论文和技术资料

The paper presents finite element simulation of a surface acoustic wave (SAW) linear motor. The function of SAW linear motor depends on the principle of friction drive provided by SAW propagating on a piezoelectric substrate. The SAW motor comprises of a slider driven by Rayleigh wave generated on a piezoelectric stator using an interdigital transducer (IDT) fabricated on surface of the stator. In the simulation, a lithium niobate piezoelectric substrate is used as the stator on which aluminum IDTs are fabricated at the two side ends and a cuboid slider with preload is placed in the path of SAW propagation. The characteristics of displacement, velocity, and forces acting on the slider for continuous wave excitation are studied.