论文和技术资料

Large-aperture precision optical components are widely used in aerospace, micro-nano manufacturing, lithography, and many other fields. Their surface roughness and figure accuracy critically affect the performance of the overall optical system. When using a vertical interferometer for surface inspection, equipment stability is essential to ensure measurement accuracy and repeatability. This necessitates that the marble platform supporting the optical components possesses sufficient stiffness. This study employs finite element analysis based on COMSOL to establish a mechanical model of a meter-scale marble platform and computes its natural frequencies under free-state conditions to evaluate dynamic stiffness characteristics. Furthermore, hammer-impact modal testing was conducted to validate the simulation results. The results show that the simulated first-order natural frequency is 237.5 Hz, while the experimentally measured value is 242.7 Hz, yielding a relative error of 2.18%. Moreover, the first six mode shapes show good agreement between simulation and experiment, confirming the reliability of the finite element model. This model can serve as a reference for subsequent structural optimization and dynamic performance studies.