论文和技术资料

Parametric finite element simulations were performed to study the effect of film thickness, and electrode size on the different impedance parameters for insulating thin films deposited on a conductive substrate. COMSOL Multiphysics^®was used to solve the quasi-static form of Maxwell’s electromagnetic equations in time harmonic mode. Several types of 2D models (linear and axisymmetric) were considered. The full model dealt with a configuration in which the impedance is measured between two electrodes deposited on top of the films.