW¦EÎ^˜•Ì.·ÉÄ,­|ƒÄ$Æì\¡a¨¯Ã½ç$Æ·hÁj+6fÓ¾öøV»xÿÁ�ïÝ?søËÏ‘BR°‘)0 —-œ —IœÚ@|Rë¾�±1»õ@[B< þü‹Cï<¸÷ø‡÷/öÞÈìmÜi(Xä’° \ižé îš¹Gpíjz2ÈlAºsæ‹O\þóÖÙÞSäøÿß@ÔÕÿç]4÷Ns³|) ÄÉ*W ¬Ø Ÿšïv3±°Ë6Ä ·áž­æy#'ÿ‹ý³â×D;{e¼‚QS<‰kT›Í‡±Z�3V+ãe\éÍ_#ðLeTK:)òÁ{‘þ:  r€Hz©âY+_Eò¸™¤—o U|9?’Hþ=Ì©T8·�xá¼þ;lÉAþ©â®“2¶V¸‰ï �ÄM¹ ×ß$U´Ÿ¸"½Á†4(Ãp\�ãád€Ä1ÎQ*à8V_l­"œ4(‘bEÑðÄ÷/ÆÖÄSiœñ3_x€ëÏ’9ô鯦çëq¬•ÌQ–ª{–Ïk‘Þ rš^#άá?ÚFRñ7�3 ­6Rƒ­Œæ!�<ÁÞKòxÌ4ƒè^HVáw y›|„ÁjØ�ïé0êA£èEúg͸¥Üiî?’OáWòù§‚VÊ„¡O8/<L OÅÅÅ€’S®PžT^Rþ¢¯ŠV­U�UÝT=²"VöV¾VÓ¬ª­Z¬~gõ�Õck�õdëëë#Ö? ‹¶`Øúa»‡ »m±‡h’ŠYü�uüú£$ÙhMÀ[ɹ¨å™b�dgyæÈdéÿAì™iŽ@F‘˳s²jËóÜo-I"KI YŒ+SHþVaä/! H )Ç~%™†oФÅø·çùcûÏUîd:®Yˆ«Šñ9�LÄoº´¢ ß.‘æ’ ÒÈÐ꡵¥ÈS5¾›„8@ê¤ï[Š­GK°·)-ÀÑr¤&óS…«ðM<‰!3È,’ˆôf!wA8{"!ÿ}sZ endstream endobj 35 0 obj 5458 endobj 33 0 obj << /Type /Font /Subtype /CIDFontType2 /BaseFont /OpenSans /CIDSystemInfo << /Registry (Adobe) /Ordering (Identity) /Supplement 0 >> /FontDescriptor 31 0 R /CIDToGIDMap /Identity /W [0 [595 544 264 258 515 597 251 609 251 552 405 557 567 243 590 748 543 609 613 609 608 473 609 723 608 350 923 599 336 552 626 896 521 277 472 251 500 643 628 608 773 825 772 549 567 567 497 608 567 732 464 326 326 556 566 918 265 512 722 347 347 567 319 567 398 567 567 294 294 567 264 364 ] ] >> endobj 34 0 obj << /Length 861 >> stream /CIDInit /ProcSet findresource begin 12 dict begin begincmap /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> def /CMapName /Adobe-Identity-UCS def /CMapType 2 def 1 begincodespacerange <0000> endcodespacerange 2 beginbfrange <0000> <0000> <0000> <0001> <0047> [<0053> <002E> <0020> <004C> <0050> <0069> <006E> <006A> <0061> <0072> <0065> <0031> <002C> <0056> <004E> <0067> <004B> <0052> <0075> <0064> <0073> <0068> <0044> <0070> <0074> <006D> <006F> <0066> <0045> <0043> <004D> <006B> <0049> <0063> <006C> <0079> <0042> <0041> <0062> <004F> <00AE> <0077> <0054> <0032> <0035> <0076> <0071> <0030> <0048> <007A> <005B> <005D> <0059> <005A> <0057> <004A> <0046> <0055> <201C> <201D> <0034> <002D> <0033> <0022> <0036> <0039> <0028> <0029> <0037> <003A> <002F> ] endbfrange endcmap CMapName currentdict /CMap defineresource pop end end endstream endobj 7 0 obj << /Type /Font /Subtype /Type0 /BaseFont /OpenSans /Encoding /Identity-H /DescendantFonts [33 0 R] /ToUnicode 34 0 R>> endobj 2 0 obj << /Type /Pages /Kids [ 5 0 R 14 0 R ] /Count 2 /ProcSet [/PDF /Text /ImageB /ImageC] >> endobj xref 0 36 0000000000 65535 f 0000000009 00000 n 0000016630 00000 n 0000000281 00000 n 0000000376 00000 n 0000000515 00000 n 0000009118 00000 n 0000016496 00000 n 0000000413 00000 n 0000000464 00000 n 0000000832 00000 n 0000002660 00000 n 0000000636 00000 n 0000000812 00000 n 0000003445 00000 n 0000002681 00000 n 0000002733 00000 n 0000003278 00000 n 0000003046 00000 n 0000002816 00000 n 0000002930 00000 n 0000003341 00000 n 0000003763 00000 n 0000005500 00000 n 0000003567 00000 n 0000003743 00000 n 0000005521 00000 n 0000005730 00000 n 0000008230 00000 n 0000008541 00000 n 0000008209 00000 n 0000009259 00000 n 0000009517 00000 n 0000015087 00000 n 0000015583 00000 n 0000015066 00000 n trailer << /Size 36 /Info 1 0 R /Root 21 0 R >> startxref 16735 %%EOF