%PDF-1.4 1 0 obj << /Title (þÿDesign of Ultrasonic MEMS Temperature Sensor Using COMSOL Multiphysics ® Software) /Creator (þÿwkhtmltopdf 0.12.3) /Producer (þÿQt 4.8.7) /CreationDate (D:20161219162951-05'00') >> endobj 3 0 obj << /Type /ExtGState /SA true /SM 0.02 /ca 1.0 /CA 1.0 /AIS false /SMask /None>> endobj 4 0 obj [/Pattern /DeviceRGB] endobj 8 0 obj [0 /XYZ 34.0799999 813.679999 0] endobj 9 0 obj [0 /XYZ 34.0799999 644.720000 0] endobj 10 0 obj << /__WKANCHOR_2 8 0 R /__WKANCHOR_4 9 0 R >> endobj 13 0 obj <> endobj 12 0 obj <> endobj 11 0 obj <> endobj 14 0 obj << /Type /Catalog /Pages 2 0 R /Outlines 11 0 R /PageMode /UseOutlines /Dests 10 0 R >> endobj 5 0 obj << /Type /Page /Parent 2 0 R /Contents 15 0 R /Resources 17 0 R /Annots 18 0 R /MediaBox [0 0 595 842] >> endobj 17 0 obj << /ColorSpace << /PCSp 4 0 R /CSp /DeviceRGB /CSpg /DeviceGray >> /ExtGState << /GSa 3 0 R >> /Pattern << >> /Font << /F6 6 0 R /F7 7 0 R >> /XObject << >> >> endobj 18 0 obj [ ] endobj 15 0 obj << /Length 16 0 R /Filter /FlateDecode >> stream xœí]ËnÜ6ÝÏWh] ¶Hê ü,ÐEúº(´EÐ5²èïWi<J÷èš”gì$@ÆCKyŸç>¨œÿ|ÿGö××ìüêþßìÃøyu¿ÉÏò*þdýßw‡¶9svø±1ÛîOöáóæ1{ÜÜmîºûÏÇ�©¶7�Ý»Ç “~ýðes>,`3ŒÜ_ýÚýô_f³_ºoŸ²÷¿wÇ9û >oš¶êÖ’çÆu_ÿ9üj\Þ˜³n•¦Ïý¯ýÅo~û!ûÒ/Ìž5Û ˜a�ß~Õ/i÷¿|œ™õòas~[e¶Èþ̆U¼>º-gïú_|Ì~ì—øSöðicêþWÈFÜ~ÄÁH±9¸©.)÷#ŒÔþM \ÒnGš™{.`½—þ%Wþ$×Û�v?pCl‡;2ÜÂ4þL¾°ù~ddA5w�õ¯Á‰,8i†[³AÆ!ÿ úù47H,˜{ÂmãMø$†™°BÒ=ÀÅ ¾yè¬N2u.«ÁjÑfÜú~§ŒtîjE}LŒä�µÕ§)Ѝ¹€‘K�ÑBmÅ›`“ÃzÍŒ� H-aé@ƒ®}ÔnB§"H[ݻٰ´™üéq&üü§hásÁäÏ»§ô<ån Ÿ sÑtµ£ž Q¯íÈ×ßÊ@Bf™¼ü†]"¥G=²K¸s%sç:Œ@¶’ÞÔõº´oŠ…´¿]NûÑäÎQÚWƒܘa×hÀÜ�óï‘DB~Ùº\•_¶± ù…rCW�øþÞRÊbP¥f «ÛT >¯÷L®\O¿{ÓZ˜INû®q„f‹\ÖÃ@A мߡ£ƒ‘K�‰AêàIhZÀ�tæGTÓÌ�Et¸x0O¸´o�ÝÂ$¢ °¹d�-ˆZÙÒÌšÐf@�³4BÃö|{f�ï¢àœÀ[@dQ@ýõF/ øò¦¶vPú»ÜäsÄG@ÐA®aÏÀfÐÒ¿E–ÙZ¦R€¨CDí· `;^¤6í½'©Ü¤Ì£œ!£4ê§07„`3#‘O&wžq´¼æ`ÕtGêìóR#P:à:(Ç Üs;1KZQ±ÍÓV}ëÐ,°`ì—BZ êGX >“°žÀ˜DF¯¢¥$l4ƒ_€Ò“ =Á/°¦r”f[ß9QPÓ�(¢C‘ƒ“aí°HÀÎÚ)Èâ4*8,  † qS©  ¢ÁS•è ÷h"€ˆhà,z3á4å\î¦ÙägQêdi�y@X0�ˆËK“Æ^úvC”\TU�í@\‘wÓxú@&XãO‚9I“É*3|¹MÇæÌ›Ì,Ñ!cžV&âw�Ò¸lÆrF…BN鮤õ êR ^ÑÕð „Ä>Á–Sk~)sŒ'¼?æZD•œ¨B „ ÇÐæSrÏvÌ)Ι˜„q½ïŸ!™™Ä³Ä!!Ž@5bõª„¢Ì …˂IJœQú4A‹LÆk_J€® 7�…Kn¼i ·G(à„KNlò‹ú9,xåq#¬Í­ý@gß3F( ©ðÊÐ9Š”^˜¨!Š` à/ A÷j2Q¯ÌÑkLë‹)�Xà "›0„(MpPµü>ÑSȽ–nU|Ù»€Þ.F4ÿC„P`3bd-U)~MÝÃç n'©�×FweŒ:Õ)8×XÅQˆzÐ?Eq�©à.¯>tUÖòþ�å¶� Käî^EóD Á‰ÚD<é'Z3Éé$q £Ü2ÁQ¢Ð· �E—ñ„ª¦1Ùɱ™ªG#N¸6¬¤l¢í›v÷ÂérÐì #rØ‚í|DvGýåîéÉÞè¹\Ôòô• ‡UžUÅ zcô±-�rfQ…ÎHN´EqÙÇSaš"SZ‡U7¹Ä£‹ñõÔ2EèP4–¦€§ë/WT¡VÊJ¤A60­³Þƒx5¦C@Ž«eÛº¼Ú@@@ÆXî“=ž’lϮæuDiR)hüÖ‡q½Á.w5 ¢ëx­*-qtMS,ó’Î ¡»˜eñƒT!¿à*w�HMNK¬ÔÝ�vÙ¤€LL\r ¢¤É¼µ.°Ó%«µà}™ÚvQï*©pSåOK¸b� É� ò1‹(ŸÄƒ²ÄÑQ*T-Täÿ-7QÞu¤0ÆDÑ^ÎlkDKOx–¨õeqëddšv’�ÌkQ^ª-N9óµ¿÷%Šã;%%Šãé ¡&Ìâ÷æ¦~ÅU*¬ðŒÄ™©(e�c •1“KF⯊]þŽô£ä¨5g£ˆàŽÈ¢,;†&§K¨®œÆ$ƺoçŒÝ^£é0—½óÃ=øœ-pL ¥hé#r×Ǩ+±#pOï‹?–—쬗Uy¢ˆNËÝÀvÞÚK®¦N m5h÷ÿ±Æû¿Xçµò.»Ûü> endobj 20 0 obj << /Length1 4072 /Length 23 0 R /Filter /FlateDecode >> stream xœ}WyTSW¿ß[$B „—E;‚ˆ,P�­D@QAPDD‰X‘âÖjÅi]�q¥VÛi=­§­�öXÇÚÖ¡êq:Öc±gþOÛcçœ <æ»T:Ó™<î{ßݾýþ¾ Bˆœ$†D®¬i^‘Ÿy~G¶2eSu•£²jïÂ0¤ᘥÜÖÊ2u.öƒªk7lêŽsÛ€ýÅØo«©«pÏ…�ý/±Ÿ\ëØTO‚I>!>Ø\먭šõ¡I�}!ð6Êu~û•¦Ò“;Ë}Å¡™ë²ãË”^ 7ãK±Ö[Éà ¥»ý�­»5 ïÈß_ØùÕ�lcÙŽ¼”tcÄÌœ÷GÀ8G“a%@l¨O(ê# 6¨‡^7¡JD™¼J¥DMd’&Z'DYQ9SH°^o5Y¬QjÎ�™¿õbÝšsã4š©!Ñ¡°Ôë*æø©§»ˆßËÀet¨%.n‹/Û˜eYŸ±ÌÂN‡GG~tI §Z©r_­ 4EƒÒÛ3|î;ï-�Ú—?�´J¡›e˜/ôZ'jwãÁbNÐ*¤Ί÷@Cg¾ÀŒÑ•ib—�öÌ&±¸RùÌ ô¬ŠzVIûÔ·ZÉH+Sð’µ3h›GÙùI‡J+ÏlIIh:³2bqFz('™òª§‰ƒæyIWÚ¶F›ŠçëôóK¬¦%qZmüRÎÞç(†¢ÞÛmÛû»sÁ38>â�)7N“”˜X1×b8z¸‚kú,Ï933·FFnÍÌv–™Qaâ$„+Cý½ñF#Q9•¿èþY2¹Ù hYó.¾¯¾QßKíf/od˜OF—2Cï\ƒÂ¢ê…tŒêäâMB�éä ³ü×›M8ÁT·]ß»páÞm­ŸîËÈØóÙ¶˜òÔ`´.µ<ÚVž”ZÎUBîá¯;ºnwçätÕÑõ·W?Si{n޳4*ª¬}1bB;üQ 'FL�òuf½¥™õ’J¥N) Iã샯0åœÔÙS÷w½ú*hú8[í–d€Î®�ï�´³[‘Û«c·xÛ7…�,D¦·" Ú„14+8—=û^Ú âMX°(÷»:îçg,àF¦tìØÑÁ>™Òz99#++#ùr+ûy>Ë))£Æ³‰xFµû’©æ+ǵGITc&Xe±šeT8J˜êãâ½={ð3ä†(<üƒ˜ãœ BÅÁ÷G Åa÷)×9À-d!S4Yæ_ÏñÈš„(•ZAÓS ëˆr¶¿¯[UO¸ÓÌž›ëoc4ça4�RNÏ#„=š�¬cf¢0¡å4�r|«}$�XÑ3Z�bkÖ[¬4Ç-VΨŸ 0tWLôÎ7b¡å4ÌPyªmBé^È6î\t¹¦*Á*ž†ÆÚE¹�¹lùÌ µ�‡.06ŒYq®Dçœ�¢Îß0ÅÅÍÅMîãþÀþü(˱°p\iÝ™–��æíŹÈ]åho*jm��nY(ı²ÉGAÅD£gµ ¼\¶œ[¹õ£¿¤>uKå™Ö,wñáÌòܺÍàï7½8ai™/óveO½ `ñq¨óëY¶ºžÊ5¥—Næt †HDâ”ÜAˆÌŒ‘�‚’�µ‚žK|½S£]@�âcñ'Aˆën¤�.áNbðq/žA÷»?ÉÇscÔÌrÃ×¹’‘A¦Ø�<º'3tÿPÂQ Ò%DWS{Õùæ¨8­d½ PÜ×Së)¸ßÌÙ�z:ú_\^ybý­îíÀß}ô5¹8౸ÿÞñ<ˆØûù?òêüv5¿tÌ•óXq Î^¿±¯¦`Gy²2tfå²òêÖæG’ZÞn(Øõòlƒ‡Î` ]Rд~ü\r×ѶI8ÊúÀ¥á|ø�1dŒ ÓЂ><<=)[%-'ãˆ$½1ƒ[@³¢,=ž~˜Ë§«�$Ì9²22wõüqœªjÈJÕ<£X�o19ùÙùàeµwb¦7‰É•êK ú!B?q˜T(%©RqRþ½à=¿B÷ªŠ³[€—&ÌÏ?«x¹qU·ð£eYB'˜,E‰Zmbgÿå&©´ Žn‹nX]¢OŸÅÅÑ ”9³3[‹�Æâ¶œÌ¶=Ñ4ö%V;b)¡ Q¡2Š>>´ X•\¾x�)]"\ñÞoÕõÄqöÑÌÊ‚¸Æ\ß½KKÛ‘KæG æÇé4„èƒh~0J¯IçA.ÕjŒ5J*Àj¾Ñ%<¢@|t¦gô¥%o>>úÂw§®âÀ´×öív Tî/YÜ6W­òtaï”uůo¨½)Þ½tI¼{cM拟oñwô4µ´|´+o«�3Éû‚ÿµñ#´>pògɪ æ$¼0K·ö7ê«96FÊ„,+¦¡Ÿ5Kø îjd–%j+*Ä£eÝ5ѶÚîâ²îÚ˜˜Únþ!T¯°¶ì±/9qÐiºÅ0·„¶ƒGs/‚aíªâ/°°ë£æ Wv¥§w~ØÔøá® ô×IÌÓ^ÌSþIžÂ x“GÍ¡¥‡øÍåãŠO2”ž$ê5Z/M!㙢è�Æ–UftuŸ šuƶ´ÕÇm”s8|q4âBЧ_˜i´„ºY6; –-ctÈÛKŒç²1æ~(ˆeµ ¤É&Çk�óQE‹J6dè‘ø1¿ŒL…vF@Ä ßèüÙþ�Î ®qö‘;lð°“‘…¦dð®ƒ<�ÏiîÚˆ´(žıûcý2†ÿ‰hH(‰'v”†U…©iµV fz¡9OÃ�è¡fÁ¢RbÔyË8#Wy©8uT�t9ÅœšTÖõOËzö•Ä8¬C2w÷þéÓ€uU†ë3Raûqú'ýé6[zÿé“âwƒ˜9Í_ÁôžÓ ùº`ó 8t‚Ùþíy€ãõû;¶}{ÎQ~þã4 :�J©Óz†¹ûû—7Ä鼃j²6:a¤‘qù„Øx�an0Òþ^仚aæé^ðCò T\xÐÞñýT¼1´£ýÁ… ô¶b�½�x­-ú›º\ëíÍ}1âàÙÓâ½³oˆƒ0ôožB¯>fe´ _`§Œ<¢ÙŒ'¾GÂ4äÞ¸wãÇ,‡ØÑñüè?!¦îˆ-ƒØ/e�/ã鸷O÷+ÒÍbŽ”Gæ'€3 nÞ¿r«äÕfÐDB¬Ùš�`õÏ.®0V~4&%šêj¨¬uyÙPxl`[ý€}vâLŽ�ñí¡t[fVk‰ºœ¹‹¶ÓÂA¤VýûMŸóŒý™òŸ¿±ûb¼ì0f ÙÓAÜÃö‹7 q]‚+^“–8Mþrøâ¯‘c\1`³1Ѥ“»OÒ°9‘&øMgúˆ?®9Bç(Íú'®�Æ–&ë#üRÒ‹-×úËýI ~›hÃ=E²hbGú$¶N\ïÅ�ÝÇ17œ3ãX³¤…�4’OÉ7åøœ€Oá'†0s˜L/s—c}ÙZÖÉ^ádøI=w•û+Oxÿ?Èÿ,‹·“’<Â=±ú¿~I!u¤µ]OV‘•¤šl@y%$3,’,ÁóY0Ñ3’0|æþæz#‰–ž@²gþßþ@2ŸT‘iïZìé'F6b«‘8×"µ¹Úp&eBN >«HެDªWU#�@â •øTa{"y)ŽÕàȤӤ�«pu=rÞ8I¯”§:’(¤"‘2LPf’�{j‘_£$#9®•¨L´¦ 5hD®Ô믛<3>ž‰ü“Q‹RùozÔõ endstream endobj 23 0 obj 3055 endobj 21 0 obj << /Type /Font /Subtype /CIDFontType2 /BaseFont /NimbusSanL-Bold /CIDSystemInfo << /Registry (Adobe) /Ordering (Identity) /Supplement 0 >> /FontDescriptor 19 0 R /CIDToGIDMap /Identity /W [0 [496 716 552 552 276 606 606 276 606 330 716 276 330 386 552 552 826 662 662 606 882 606 606 716 772 606 606 552 731 772 716 606 ] ] >> endobj 22 0 obj << /Length 581 >> stream /CIDInit /ProcSet findresource begin 12 dict begin begincmap /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> def /CMapName /Adobe-Identity-UCS def /CMapType 2 def 1 begincodespacerange <0000> endcodespacerange 2 beginbfrange <0000> <0000> <0000> <0001> <001F> [<0044> <0065> <0073> <0069> <0067> <006E> <0020> <006F> <0066> <0055> <006C> <0074> <0072> <0061> <0063> <004D> <0045> <0053> <0054> <006D> <0070> <0075> <0043> <004F> <004C> <0068> <0079> <00AE> <0077> <0041> <0062> ] endbfrange endcmap CMapName currentdict /CMap defineresource pop end end endstream endobj 6 0 obj << /Type /Font /Subtype /Type0 /BaseFont /NimbusSanL-Bold /Encoding /Identity-H /DescendantFonts [21 0 R] /ToUnicode 22 0 R>> endobj 24 0 obj << /Type /FontDescriptor /FontName /QYAAAA+OpenSans /Flags 4 /FontBBox [-549.804687 -270.996093 1204.10156 1047.85156 ] /ItalicAngle 0 /Ascent 1068.84765 /Descent -292.968750 /CapHeight 1068.84765 /StemV 49.8046875 /FontFile2 25 0 R >> endobj 25 0 obj << /Length1 6064 /Length 28 0 R /Filter /FlateDecode >> stream xœ…X \Te»Ÿ³Ì †Ê°Ì¨„0Žì"Â0 ˆˆ ";$;ÂȪˆ€ «.!’û²˜Æ%庠yÉLMM4>ò’™¥·¬¾JÉ›•Ù.Ìñ{Þsòwûý¾;‡Ãœ÷�÷}Ÿýÿ<Ï!@Q�µ„%$.ÁÛ·uúþœÙ‚wÖ¢¢• �d»]Å燄؜-ÈÏÎËÿýŽcø^â�™\¦å\õ*µÊàkð7ø¹ºH—ÁÅà¯S©å.Ú r™Z¦VIÇÀæ-�„�ÍiK ޤ$Áx§°ˆ�理¬]sãÎ}WG]t €ƒ}è¬�÷R“ öò’"msQ©afHY”ïw7}x~^ëáü<ˆkˆž´0ÆÛ×ÕÝ'!srÖôôkØH“Ñ„ˆ ø"M[äp‚«K38�œªq�&P§ÑÎÖN˜ �=k‚Öɑʄ–å ôϢт\©Uê” îÁ{¦ïZ::˜¦Ói¦ûÓ»|—É“¹eªE�Ÿ~Ç^çÒÉx2 w¹jQ®HIoålУ"PrW‰ ;¥³Êà¯×Ëe’2ØyEB|Âʶù™ŒÍYCàÊMGuñ9 r®,0 £ö¤§¶_¥ ðß[ u�ÄÄW!J) ]7=8q�縱))M¶å�œÔ’+WèVÌŸL A: ‘õrÄyQR -;”ƒ>RP‘Ô:Ê�“øe QÊœÁP±7"² �{Ã#¡½Î^19%q �x…OffåÙÌùÀô¼<{@júÓ^é9sÁG¦K\xcÜd¯³I:cÖ‡&=A­´"3 ù/Ð�l¨.•:-a – ú‘¹º@r{ûipxÞÃÍáy€çÜ<žwàÂÁ=Ð~,Ø?o°w ö—$‚d™-�?z݇# ç�Lï�­”~;%»?xúºcqñíí 1%#½¬'?�é®�=˸à–é]™­àžlˆõöB(ù¡ƒ:“qáD�ùHg£5e£ÉýôèAsêQ¬­b¤‡[ÿ)Á}nÆ‚º˜ChGd0nÚþ‰Ñ·zóÒ€ÓÙèXe­åŽÜŠvø?œcâ3|"ê2æ¯è6³™™ù±ˆy/xyã�t¢Ên…ÄÀPþ�É!Ñ# rº…Pø´G¨®nk9㜠•‚—i3#+Êl¯¬ RŠYÕZäL#yˆÒÊœ<ì4Rz¥¶b)zi�qfÍ/›·Ö¬»{}e•i$gœää±´˜øW×ÇÆ�d‚ÃæÚÂî�ƒÅÞ½uï.¾ŒNÙàb¥dïARJÓ¾Äy”óO²›‘¢=ÒÃðU2’¡)Ð=�ld4H‘(³ðÇu5°aý¯±ñq^º€³|„“ ñ­¯ì\j[¿F‚uS#XY«¶ªF�!¹wIQP} Y¢<_)⨕”i~”òˆ(`Ƌ˩«û¡~Eiðô µ?ÞÛX7x>1¡íPrbbr[Û¼ÆYøyw3Ì™³nÝ1°ll€–aàfqIIÑG”Aa‘¤Ã‡œmaKœÑ¿µbâ7«QçêŠ&Ñ:S‚z‰"�4v�EÙ7·+ªª*?ù¢r¤œk¯ö‰�†è¸#õѱ1Ñõ¯×ï+ÝØx(..üù°2s~ŸöÛü\X¶¢ïfáÔãk(g ú)ú(©Öh®§Ä†Kƒ¢aú´š£ñqíÇXèÒ3JßC“ —n˜5 o13ÎÔ¿à9 Ÿ?d®åƒ>D•‘Ò¹4 m¬xt/çaµi¡´v‚åËk@øØÚ#ìúœNLLJ>—É2ä»ü·ðùBÓR&kWxØŽ3gPË/FË—¢e¼¥L#†Ó_Æ�.½”¶åbõ@5%]léŠÒ럮ŒÍHO\77Ìx°eÆLG'()z§³#¨½¶2hšZåë³ýÝ9³Ásϼ„9{ÜUj·äo¯é“<üý£jã¢!¼n68»Ì˜äèdïà77<ÜŒ¹ì(/OˆŽÂ­]OS‹Uç7{DüD—£eUÄEÌf*ô'­ˆ£ò!œQ›¥àIå`Žß®ª€ªo‰ª­DØQ”^Bìl‰Â—^¿[ø™b%…Эˆ@Öæ½¶);§_DÍåKo|¼x±™7(kc‘·žZ ?Ã3ÍX-Û™oö�Á¬·ic4¢24 î�¦û¸¾–m‡é`µ,„¸-vÇ4òˆ±¢2V?}È_à¯cõê(Å‹ÆIr_ ‡ÑÂHYTi%Õsü…“oÝÂù��'`�<9P k«?®~iUõO?¯^ËÜZ{z°âX ùÝWàÚ{ÂAá“–W¡¥<Áµ¥ Z^Ešøá­øs˜»F¡ ¬†ÕRciõÈrY]¦®ÓG™YÛ™!¿cµÛQ¸!xóçž„2…Ð�´:«T¢úy 9‹rÑÊEi+1n V1;•’‹•ËŸÂ;vAäç]>“ŸÇw ÆlÛ¾cÇ {|0ìLvNnö[ìzíLŒ'Käž~8(d�z7Z1bÚÔ÷O Y>÷fûng¦ œA�Òˆ¹€\(‰í}lhÀØÙÒŒÊQ¦´ÍpÜ(í”sâí�}0¡æåðÈM³~Ã÷ÓcÞˆ�KM{ç øœLO…ùoó])©o×$$�1Uø¬»¸„ 4Ô½à/hv˜îΙ]_‡�4Sa;Ní§AbøS}Z«% Ïf1λÇV§pwè»(Ü:^`P(FŒcÝsúŠÁNÁY[]<*Ü`j¦~Øi4­Á:"÷öí¨€Œt=SnÚ|¬lbTóÙ€¨+r¶)ZPÔ->@ÃÞc’M}L¿é“¹œM^·nð,]퀫GÉE;Ѫ³>v+bEKáë–ýƒö+W ;¥Ü3{ö‚I^ f¯ ²×¢¦C=À„ZGÙ4ÏJ„;L³œú² RM„ïàNs³9ZdËÑ´þ­ŠvhG@@ÄZ l¼`¥‰:'Ч€›BÇ(…`É[½zsÐÈw DrZìñÖwž<åÎ1ѦĆæ í (i¢æÅF×Ú�=KdÄ–ƒ Ñ1ŒXô÷¿|¿ÿ—G÷îŸ;òÍWxB0ž`)�ÌPéOQŽæ:Æ�~çÁÍ‘¹ýP}L4ã#üñÕׇßî¿÷è—þû—;ï?À3\ѳ¨eŒs ñ!&yü;#Ôœ 8½-ÔÀÎsÂuáçF-d@›é�©Î ¡¸û%Ä®>ì&0ÏF®ÒJ„(;Ú8»()ÊJ8Ë=Þ´¥®öIswó4®!9¡õÀí{ÇÂ_çu[…Â?÷îǦpw t¿ …_uÁÆ,qW,²FrŸ>”…"…HÃ�D#�a,×ò4l´¬ØMPç‡Hª¤îXê�ðu"ÈÓ�Cy€VGrs³(ÎwŠç¤ŒB8å1)ú‡Ã}u À·c’øòs;�÷^ë<�½HvÎñξ¾�Y9‹S’›w;¾»!-%%¥¡ñĉ†Ý)iÌ·™QØ�¿<}¼P9Â~v̘YÛ%íÏË?ÞÙsõèñE‹Ž½v¬±9 ·ïnè>ˆz„s¼=Êê#å.¹�JŠrÚ�H/"œ”VÎZ½NõWi1܈³?ÄÆo?‘œ„ÝÅoeY9éÆâÂlX%wìêÈÏ‹ˆ\�•”\”˜VYVóQegÜšš6^¡N›¿óƲåÖV^û½ÇŒp Ø1Q §ÃØqaËÂ<ܲsÍ›Oîà(~kĤÍ2®.´�u2øó©Wº…í¸‰Ο†m;„{¿÷Á”–æ�°ûÂE¾ëüyáupصs`Yc­h°6`¦¶+jÑ2æâE=Tß ¬Ìñ%cbÿ#&š��•ê—ê[•XÛ|ù¢Å˜šöçF–U¦¥~ä|o!vŽX¿ô•lÂ:Ñ,››àHãŸïíܹ¯S-ç¡[9£–%\ñ}Âü*µ)Ö¥Tû`§áœC`݉@¶óasWgÄ'ä¦öüx½¢<6öcá"óh;ÔœŒ‰O(Çš`üø¸å‡/9¹¥ncŸpMA³žÐ&f=¢5G(- ÿmæCÖ¯CÆïÂ׆ŸÿúÏž�%4B$óÿeAO”¶�¿€–£½²)zÄ+�Ãý¸Â;L�LWçáxN1ÅC0@¼Ð ñ;Ù»ƒîpÛe…˜*¨,ÄX÷ÎáŒTþ)‡*^+©8´a$I8/¨¨úíáªU•¿~_½jðŸQQmíQQímˆñw…õgÏÁÅ P «ß:—. õÂEL¡»ë!‚°ôÞ±‹&K�îŒäŒžö+}iù÷�`+ëEä"žÂ=Š­¦Ã„X¬%äéZY¯”{Ÿùr×É%.�2ÒÌØÒwd¤‡+%FùrÒÉÈÈ!¼;¹zr~#!üMRÍÝ =l(ÎåW¾×k®×Þ$ޏ·“C‹‹ß:¼«I)ÛGJ¹[x÷ãý€´q�qÿ Rȹâ^º/H¤×ݤVDªy,”�ÎY+Þ›ôȉš½@æ1]Ä�©'‰ò@ÒÃql$Áœò`Iªe‡Iòhäo‰g–âs= ¿=ñ^ˆrÚ‘²¯ò%L„H‚Ø€1ú€Ál`ö1'˜ŸÙñl[Êîe/²rîØ×ìãÞã~ãgðqü6~Š¿ÄÈÆËæÈ²e‡dŸÊËÇÈ�åQò"ù6ù1ùçŠDE«¢×Bn1ÍbµÅkwEM’D Yâo9IÇÜ œ…ô†ÁüÌ`�fm~fÉ4ñÝ-}æžYÃcÇ�a~–!r”™ŸG!½õ$Ž,#ù¤w&�lü.Å"Ÿ,"å¤Ç+ÈLœÉWäáÿ¸Î ï¿ïr"³pÏbÜ•‡Ï>d ^ÉâŽRœ]*®õ!“Å_†ví-@žÊpn*v Þ¤R¼&ãoËðÎÅ_óq´OZ„¿ái?¥ø¿g¢I™Mæ�X> /FontDescriptor 24 0 R /CIDToGIDMap /Identity /W [0 [595 544 264 258 609 552 923 251 251 567 243 722 597 405 543 732 549 608 350 609 500 609 521 557 472 599 608 609 613 473 515 608 277 552 219 773 628 722 497 643 772 464 336 319 896 294 294 520 626 825 567 723 608 567 773 567 567 ] ] >> endobj 27 0 obj << /Length 756 >> stream /CIDInit /ProcSet findresource begin 12 dict begin begincmap /CIDSystemInfo << /Registry (Adobe) /Ordering (UCS) /Supplement 0 >> def /CMapName /Adobe-Identity-UCS def /CMapType 2 def 1 begincodespacerange <0000> endcodespacerange 2 beginbfrange <0000> <0000> <0000> <0001> <0038> [<0053> <002E> <0020> <004B> <0061> <006D> <0069> <006C> <0031> <002C> <0047> <0050> <0072> <0067> <0048> <0054> <0070> <0074> <0068> <0079> <006E> <006B> <0065> <0063> <006F> <0064> <0075> <0052> <0073> <004C> <0062> <0049> <0045> <0027> <004F> <0041> <0055> <0076> <0042> <0077> <007A> <0066> <002D> <004D> <0028> <0029> <0078> <0043> <00AE> <0033> <0044> <0071> <0032> <0051> <0034> <0030> ] endbfrange endcmap CMapName currentdict /CMap defineresource pop end end endstream endobj 7 0 obj << /Type /Font /Subtype /Type0 /BaseFont /OpenSans /Encoding /Identity-H /DescendantFonts [26 0 R] /ToUnicode 27 0 R>> endobj 2 0 obj << /Type /Pages /Kids [ 5 0 R ] /Count 1 /ProcSet [/PDF /Text /ImageB /ImageC] >> endobj xref 0 29 0000000000 65535 f 0000000009 00000 n 0000014649 00000 n 0000000325 00000 n 0000000420 00000 n 0000001163 00000 n 0000008129 00000 n 0000014515 00000 n 0000000457 00000 n 0000000508 00000 n 0000000559 00000 n 0000000996 00000 n 0000000720 00000 n 0000000621 00000 n 0000001059 00000 n 0000001480 00000 n 0000003756 00000 n 0000001284 00000 n 0000001460 00000 n 0000003777 00000 n 0000003986 00000 n 0000007153 00000 n 0000007496 00000 n 0000007132 00000 n 0000008270 00000 n 0000008528 00000 n 0000013271 00000 n 0000013707 00000 n 0000013250 00000 n trailer << /Size 29 /Info 1 0 R /Root 14 0 R >> startxref 14747 %%EOF